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Sensors 2018, 18(6), 1687; https://doi.org/10.3390/s18061687

FEM Analysis of Sezawa Mode SAW Sensor for VOC Based on CMOS Compatible AlN/SiO2/Si Multilayer Structure

1
Department of Electrical and Electronics Engineering, Universiti Teknologi PETRONAS, 32610 Seri Iskandar, Perak, Malaysia
2
Department of Mechanical Engineering, Universiti Teknologi PETRONAS, 32610 Seri Iskandar, Perak, Malaysia
*
Author to whom correspondence should be addressed.
Received: 17 February 2018 / Revised: 28 March 2018 / Accepted: 29 March 2018 / Published: 24 May 2018
(This article belongs to the Special Issue Surface Acoustic Wave Sensors)
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Abstract

A Finite Element Method (FEM) simulation study is conducted, aiming to scrutinize the sensitivity of Sezawa wave mode in a multilayer AlN/SiO2/Si Surface Acoustic Wave (SAW) sensor to low concentrations of Volatile Organic Compounds (VOCs), that is, trichloromethane, trichloroethylene, carbon tetrachloride and tetrachloroethene. A Complimentary Metal-Oxide Semiconductor (CMOS) compatible AlN/SiO2/Si based multilayer SAW resonator structure is taken into account for this purpose. In this study, first, the influence of AlN and SiO2 layers’ thicknesses over phase velocities and electromechanical coupling coefficients (k2) of two SAW modes (i.e., Rayleigh and Sezawa) is analyzed and the optimal thicknesses of AlN and SiO2 layers are opted for best propagation characteristics. Next, the study is further extended to analyze the mass loading effect on resonance frequencies of SAW modes by coating a thin Polyisobutylene (PIB) polymer film over the AlN surface. Finally, the sensitivity of the two SAW modes is examined for VOCs. This study concluded that the sensitivity of Sezawa wave mode for 1 ppm of selected volatile organic gases is twice that of the Rayleigh wave mode. View Full-Text
Keywords: AlN; FEM simulation; Sezawa mode; VOC AlN; FEM simulation; Sezawa mode; VOC
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Aslam, M.Z.; Jeoti, V.; Karuppanan, S.; Malik, A.F.; Iqbal, A. FEM Analysis of Sezawa Mode SAW Sensor for VOC Based on CMOS Compatible AlN/SiO2/Si Multilayer Structure. Sensors 2018, 18, 1687.

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