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Journal: Sensors, 2018
Volume: 18
Number: 1687

Article: FEM Analysis of Sezawa Mode SAW Sensor for VOC Based on CMOS Compatible AlN/SiO2/Si Multilayer Structure
Authors: by Muhammad Zubair Aslam, Varun Jeoti, Saravanan Karuppanan, Aamir Farooq Malik and Asif Iqbal
Link: https://www.mdpi.com/1424-8220/18/6/1687

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