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Journal: Sensors, 2018
Volume: 18
Number: 1687
Article:
FEM Analysis of Sezawa Mode SAW Sensor for VOC Based on CMOS Compatible AlN/SiO2/Si Multilayer Structure
Authors:
by
Muhammad Zubair Aslam, Varun Jeoti, Saravanan Karuppanan, Aamir Farooq Malik and Asif Iqbal
Link:
https://www.mdpi.com/1424-8220/18/6/1687
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