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Open AccessArticle

Development of a Micro/Nano Probing System Using Double Elastic Mechanisms

School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology, Hefei 230009, China
School of Mechanical Engineering, Dalian University of Technology, Dalian 116024, China
Author to whom correspondence should be addressed.
Sensors 2018, 18(12), 4229;
Received: 18 October 2018 / Revised: 28 November 2018 / Accepted: 28 November 2018 / Published: 2 December 2018
(This article belongs to the Special Issue Sensors for Precision Dimensional Metrology)
To meet the requirement of high precision measurement of coordinate measurement machine system, a compact microprobe has been designed for 3D measurement in this paper. Aiming to reduce the influences of signal coupling during the probing process, the probe has been designed by adopting two elastic mechanisms, in which the horizontal and vertical motions of the probe tip can be separated by differential signals of quadrant photodetectors in each elastic mechanism. A connecting rod has been designed to transfer the displacement of the probe tip in vertical direction from lower to upper elastic mechanisms. The sensitivity models in horizontal and vertical directions have been established, and the sensor sensitivity has been verified through experiments. Furthermore, the signal coupling of three axes has been analyzed, and mathematical models have been proposed for decoupling. The probing performance has been verified experimentally. View Full-Text
Keywords: micro/nano CMM; probe; quadrant photodetector; elastic mechanisms micro/nano CMM; probe; quadrant photodetector; elastic mechanisms
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MDPI and ACS Style

Li, R.-J.; Xu, P.; Wang, P.-Y.; Fan, K.-C.; Cheng, R.-J.; Huang, Q.-X. Development of a Micro/Nano Probing System Using Double Elastic Mechanisms. Sensors 2018, 18, 4229.

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