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Sensors 2017, 17(8), 1854; https://doi.org/10.3390/s17081854

Fabrication and Characterization of Flexible and Miniaturized Humidity Sensors Using Screen-Printed TiO2 Nanoparticles as Sensitive Layer

1
Nano and Microelectronics Group, BioSense Institute, 21000 Novi Sad, Serbia
2
Institute of Nanoscience and Nanotechnology, NCSR “Demokritos”, Patriarhou Gregoriou & Neapoleos, 15310 Aghia Paraskevi, Greece
3
Faculty of Technology, University of Novi Sad, 21000 Novi Sad, Serbia
*
Author to whom correspondence should be addressed.
Received: 30 June 2017 / Revised: 24 July 2017 / Accepted: 27 July 2017 / Published: 11 August 2017
(This article belongs to the Special Issue Flexible Electronics and Sensors)
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Abstract

This paper describes the fabrication and the characterization of an original example of a miniaturized resistive-type humidity sensor, printed on flexible substrate in a large-scale manner. The fabrication process involves laser ablation for the design of interdigitated electrodes on PET (Poly-Ethylene Terephthalate) substrate and a screen-printing process for the deposition of the sensitive material, which is based on TiO2 nanoparticles. The laser ablation process was carefully optimized to obtain micro-scale and well-resolved electrodes on PET substrate. A functional paste based on cellulose was prepared in order to allow the precise screen-printing of the TiO2 nanoparticles as sensing material on the top of the electrodes. The current against voltage (I–V) characteristic of the sensor showed good linearity and potential for low-power operation. The results of a humidity-sensing investigation and mechanical testing showed that the fabricated miniaturized sensors have excellent mechanical stability, sensing characteristics, good repeatability, and relatively fast response/recovery times operating at room temperature. View Full-Text
Keywords: humidity sensors; flexible substrate; TiO2 nanoparticles; screen-printing; laser ablation humidity sensors; flexible substrate; TiO2 nanoparticles; screen-printing; laser ablation
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Dubourg, G.; Segkos, A.; Katona, J.; Radović, M.; Savić, S.; Niarchos, G.; Tsamis, C.; Crnojević-Bengin, V. Fabrication and Characterization of Flexible and Miniaturized Humidity Sensors Using Screen-Printed TiO2 Nanoparticles as Sensitive Layer. Sensors 2017, 17, 1854.

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