Next Article in Journal
Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type
Next Article in Special Issue
A Novel Permanent Magnetic Angular Acceleration Sensor
Previous Article in Journal
Performance Analysis of Several GPS/Galileo Precise Point Positioning Models
Previous Article in Special Issue
Strong Ferromagnetically-Coupled Spin Valve Sensor Devices for Droplet Magnetofluidics
Article

A 3-Axis Miniature Magnetic Sensor Based on a Planar Fluxgate Magnetometer with an Orthogonal Fluxguide

by 1,2,* and 1
1
Institute of Mechatronic Engineering, National Taipei University of Technology, Taipei 106, Taiwan
2
Department of Mechanical Engineering, National Taipei University of Technology, Taipei 106, Taiwan
*
Author to whom correspondence should be addressed.
Sensors 2015, 15(6), 14727-14744; https://doi.org/10.3390/s150614727
Received: 16 March 2015 / Revised: 30 May 2015 / Accepted: 4 June 2015 / Published: 19 June 2015
(This article belongs to the Special Issue Magnetic Sensor Device-Part 1)
A new class of tri-axial miniature magnetometer consisting of a planar fluxgate structure with an orthogonal ferromagnetic fluxguide centrally situated over the magnetic cores is presented. The magnetic sensor possesses a cruciform ferromagnetic core placed diagonally upon the square excitation coil under which two pairs of pick-up coils for in-plane field detection are allocated. Effective principles and analysis of the magnetometer for 3-D field vectors are described and verified by numerically electromagnetic simulation for the excitation and magnetization of the ferromagnetic cores. The sensor is operated by applying the second-harmonic detection technique that can verify V-B relationship and device responsivity. Experimental characterization of the miniature fluxgate device demonstrates satisfactory spatial magnetic field detection results in terms of responsivity and noise spectrum. As a result, at an excitation frequency of 50 kHz, a maximum in-plane responsivity of 122.4 V/T appears and a maximum out-of-plane responsivity of 11.6 V/T is obtained as well. The minimum field noise spectra are found to be 0.11 nT/√Hz and 6.29 nT/√Hz, respectively, in X- and Z-axis at 1 Hz under the same excitation frequency. Compared with the previous tri-axis fluxgate devices, this planar magnetic sensor with an orthogonal fluxguide provides beneficial enhancement in both sensory functionality and manufacturing simplicity. More importantly, this novel device concept is considered highly suitable for the extension to a silicon sensor made by the current CMOS-MEMS technologies, thus emphasizing its emerging applications of field detection in portable industrial electronics. View Full-Text
Keywords: 3-axis magnetometer; planar fluxgate; fluxguide; CMOS-MEMS 3-axis magnetometer; planar fluxgate; fluxguide; CMOS-MEMS
Show Figures

Figure 1

MDPI and ACS Style

Lu, C.-C.; Huang, J. A 3-Axis Miniature Magnetic Sensor Based on a Planar Fluxgate Magnetometer with an Orthogonal Fluxguide. Sensors 2015, 15, 14727-14744. https://doi.org/10.3390/s150614727

AMA Style

Lu C-C, Huang J. A 3-Axis Miniature Magnetic Sensor Based on a Planar Fluxgate Magnetometer with an Orthogonal Fluxguide. Sensors. 2015; 15(6):14727-14744. https://doi.org/10.3390/s150614727

Chicago/Turabian Style

Lu, Chih-Cheng, and Jeff Huang. 2015. "A 3-Axis Miniature Magnetic Sensor Based on a Planar Fluxgate Magnetometer with an Orthogonal Fluxguide" Sensors 15, no. 6: 14727-14744. https://doi.org/10.3390/s150614727

Find Other Styles

Article Access Map by Country/Region

1
Only visits after 24 November 2015 are recorded.
Back to TopTop