Sensors 2015, 15(6), 14745-14756; https://doi.org/10.3390/s150614745
Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type
Graduate Institute of Photonics and Optoelectronics and the Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan
†
These authors contributed equally to this work.
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Author to whom correspondence should be addressed.
Academic Editor: Stefano Mariani
Received: 31 March 2015 / Revised: 12 May 2015 / Accepted: 13 May 2015 / Published: 22 June 2015
(This article belongs to the Section Physical Sensors)
Abstract
Three different electrothermally-actuated MEMS micromirrors with Cr/Au-Si bimorph actuators are proposed. The devices are fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. (Durham, NC, USA). A silicon-on-insulator MEMS process has been employed for the fabrication of these micromirrors. Electrothermal actuation has achieved a large angular movement in the micromirrors. Application of an external electric current 0.04 A to the bending-type, restricted-torsion-type, and free-torsion-type mirrors achieved rotation angles of 1.69°, 3.28°, and 3.64°, respectively. View Full-Text
Figure 1
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Tsai, C.-H.; Tsai, C.-W.; Chang, H.-T.; Liu, S.-H.; Tsai, J.-C. Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type. Sensors 2015, 15, 14745-14756.