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• Manickam, A
• Johnson, C
• Kavusi, S
• Hassibi, A
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• Johnson, C
• Kavusi, S
• Hassibi, A
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• Manickam, A
• Johnson, C
• Kavusi, S
• Hassibi, A

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Sensors 2012, 12(11), 14467-14488; doi:10.3390/s121114467

Article

Interface Design for CMOS-Integrated Electrochemical Impedance Spectroscopy (EIS) Biosensors

Arun Manickam ^1,2,* , Christopher Andrew Johnson ², Sam Kavusi ² and Arjang Hassibi ¹

¹ Department of Electrical and Computer Engineering, University of Texas at Austin, Austin, TX 78712, USA ² Robert Bosch Research and Technology Center, Palo Alto, CA 94306, USA

* Author to whom correspondence should be addressed.

Received: 16 August 2012; in revised form: 4 September 2012 / Accepted: 18 October 2012 / Published: 29 October 2012

(This article belongs to the Special Issue Sensors and Biosensors Using Label Free Chemistries)

Download PDF Full-Text [3406 KB, uploaded 29 October 2012 11:25 CET]

Abstract: Electrochemical Impedance Spectroscopy (EIS) is a powerful electrochemical technique to detect biomolecules. EIS has the potential of carrying out label-free and real-time detection, and in addition, can be easily implemented using electronic integrated circuits (ICs) that are built through standard semiconductor fabrication processes. This paper focuses on the various design and optimization aspects of EIS ICs, particularly the bio-to-semiconductor interface design. We discuss, in detail, considerations such as the choice of the electrode surface in view of IC manufacturing, surface linkers, and development of optimal bio-molecular detection protocols. We also report experimental results, using both macro- and micro-electrodes to demonstrate the design trade-offs and ultimately validate our optimization procedures.

Keywords: Electrochemical Impedance Spectroscopy; integrated biosensors; CMOS integrated circuit; label-free; real-time; microarrays

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