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Keywords = surface acoustic resonators

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23 pages, 12169 KiB  
Article
Effect of Quasi-Static Door Operation on Shear Layer Bifurcations in Supersonic Cavities
by Skyler Baugher, Datta Gaitonde, Bryce Outten, Rajan Kumar, Rachelle Speth and Scott Sherer
Aerospace 2025, 12(8), 668; https://doi.org/10.3390/aerospace12080668 - 26 Jul 2025
Viewed by 206
Abstract
Span-wise homogeneous supersonic cavity flows display complicated structures due to shear layer breakdown, flow acoustic resonance, and even non-linear hydrodynamic-acoustic interactions. In practical applications, such as aircraft bays, the cavity is of finite width and has doors, both of which introduce distinctive phenomena [...] Read more.
Span-wise homogeneous supersonic cavity flows display complicated structures due to shear layer breakdown, flow acoustic resonance, and even non-linear hydrodynamic-acoustic interactions. In practical applications, such as aircraft bays, the cavity is of finite width and has doors, both of which introduce distinctive phenomena that couple with the shear layer at the cavity lip, further modulating shear layer bifurcations and tonal mechanisms. In particular, asymmetric states manifest as ‘tornado’ vortices with significant practical consequences on the design and operation. Both inward- and outward-facing leading-wedge doors, resulting in leading edge shocks directed into and away from the cavity, are examined at select opening angles ranging from 22.5° to 90° (fully open) at Mach 1.6. The computational approach utilizes the Reynolds-Averaged Navier–Stokes equations with a one-equation model and is augmented by experimental observations of cavity floor pressure and surface oil-flow patterns. For the no-doors configuration, the asymmetric results are consistent with a long-time series DDES simulation, previously validated with two experimental databases. When fully open, outer wedge doors (OWD) yield an asymmetric flow, while inner wedge doors (IWD) display only mildly asymmetric behavior. At lower door angles (partially closed cavity), both types of doors display a successive bifurcation of the shear layer, ultimately resulting in a symmetric flow. IWD tend to promote symmetry for all angles observed, with the shear layer experiencing a pitchfork bifurcation at the ‘critical angle’ (67.5°). This is also true for the OWD at the ‘critical angle’ (45°), though an entirely different symmetric flow field is established. The first observation of pitchfork bifurcations (‘critical angle’) for the IWD is at 67.5° and for the OWD, 45°, complementing experimental observations. The back wall signature of the bifurcated shear layer (impingement preference) was found to be indicative of the 3D cavity dynamics and may be used to establish a correspondence between 3D cavity dynamics and the shear layer. Below the critical angle, the symmetric flow field is comprised of counter-rotating vortex pairs at the front and back wall corners. The existence of a critical angle and the process of door opening versus closing indicate the possibility of hysteresis, a preliminary discussion of which is presented. Full article
(This article belongs to the Section Aeronautics)
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11 pages, 403 KiB  
Article
Modeling the Frequency–Amplitude Characteristics of a Tunable SAW Oscillator
by Ionut Nicolae and Cristian Viespe
Chemosensors 2025, 13(7), 240; https://doi.org/10.3390/chemosensors13070240 - 6 Jul 2025
Viewed by 341
Abstract
The resonant frequency of an SAW oscillator can be modulated by varying the signal amplitude, due to non-linear acoustic interactions within the chemoselective layer. In this study, we developed an explicit model to describe the amplitude–frequency behavior of a tunable SAW oscillator. A [...] Read more.
The resonant frequency of an SAW oscillator can be modulated by varying the signal amplitude, due to non-linear acoustic interactions within the chemoselective layer. In this study, we developed an explicit model to describe the amplitude–frequency behavior of a tunable SAW oscillator. A polymeric layer of variable thickness was deposited in a circular area (radius 1.1 mm) at the center of the piezoactive surface. Increasing the oscillator loop attenuation resulted in a continuous increase in the resonant frequency by up to 1.8 MHz. The layer was modeled as a succession of non-interacting sub-layers of varying thicknesses. As a result, the function model consists of a superposition of terms, each corresponding to a layer region of distinct length and thickness. The maximum difference between the experimental data and function model (also known as residual of the fit) was below 1% (13.02 kHz) of the resonant frequency variation, thus supporting the validity of our approach. While our model proved successful, the results suggest that some interactions are unaccounted for, as evidenced by the periodicity of the residuals of fit and unrealistically large variation in acoustic wave velocity. Full article
(This article belongs to the Special Issue Advanced Chemical Sensors for Gas Detection)
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22 pages, 3803 KiB  
Article
Advanced Self-Powered Sensor for Carbon Dioxide Monitoring Utilizing Surface Acoustic Wave (SAW) Technology
by Hicham Mastouri, Mohammed Remaidi, Amine Ennawaoui, Meryiem Derraz and Chouaib Ennawaoui
Energies 2025, 18(12), 3082; https://doi.org/10.3390/en18123082 - 11 Jun 2025
Viewed by 591
Abstract
In the context of autonomous environmental monitoring, this study investigates a surface acoustic wave (SAW) sensor designed for selective carbon dioxide (CO2) detection. The sensor is based on a LiTaO3 piezoelectric substrate with copper interdigital transducers and a polyetherimide (PEI) [...] Read more.
In the context of autonomous environmental monitoring, this study investigates a surface acoustic wave (SAW) sensor designed for selective carbon dioxide (CO2) detection. The sensor is based on a LiTaO3 piezoelectric substrate with copper interdigital transducers and a polyetherimide (PEI) layer, chosen for its high electromechanical coupling and strong CO2 affinity. Finite element simulations were conducted to analyze the resonance frequency response under varying gas concentrations, film thicknesses, pressures, and temperatures. Results demonstrate a linear and sensitive frequency shift, with detection capability starting from 10 ppm. The sensor’s autonomy is ensured by a piezoelectric energy harvester composed of a cantilever beam structure with an attached seismic mass, where mechanical vibrations induce stress in a piezoelectric layer (PZT-5H or PVDF), generating electrical energy via the direct piezoelectric effect. Analytical and numerical analyses were performed to evaluate the influence of excitation frequency, material properties, and optimal load on power output. This integrated configuration offers a compact and energy-independent solution for real-time CO2 monitoring in low-power or inaccessible environments. Full article
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13 pages, 2748 KiB  
Article
Experimental Demonstration of Nanoscale Pillar Phononic Crystal-Based Reflector for Surface Acoustic Wave Devices
by Temesgen Bailie Workie, Lingqin Zhang, Junyao Shen, Jianli Jiang, Wenfeng Yao, Quhuan Shen, Jingfu Bao and Ken-ya Hashimoto
Micromachines 2025, 16(6), 663; https://doi.org/10.3390/mi16060663 - 31 May 2025
Viewed by 477
Abstract
This article presents an investigation into the use of nanoscale phononic crystals (PnCs) as reflectors for surface acoustic wave (SAW) resonators, with a focus on pillar-based PnCs. Finite element analysis was employed to simulate the phononic dispersion characteristics and to study the effects [...] Read more.
This article presents an investigation into the use of nanoscale phononic crystals (PnCs) as reflectors for surface acoustic wave (SAW) resonators, with a focus on pillar-based PnCs. Finite element analysis was employed to simulate the phononic dispersion characteristics and to study the effects of the pillar shape, material and geometric dimensions on achievable acoustic bandgap. To validate our concept, we fabricated SAW resonators and filters incorporating the proposed pillar-based PnC reflectors. The PnC-based reflector shows promising performance, even with smaller number of PnC arrays. In this regard, with a PnC array reflector consisting of 20 lattice periods, the SAW resonator exhibits a maximum bode-Q of about 1600, which can be considered to be a reasonably high value for SAW resonators on bulk 42° Y-X lithium tantalate (42° Y-X LiTaO3) substrate. Furthermore, we implemented SAW filters using pillar-based PnC reflectors, resulting in a minimum insertion loss of less than 3 dB and out-of-band attenuation exceeding 35 dB. The authors believe that there is still a long way to go in making it fit for mass production, especially due to issues related with the accuracy of fabrication. But, upon its successful implementation, this approach of using PnCs as SAW reflectors could lead to reducing the foot-print of SAW devices, particularly for SAW-based sensors and filters. Full article
(This article belongs to the Special Issue Recent Progress in RF MEMS Devices and Applications)
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15 pages, 3388 KiB  
Article
Fabrication of Air Cavity Structures Using DRIE for Acoustic Signal Confinement in FBAR Devices
by Raju Patel, Manoj Singh Adhikari, Deepak Bansal and Tanmoy Majumder
Micromachines 2025, 16(6), 647; https://doi.org/10.3390/mi16060647 - 29 May 2025
Viewed by 2658
Abstract
Acoustic energy penetrates into the Si substrate at cavity boundaries. Due to this, the air cavity-based bulk acoustic resonators experience higher harmonic mode, parasitic resonance, and spurious mode. To overcome these effects and enhance the performance parameters, a backside air cavity is fabricated [...] Read more.
Acoustic energy penetrates into the Si substrate at cavity boundaries. Due to this, the air cavity-based bulk acoustic resonators experience higher harmonic mode, parasitic resonance, and spurious mode. To overcome these effects and enhance the performance parameters, a backside air cavity is fabricated using the deep reactive ion etching (DRIE) method. The DRIE method helps to achieve the optimized active area of the resonator. SiO2 film on a silicon substrate as the support layer and ZnO as the piezoelectric (PZE) film are used for the resonator. The crystal growth and surface morphology of ZnO film were investigated with X-ray diffraction, scanning electron microscopy, and atomic force microscopy. FBAR is modeled in a 1-D modified Butterworth–Van Dyke (mBVD) equivalent circuit. As RF measurement results, we successfully demonstrated a FBAR with optimized active area of 320 × 320 μm2, center frequency of 1.261 GHz, having a quality factor of 583.8. Overall, this suppression of higher harmonic mode shows the great potential for improving the selectivity of the sensor and also in RF filter design applications. This integration of DRIE-based cavity formation with ZnO-based FBAR architecture not only enables compact design but also effectively suppresses spurious and higher-order modes, which demonstrates a performance-enhancing fabrication strategy not fully explored in the current literature. Full article
(This article belongs to the Section E:Engineering and Technology)
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21 pages, 12189 KiB  
Article
Optimized Design of the Basic Structure of Dry-Coupled Shear Wave Probe for Ultrasonic Testing of Rock and Concrete
by Yonghao Lu, Yinqiu Zhou, Chenhui Zhu, Xueshen Cao and Hao Chen
Sensors 2025, 25(9), 2660; https://doi.org/10.3390/s25092660 - 23 Apr 2025
Viewed by 460
Abstract
Although shear horizontal waves have advantages over longitudinal waves, including a higher resolution, less wave mode conversion, and much better reflection coefficients at void and crack interfaces in nondestructive detection, they require good contact surface flatness and efficient coupling agents. In this paper, [...] Read more.
Although shear horizontal waves have advantages over longitudinal waves, including a higher resolution, less wave mode conversion, and much better reflection coefficients at void and crack interfaces in nondestructive detection, they require good contact surface flatness and efficient coupling agents. In this paper, we analyze and design the basic components of the dry-coupled ultrasonic shear wave probe through theoretical analyses and numerical simulations. The admittance characteristics, resonant frequency, and electromechanical coupling coefficients of the double-laminated vibrator under different size parameters in both 2D and 3D models are simulated, and the probe structures are optimized based on the simulation results and operational requirements. The simulation results of the wave field excited by the double-laminated vibrator show the effectiveness of the optimized probe models. Additionally, the dry coupling method of the probe is simulated to study the acoustic energy distribution under various dry-coupled structures. Finally, we compare the measured admittance with the simulated values, and they are in good agreement. Full article
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17 pages, 20569 KiB  
Article
A Slanted-Finger Interdigitated Transducer Microfluidic Device for Particles Sorting
by Baoguo Liu, Xiang Ren, Tao Xue and Qiang Zou
Micromachines 2025, 16(4), 483; https://doi.org/10.3390/mi16040483 - 20 Apr 2025
Viewed by 383
Abstract
Sorting particles or cells of specific sizes in complex systems has long been a focus of many researchers. Acoustic surface waves, which generate acoustic radiation forces on particles or cells and, thus, influence their motion, are commonly used for the non-destructive separation of [...] Read more.
Sorting particles or cells of specific sizes in complex systems has long been a focus of many researchers. Acoustic surface waves, which generate acoustic radiation forces on particles or cells and, thus, influence their motion, are commonly used for the non-destructive separation of particles or cells of specific sizes. In previous studies, the frequency of acoustic surface wave generation has been limited by the interdigitated transducer (IDT). To extend the effective operating frequency range of the IDT, a slanted-finger interdigitated transducer (SFIT) with a wide acoustic path and multiple operating frequencies was designed. Compared with traditional acoustic sorting devices, which suffer from a limited frequency range and narrow acoustic paths, this new design greatly expands both the operating frequency range and acoustic path width, and enables adjustable operating frequencies, providing a solution for sorting particles or cells with uneven sizes in complex environments. The optimal resonance frequency is distributed within the 32–42 MHz range, and the operating frequencies within this range can generate a standing wave acoustic path of approximately 200 μm, thus enhancing the effectiveness of the operating frequencies. The microfluidic sorting device based on SFIT can efficiently and accurately sort polystyrene (PS) with particle sizes of 20 μm, 30 μm, and 50 μm from mixed PS microspheres (5, 10, 20 μm), (5, 10, 30 μm), and (5, 10, 50 μm), with a sorting efficiency and purity exceeding 96%. Additionally, the device is capable of sorting other types of mixed microspheres (5, 10, 20, 30, 50 μm). This new wide-acoustic-path, multi-frequency sorting device demonstrates the ability to sort particlesin a high-purity, label-free manner, offering a more alternative to traditional sorting methods. Full article
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20 pages, 3507 KiB  
Review
Biosensors for Micro- and Nanoplastics Detection: A Review
by Maria Daoutakou and Spyridon Kintzios
Chemosensors 2025, 13(4), 143; https://doi.org/10.3390/chemosensors13040143 - 14 Apr 2025
Viewed by 2371
Abstract
Microplastics (MPs) and nanoplastics (NPs), which are widespread in many habitats as the byproducts of various industrial processes, pose considerable environmental and health hazards. However, current, conventional methods for detecting and characterizing them are considerably lacking in throughput, sensitivity, reliability, and field deployability. [...] Read more.
Microplastics (MPs) and nanoplastics (NPs), which are widespread in many habitats as the byproducts of various industrial processes, pose considerable environmental and health hazards. However, current, conventional methods for detecting and characterizing them are considerably lacking in throughput, sensitivity, reliability, and field deployability. In the current report, we review the state of the art in biosensor-based MP/NP detection, in particular, describing advances in optical and electrochemical approaches, along with the development of novel biorecognition elements and the application of bioinformatics tools. Full article
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16 pages, 5587 KiB  
Article
Experiments and Simulation on the Effects of Arch Height Variation on the Vibrational Response of Paulownia Wood
by Xiyue Li, Siyuan Wang, Yaqing Guo, Juncheng Zhang, Lan He, Jing Zhou, Yuanyuan Miao and Zhenbo Liu
Forests 2025, 16(3), 545; https://doi.org/10.3390/f16030545 - 19 Mar 2025
Viewed by 343
Abstract
Resonance boards of Chinese traditional instruments such as the Guzheng and Guqin typically are arched, with the arch height influencing their resonance characteristics. This study focuses on Paulownia wood utilized for resonance boards. The bottom surfaces were thinned in 1 mm increments, with [...] Read more.
Resonance boards of Chinese traditional instruments such as the Guzheng and Guqin typically are arched, with the arch height influencing their resonance characteristics. This study focuses on Paulownia wood utilized for resonance boards. The bottom surfaces were thinned in 1 mm increments, with vibration signatures acquired at each reduction stage using a multi-channel FFT analyzer. Subsequently, time-domain characteristic parameters of the signals were extracted through MATLAB-based signal processing. Modal and harmonic response simulations of the structure were conducted using finite element software. The results indicated that variations in arch height affected the frequency spectrum response of the vibrations of Paulownia wood, altering the structural energy radiation levels. Lower arch heights (0–2 mm) had a greater impact on the fundamental frequency. The arch height was 1 mm and 2 mm, with R1,1 and R1,2 being −5.31% and −8.62%, respectively. Skewness and kurtosis were negatively correlated with arch height. When ΔH was 3.06, the radiation effect was optimal. The changes in arch height influenced the vibrational modes and energy distribution of Paulownia. Higher arch heights (3–6 mm) have less effect on the fundamental frequency and impose some constraints on the mode vibration pattern. Furthermore, the results of the frequency-domain and time-domain analyses were found to be largely consistent with the finite element simulation results. The results provide guidance for changing the arch height to modulate the acoustic vibration response of the resonance board, which is of significance for the personalized design of future musical instruments. Full article
(This article belongs to the Special Issue Wood Testing, Processing and Modification)
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20 pages, 9326 KiB  
Article
Vibroacoustic Response of a Disc-Type Underwater Glider During Its Entry into Water
by Zhaocheng Sun, Yanting Yu, Dong Li, Chuanlin He and Yue Zhang
J. Mar. Sci. Eng. 2025, 13(3), 544; https://doi.org/10.3390/jmse13030544 - 12 Mar 2025
Viewed by 577
Abstract
Underwater gliders are extensively employed in oceanographic observation and detection. The structural characteristics of thin-wall shells are more susceptible to vibrations from internal mechanical components; this noise emission becomes more complex with the presence of water surfaces. The finite element method (FEM) is [...] Read more.
Underwater gliders are extensively employed in oceanographic observation and detection. The structural characteristics of thin-wall shells are more susceptible to vibrations from internal mechanical components; this noise emission becomes more complex with the presence of water surfaces. The finite element method (FEM) is introduced to discuss the dynamic performance of cylindrical shells with different lengths. The acoustic-structure coupling, together with the effect of the water surface, is validated by comparisons with experimental or analytical solutions under three cases: half-filled, half-submerged, and partially submerged in fluid. Compared to the verification result, the relative error of the eigenfrequency derived from the numerical result is less than 3%, and then the mesh division and boundary conditions are adjusted to calculate the vibroacoustic response of a disc-type glider. During its water entry process, there are six distinct bright curves in frequency–depth spectra of sound pressure radiated from a partially immersed disc-type glider. The first curve is continuous, while the remaining five curves display discontinuities around a region where the geometric curvature changes gradually. As the submerged depth increases, this causes a shift in the resonance frequencies, evidenced by the curves transitioning from higher to lower frequencies. Full article
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11 pages, 2654 KiB  
Article
Design of a High Coupling SAW Resonator Based on an Al/41° Y-X LiNbO3/SiO2/poly-Si/Si Structure for Wideband Filter
by Xiaoyu Wang, Yang Chang, Qiaozhen Zhang, Luyao Liu, Xinyi Wang and Haodong Wu
Micromachines 2025, 16(3), 323; https://doi.org/10.3390/mi16030323 - 11 Mar 2025
Cited by 1 | Viewed by 712
Abstract
With the rapid development of fifth-generation (5G) mobile communication technology, the performance requirements for radio frequency front-end surface acoustic wave (SAW) devices have become increasingly stringent. Surface acoustic wave devices on piezoelectric thin film-based layered structures with high electromechanical coupling coefficients and low-frequency [...] Read more.
With the rapid development of fifth-generation (5G) mobile communication technology, the performance requirements for radio frequency front-end surface acoustic wave (SAW) devices have become increasingly stringent. Surface acoustic wave devices on piezoelectric thin film-based layered structures with high electromechanical coupling coefficients and low-frequency temperature compensation characteristics have emerged as a key solution. In this work, a SAW resonator based on an Al/41° Y-X LiNbO3/SiO2/poly-Si/Si multi-layered structure is proposed. FEM modeling of the proposed resonator and the influences of the thicknesses of the LiNbO3, SiO2, and Al electrodes on performances such as the parasitic noise, bandwidth, and electromechanical coupling coefficient are analyzed. Optimal parameters for the multi-layer piezoelectric structure are identified for offering large coupling up to 24%. Based on these findings, a single-port SAW resonator with an Al/41° Y-X LiNbO3/SiO2/poly-Si/Si substrate structure is fabricated. The experimental results align well with the simulation results; meanwhile, the SAW filter based on the proposed resonator demonstrates that a center frequency of 2.3 GHz, a 3-dB fractional bandwidth of 23.48%, and a minimum in-band insertion loss of only 0.343 dB are simultaneously achieved. This study provides guidance for the development of multi-layer film SAW resonator-based filters with high-performance. Full article
(This article belongs to the Section A:Physics)
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16 pages, 4962 KiB  
Article
Design and Numerical Simulation of a Standing Surface Acoustic Wave-Based Microdevice for Whole Blood Cell Separation
by Maryam Hajimoradi, Moein Talebian Gevari, Keith Robert Pullen and Mohammad Mojaddam
Computation 2025, 13(2), 42; https://doi.org/10.3390/computation13020042 - 6 Feb 2025
Viewed by 1169
Abstract
Standing surface acoustic wave (SSAW)-based acoustofluidics is widely used due to its compatibility with soft materials and polymer structures. In the presence of an acoustic field, particles move either toward pressure nodes or anti-nodes according to their contrast factor. Using this technique, blood [...] Read more.
Standing surface acoustic wave (SSAW)-based acoustofluidics is widely used due to its compatibility with soft materials and polymer structures. In the presence of an acoustic field, particles move either toward pressure nodes or anti-nodes according to their contrast factor. Using this technique, blood cells with a certain characteristic can be oriented in different streamlines in a microchannel. The cumulative effect of parameters, such as the inlet velocity ratio of the buffer solution to the blood sample, acoustic frequency, voltage, and channel geometry, is key to effective separation in these microfluidic chips. In this study, simultaneous separation of white blood cells, red blood cells, and platelets in one stage is simulated by means of numerical calculations. The linear constitutive equation for the piezoelectric substrate, the Helmholtz equation for the acoustic field, and the Navier–Stokes equations for fluid mechanics are solved simultaneously to precisely capture the blood cell behavior in the SSAW-based device. The results show that whole blood cell separation can be achieved using a velocity ratio of 6.25, a resonance frequency of 8.28 MHz, and a voltage of 8.5 V in the proposed five-outlet microfluidic chip. Full article
(This article belongs to the Section Computational Engineering)
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15 pages, 3594 KiB  
Article
Numerical Design and Optimization of High Performance Langasite and Hetero-Acoustic Layer-Based Surface Acoustic Wave Device
by Minglong Deng, Jinkai Chen, Jikai Zhang, Weilun Xie, Hao Jin, Weipeng Xuan, Shurong Dong and Jikui Luo
Micromachines 2025, 16(2), 166; https://doi.org/10.3390/mi16020166 - 30 Jan 2025
Viewed by 889
Abstract
La3Ga5SiO14 (langasite, LGS)-based surface acoustic wave (SAW) devices are widely used for industrial health monitoring in harsh high-temperature environments. However, a conventional LGS-based SAW structure has a low quality factor (Q) due to its spurious resonant peaks. A [...] Read more.
La3Ga5SiO14 (langasite, LGS)-based surface acoustic wave (SAW) devices are widely used for industrial health monitoring in harsh high-temperature environments. However, a conventional LGS-based SAW structure has a low quality factor (Q) due to its spurious resonant peaks. A hetero-acoustic layer (HAL)-based structure can effectively enhance the Q factor and the figure of merit (FOM) of SAWs due to its better energy confinement of SAWs. In this work, a HAL-based structure is proposed to achieve a high FOM and high-temperature resistance at the same time. Based on the finite element method (FEM) and coupling-of-model (COM) combined simulation, a systematic numerical investigation was conducted to find the optimal materials and structural parameters considering the viability of an actual fabricating process. After optimizing the layer number, an intermediate-layer material choice and structural parameters, Pt/(0°, 138.5°, 27°) LGS/YX-LGS/SiC HAL structure were chosen. The proposed structure achieves a Q factor and FOM improvement of more than 5 and 2.6 times higher than those of conventional SAW structures, which is important for the development of high temperature SAW sensors. These findings pave a viable method for improving the Q factor and FOM of LGS-based SAW and can provide material and device structural design guidance for fabrication and high-temperature applications in the future. Full article
(This article belongs to the Special Issue Surface and Bulk Acoustic Wave Devices)
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11 pages, 3673 KiB  
Article
High Q GaN/SiC-Based SAW Resonators for Humidity Sensor Applications
by Dan Vasilache, Claudia Nastase, George Boldeiu, Monica Nedelcu, Catalin Parvulescu, Adrian Dinescu and Alexandru Muller
Micromachines 2025, 16(2), 150; https://doi.org/10.3390/mi16020150 - 28 Jan 2025
Viewed by 2970
Abstract
This paper presents the simulation and experimental results for high-frequency surface acoustic wave (SAW) sensors for humidity detection. The SAW structures with a wavelength of 680 nm are fabricated on GaN/SiC and presented two resonance frequencies: ~6.66 GHz for the Rayleigh propagation mode [...] Read more.
This paper presents the simulation and experimental results for high-frequency surface acoustic wave (SAW) sensors for humidity detection. The SAW structures with a wavelength of 680 nm are fabricated on GaN/SiC and presented two resonance frequencies: ~6.66 GHz for the Rayleigh propagation mode and ~8 GHz for the Sezawa mode. A SiO2 thin layer (~50 nm thick) was employed for the functionalization of the SAW. Relative humidity characterization was performed in the range of 20–90%. The SAW sensors achieved high values of humidity sensitivity for both adsorption and desorption. The Sezawa mode showed about 2.5 times higher humidity sensitivity than the Rayleigh mode: 17.2 KHz/%RH versus 6.17 KHz/%RH for adsorption and 8.88 KHz/%RH versus 3.79 KHz/%RH for desorption. Full article
(This article belongs to the Special Issue Surface and Bulk Acoustic Wave Devices)
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12 pages, 3482 KiB  
Article
Driving Rotational Circulation in a Microfluidic Chamber Using Dual Focused Surface-Acoustic-Wave Beams
by Jin-Chen Hsu and Kai-Li Liao
Micromachines 2025, 16(2), 140; https://doi.org/10.3390/mi16020140 - 25 Jan 2025
Viewed by 1222
Abstract
In this paper, enhanced rotational circulation in a circular microfluidic chamber driven by dual focused surface-acoustic-wave (SAW) beams is presented. To characterize the resonant frequency and focusing effect, we simulate the focused SAW field excited by an arc-shaped interdigital transducer patterned on a [...] Read more.
In this paper, enhanced rotational circulation in a circular microfluidic chamber driven by dual focused surface-acoustic-wave (SAW) beams is presented. To characterize the resonant frequency and focusing effect, we simulate the focused SAW field excited by an arc-shaped interdigital transducer patterned on a 128°Y-cut lithium-niobate (LiNbO3) substrate using a finite element method. A full three-dimensional perturbation model of the combined system of the microfluidic chamber and the SAW device is conducted to obtain the acoustic pressure and acoustic streaming fields, which show rotational acoustic pressure and encircling streaming resulted in the chamber. Accordingly, the SAW acoustofluidic system is realized using microfabrication techniques and applied to perform acoustophoresis experiments on submicron particles suspending in the microfluidic chamber. The result verifies the rotational circulation motion of the streaming flow, which is attributed to enhanced angular momentum flux injection and Eckart streaming effect through the dual focused SAW beams. Our results should be of importance in driving particle circulation and enhancing mass transfer in chamber embedded microfluidic channels, which may have promising applications in accelerating bioparticle or cell reactions and fusion, enhancing biochemical and electrochemical sensing, and efficient microfluidic mixing. Full article
(This article belongs to the Special Issue Surface and Bulk Acoustic Wave Devices)
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