- Article
Strain-Induced Modifications of Thin Film Silicon Membranes Through Physical Bending
- Eleni Margariti,
- Jochen Bruckbauer,
- Aimo Winkelmann,
- Benoit Guilhabert,
- Naresh-Kumar Gunasekar,
- Carol Trager-Cowan,
- Robert Martin and
- Michael Strain
Silicon, being the fundamental material for modern semiconductor devices, has seen continuous advancements to enhance its electrical and mechanical properties. Strain engineering is a well-established technique for improving the performance of silico...