Search Results (23)

On-chip optical accelerometers can be a promising alternative to capacitive, piezo-resistive, and piezo-electric accelerometers in some applications due to their immunity to electromagnetic interference and high sensitivity, which allow for robust operation in electromagnetically noisy environments. This paper focuses on the characterization of an easy-to-fabricate tri-axial fiber-free optical MEMS accelerometer, which employs a simple assembly consisting of a light emitting diode (LED), a quadrant photodetector (QPD), and a suspended proof mass, measuring acceleration through light power modulation. This configuration enables simple readout circuitry without the need for complex digital signal processing (DSP). Performance modeling was conducted to simulate the LED’s irradiance profile and its interaction with the proof mass and QPD. Additionally, experimental tests were performed to measure the device’s mechanical sensitivity and validate the mechanical model. Lateral mechanical sensitivity is obtained with acceptable discrepancy from that obtained from FEA simulations. This work consolidates the performance of the design adapted and demonstrates the accelerometer’s feasibility for practical applications. Full article

A MEMS piezoresistive sensor for measuring accelerations greater than 100,000 g (about 10⁶ m/s²) is described in this work. To enhance the performance of the sensor, specifically widening its measurement range and natural frequency, a cross-beam construction with a center block was devised, and a Wheatstone bridge was formed by placing four piezoresistors at the ends of the fixed beams to convert acceleration into electricity. The location of the varistor was determined using the finite element approach, which yielded the optimal sensitivity. Additionally, a reliable Pt-Ti-Pt-Au electrode was designed to solve the issue of the electrode failing under high impact and enhancing the stability of the ohmic contact. The accelerometer was fabricated using MEMS technology, and the experiment with a Hopkinson pressure bar and hammering was conducted, and the bias stability was measured. It had a sensitivity of 1.06 μV/g with good linearity. The simulated natural frequency was 633 kHz The test result revealed that the accelerometer can successfully measure an acceleration of 100,000 g. Full article

To meet the measurement needs of multidimensional high-g acceleration in fields such as weapon penetration, aerospace, and explosive shock, a biaxial piezoresistive accelerometer incorporating tension–compression is meticulously designed. This study begins by thoroughly examining the tension–compression measurement mechanism and designing the sensor’s sensitive structure. A signal test circuit is developed to effectively mitigate cross-interference, taking into account the stress variation characteristics of the cantilever beam. Subsequently, the signal test circuit of anti-cross-interference is designed according to the stress variation characteristics of the cantilever beam. Next, the finite element method is applied to analyze the structure and obtain the performance indices of the range, vibration modes, and sensitivity of the sensor. Finally, the process flow and packaging scheme of the chip are analyzed. The results show that the sensor has a full range of 200,000 g, a sensitivity of 1.39 µV/g in the X direction and 1.42 µV/g in the Y direction, and natural frequencies of 509.8 kHz and 510.2 kHz in the X and Y directions, respectively. Full article

A flexible piezoresistive sensor was developed as an accelerometer based on Graphene/PVDF nanocomposite to detect low-frequency and low amplitude vibration of industrial machines, which may be caused due to misalignment, looseness of fasteners, or eccentric rotation. The sensor was structured as a cantilever beam with the proof mass at the free end. The vibration caused the proof mass to accelerate up and down, which was converted into an electrical signal. The output was recorded as the change in resistance (response percentage) with respect to the acceleration. It was found that this accelerometer has a capability of detecting acceleration up to 8 g_pk-pk in the frequency range of 20 Hz to 80 Hz. The developed accelerometer has the potential to represent an alternative to the existing accelerometers due to its compactness, simplicity, and higher sensitivity for low frequency and low amplitude applications. Full article

Forcecardiography (FCG) is a novel technique that measures the local forces induced on the chest wall by the mechanical activity of the heart. Specific piezoresistive or piezoelectric force sensors are placed on subjects’ thorax to measure these very small forces. The FCG signal can be divided into three components: low-frequency FCG, high-frequency FCG (HF-FCG) and heart sound FCG. HF-FCG has been shown to share a high similarity with the Seismocardiogram (SCG), which is commonly acquired via small accelerometers and is mainly used to locate specific fiducial markers corresponding to essential events of the cardiac cycle (e.g., heart valves opening and closure, peaks of blood flow). However, HF-FCG has not yet been demonstrated to provide the timings of these markers with reasonable accuracy. This study addresses the detection of the aortic valve opening (AO) marker in FCG signals. To this aim, simultaneous recordings from FCG and SCG sensors were acquired, together with Electrocardiogram (ECG) recordings, from a few healthy subjects at rest, both during quiet breathing and apnea. The AO markers were located in both SCG and FCG signals to obtain pre-ejection periods (PEP) estimates, which were compared via statistical analyses. The PEPs estimated from FCG and SCG showed a strong linear relationship (r > 0.95) with a practically unit slope, and 95% of their differences were found to be distributed within ± 4.6 ms around small biases of approximately 1 ms, corresponding to percentage differences lower than 5% of the mean measured PEP. These preliminary results suggest that FCG can provide accurate AO timings and PEP estimates. Full article

The demand for wearable devices to measure respiratory activity is constantly growing, finding applications in a wide range of scenarios (e.g., clinical environments and workplaces, outdoors for monitoring sports activities, etc.). Particularly, the respiration rate (RR) is a vital parameter since it indicates serious illness (e.g., pneumonia, emphysema, pulmonary embolism, etc.). Therefore, several solutions have been presented in the scientific literature and on the market to make RR monitoring simple, accurate, reliable and noninvasive. Among the different transduction methods, the piezoresistive and inertial ones satisfactorily meet the requirements for smart wearable devices since unobtrusive, lightweight and easy to integrate. Hence, this review paper focuses on innovative wearable devices, detection strategies and algorithms that exploit piezoresistive or inertial sensors to monitor the breathing parameters. At first, this paper presents a comprehensive overview of innovative piezoresistive wearable devices for measuring user’s respiratory variables. Later, a survey of novel piezoresistive textiles to develop wearable devices for detecting breathing movements is reported. Afterwards, the state-of-art about wearable devices to monitor the respiratory parameters, based on inertial sensors (i.e., accelerometers and gyroscopes), is presented for detecting dysfunctions or pathologies in a non-invasive and accurate way. In this field, several processing tools are employed to extract the respiratory parameters from inertial data; therefore, an overview of algorithms and methods to determine the respiratory rate from acceleration data is provided. Finally, comparative analysis for all the covered topics are reported, providing useful insights to develop the next generation of wearable sensors for monitoring respiratory parameters. Full article

The evolution of low power electronics and the availability of new smart materials are opening new frontiers to develop wearable systems for medical applications, lifestyle monitoring, and performance detection. This paper presents the development and realization of a novel smart insole for monitoring the plantar pressure distribution and gait parameters; indeed, it includes a piezoresistive sensing matrix based on a Velostat layer for transducing applied pressure into an electric signal. At first, an accurate and complete characterization of Velostat-based pressure sensors is reported as a function of sizes, support material, and pressure trend. The realization and testing of a low-cost and reliable piezoresistive sensing matrix based on a sandwich structure are discussed. This last is interfaced with a low power conditioning and processing section based on an Arduino Lilypad board and an analog multiplexer for acquiring the pressure data. The insole includes a 3-axis capacitive accelerometer for detecting the gait parameters (swing time and stance phase time) featuring the walking. A Bluetooth Low Energy (BLE) 5.0 module is included for transmitting in real-time the acquired data toward a PC, tablet or smartphone, for displaying and processing them using a custom Processing^® application. Moreover, the smart insole is equipped with a piezoelectric harvesting section for scavenging energy from walking. The onfield tests indicate that for a walking speed higher than 1 ms⁻¹, the device’s power requirements (i.e., $\overline{\mathrm{P}}=5.84\mathrm{mW}$) was fulfilled. However, more than 9 days of autonomy are guaranteed by the integrated 380-mAh Lipo battery in the total absence of energy contributions from the harvesting section. Full article

This experimental study focuses on the comparison between two different sensors for vibration signals: a magnetoresistive sensor and an accelerometer as a calibrated reference. The vibrations are collected from a variable speed inductor motor setup, coupled to a ball bearing load with adjustable misalignments. To evaluate the performance of the magnetoresistive sensor against the accelerometer, several vibration measurements are performed in three different axes: axial, horizontal and vertical. Vibration velocity measurements from both sensors were collected and analyzed based on spectral decomposition of the signals. The high cross-correlation coefficient between spectrum vibration signatures in all experimental measurements shows good agreement between the proposed magnetoresistive sensor and the reference accelerometer performances. The results demonstrate the potential of this type of innovative and non-contact approach to vibration data collection and a prospective use of magnetoresistive sensors for predictive maintenance models for inductive motors in Industry 4.0 applications. Full article

High-G accelerometers are mainly used for motion measurement in some special fields, such as projectile penetration and aerospace equipment. This paper mainly explores the wavelet threshold denoising and wavelet packet threshold denoising in wavelet analysis, which is more suitable for high-G piezoresistive accelerometers. In this paper, adaptive decomposition and Shannon entropy criterion are used to find the optimal decomposition layer and optimal tree. Both methods use the Stein unbiased likelihood estimation method for soft threshold denoising. Through numerical simulation and Machete hammer test, the wavelet threshold denoising is more suitable for the dynamic calibration of a high-G accelerometer. The wavelet packet threshold denoising is more suitable for the parameter extraction of the oscillation phase. Full article

In this paper, we present a fully printed accelerometer with a piezoresistive carbon paste-based strain gauge printed on its surface, which can be manufactured at low cost and with high efficiency. This accelerometer is composed of two parts: a sensor substrate made from high-temperature resin, which is printed by a 3D printer based on stereolithography apparatus (SLA), and a carbon paste-based strain gauge fabricated by screen-printing technology and by direct ink writing (DIW) technology for the purposes of comparison and optimization. First, the structural design, theoretical analysis, simulation analysis of the accelerometer, and analyses of the conductive mechanism and the piezoresistive mechanism of the carbon paste-based strain gauge were carried out. Then the proposed accelerometer was fabricated by a combination of different printing technologies and the curing conditions of the carbon paste were investigated. After that, the accelerometers with the screen-printed strain gauge and DIW strain gauge were characterized. The results show that the printing precision of the screen-printing process on the sensor substrate is higher than the DIW process, and both accelerometers can perform acceleration measurement. Also, this kind of accelerometer can be used in the field of measuring body motion. All these findings prove that 3D printing technology is a significant method for sensor fabrication and verification. Full article

Biomechanics measurement in boxing is becoming increasingly important for the analysis of boxing technique in order to promote exciting and safer boxing at both amateur and professional levels. Despite this interest, there have been few experiments within this field of research that have utilised a non-embedded in-glove sensor to measure the resultant power generated by a boxing punch. The aim of this study was to develop a dynamic measurement system, utilising a non-embedded in-glove sensor system. Two sensors were utilised; a tri-axial accelerometer to measure acceleration and a piezo-resistive force sensor hand wrap to measure the impact force of a boxer’s punch. The piezo-resistive system was calibrated using a static measurement system utilising simple load cells for force and laser displacement sensors for glove speed measurements. The system was tested on 31 novice boxing athletes participating in the study. A mean impact force of 2.31 kN ± 3.28 kN, an instantaneous velocity prior to impact of 4.73 m/s ± 0.35 m/s, an impact acceleration of 91 g ± 11 g, deceleration immediately following impact of 223 g ± 21 g and a maximum power dissipation of 11.2 kW ± 2.05 kW were measured. These values correspond well with prior studies using alternate measurement approaches. The calibration of the non-embedded in-glove piezo-resistive force sensor on the static measurement system yielded a correlation coefficient of 0.85. Full article

A three-axis accelerometer with a double L-shaped beams structure was designed and fabricated in this paper, consisting of a supporting body, four double L-shaped beams and intermediate double beams connected to two mass blocks. When applying acceleration to the accelerometer chip, according to the output voltage changes of three Wheatstone bridges constituted by twelve piezoresistors on the roots of the beams, the corresponding acceleration along three axes can be measured based on the elastic force theory and piezoresistive effect. To improve the characteristics of the three-axis accelerometer, we simulated how the width of the intermediate double beams affected the characteristics. Through optimizing the structure size, six chips with different widths of intermediate double beams were fabricated on silicon-on-insulator (SOI) wafers using micro-electromechanical systems (MEMS) technology and were packaged on printed circuit boards (PCB) by using an electrostatic bonding process and inner lead bonding technology. At room temperature and V_DD = 5.0 V, the resulting accelerometer with an optimized size (w = 500 μm) realized sensitivities of 0.302 mV/g, 0.235 mV/g and 0.347 mV/g along three axes, with a low cross-axis sensitivity. This result provides a new strategy to further improve the characteristics of the three-axis accelerometer. Full article

In this paper, a monolithic tri-axis piezoresistive high-shock accelerometer has been proposed that has been single-sided fabricated in a single (111)-silicon wafer. A single-cantilever structure and two dual-cantilever structures are designed and micromachined in one (111)-silicon chip to detect Z-axis and X-/Y-axis high-shock accelerations, respectively. Unlike the previous tri-axis sensors where the X-/Y-axis structure was different from the Z-axis one, the herein used similar cantilever sensing structures for tri-axis sensing facilitates design of uniform performance among the three elements for different sensing axes and simplifies micro-fabrication for the multi-axis sensing structure. Attributed to the tri-axis sensors formed by using the single-wafer single-sided fabrication process, the sensor is mechanically robust enough to endure the harsh high-g shocking environment and can be compatibly batch-fabricated in standard semiconductor foundries. After the single-sided process to form the sensor, the untouched chip backside facilitates simple and reliable die-bond packaging. The high-shock testing results of the fabricated sensor show linear sensing outputs along X-/Y-axis and Z-axis, with the sensitivities (under DC 5 V supply) as about 0.80–0.88 μV/g and 1.36 μV/g, respectively. Being advantageous in single-chip compact integration of the tri-axis accelerometers, the proposed monolithic tri-axis sensors are promising to be embedded into detection micro-systems for high-shock measurement applications. Full article

A novel frequency modulated (FM) accelerometer based on piezoresistive resonators is presented. The accelerometer uses two differential resonators, connected to the accelerometer proofmass by an amplifying leverage mechanism. The piezoresistive double-mass resonators are electrostatically driven in anti-phase and the output signal is measured piezoresistively by applying a bias current to the connecting microbeam of the double-mass resonators. Accelerometers were fabricated using SOI technology with a 5 µm device layer. Fabricated resonators show a high resonance frequency around 705 kHz and a Q-factor close to 20,000 when measured in vacuum. Preliminary measurements show a sensitivity around 0.46 Hz/g for a single resonator. Full article

A mathematical model of a sensor is vital to deeply comprehend its working principle and implement its optimal design. However, mathematical models of piezo-resistive eight-beam three-axis accelerometers have rarely been reported. Furthermore, those works are largely focused on the analysis of sensing acceleration in the normal direction, rather than in three directions. Therefore, a complete mathematical model of a piezo-resistive eight-beam three-axis accelerometer is developed in this paper. The validity of the mathematical model is proved by a Finite Element Method (FEM) simulation. Furthermore, the accelerometer is fabricated and tested. The prime sensitivities of X, Y and Z axes are 0.209 mV/g, 0.212 mV/g and 1.247 mV/g at 160 Hz, respectively, which is in accord with the values obtained by the model. The reason why the prime sensitivity S_ZZ is bigger than S_XX and S_YY is explained. Besides, it is also demonstrated why the cross-sensitivities S_XZ and S_YZ exceed S_ZX and S_ZY. Compared with the FEM model, the developed model could be helpful in evaluating the performance of three-axis accelerometers in an accurate and rapid way. Full article