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Open AccessArticle

Fabrication and Characteristics of a Three-Axis Accelerometer with Double L-Shaped Beams

The Key Laboratory of Electronics Engineering, College of Heilongjiang Province, Heilongjiang University, Harbin 150080, China
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Sensors 2020, 20(6), 1780; https://doi.org/10.3390/s20061780
Received: 17 February 2020 / Revised: 19 March 2020 / Accepted: 20 March 2020 / Published: 24 March 2020
(This article belongs to the Section Physical Sensors)
A three-axis accelerometer with a double L-shaped beams structure was designed and fabricated in this paper, consisting of a supporting body, four double L-shaped beams and intermediate double beams connected to two mass blocks. When applying acceleration to the accelerometer chip, according to the output voltage changes of three Wheatstone bridges constituted by twelve piezoresistors on the roots of the beams, the corresponding acceleration along three axes can be measured based on the elastic force theory and piezoresistive effect. To improve the characteristics of the three-axis accelerometer, we simulated how the width of the intermediate double beams affected the characteristics. Through optimizing the structure size, six chips with different widths of intermediate double beams were fabricated on silicon-on-insulator (SOI) wafers using micro-electromechanical systems (MEMS) technology and were packaged on printed circuit boards (PCB) by using an electrostatic bonding process and inner lead bonding technology. At room temperature and VDD = 5.0 V, the resulting accelerometer with an optimized size (w = 500 μm) realized sensitivities of 0.302 mV/g, 0.235 mV/g and 0.347 mV/g along three axes, with a low cross-axis sensitivity. This result provides a new strategy to further improve the characteristics of the three-axis accelerometer. View Full-Text
Keywords: three-axis accelerometer; double L-shaped beam; MEMS technology; cross-axis sensitivity three-axis accelerometer; double L-shaped beam; MEMS technology; cross-axis sensitivity
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Wang, Y.; Zhao, X.; Wen, D. Fabrication and Characteristics of a Three-Axis Accelerometer with Double L-Shaped Beams. Sensors 2020, 20, 1780.

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