Search Results (50)

In micro-production technology (MPT), the demand for ultra-precise machine tools has been steadily increasing. Conventional guideway systems, such as hydrostatic or aerostatic bearings, often face limitations in terms of compactness, media supply, and susceptibility to external disturbances, which restrict their applicability in next-generation precision manufacturing. In order to address these challenges, this paper presents a novel media-free, contactless, and active three-degree-of-freedom (DOF) planar positioning (guiding) system that integrates ultrasonic actuators with electromagnetic actuators. The hybrid concept combines the high load capacity and self-stabilization of double-acting ultrasonic actuators and pronounced controllability of the electromagnetic actuators. A prototype system was developed and experimentally validated. Ultrasonic actuators successfully established a stable levitation state, while electromagnetic actuators provided fine adjustment of the levitation height in the micrometer range. Load tests demonstrated that the system maintained stable levitation under an external load of 30 N. These results confirm the feasibility of the proposed approach for robust and precise positioning. The developed hybrid system therefore represents the potential for next-generation precise manufacturing machines in MPT, offering high accuracy and robustness against external disturbances. Full article

Microelectromechanical systems (MEMSs) are increasingly used for both industrial and consumer applications. To improve the accuracy and efficiency of MEMS fabrication and to overcome the limitations of conventional contactless positioning systems, this study introduces a novel positioning concept that combines ultrasonic levitation with electromagnetic actuation. Squeeze-film effects generated by high-frequency ultrasonic transducers enable levitation, while fast-response reluctance forces from electromagnets govern the positioning dynamics without requiring bulky mounting frames. The focus of this paper is on proposing a novel double-acting ultrasonic transducer with a Gaussian profile horn, ensuring an approximately uniform vibration distribution and increased levitation force. The double-acting design enables levitation on both surfaces, simplifying the mounting and thermal compensation of the transducer’s expansion while reducing interactions among transducers. A model-based control strategy ensures resonant operation and constant vibration amplitude. Experiments demonstrate levitation forces up to 343 N, with a total levitation height of 25 µm, resulting from two levitation air gaps. Comprehensive performance characterization validates the feasibility of this transducer design for integration into the proposed positioning system. Full article

To solve the issues of insufficient working stroke, low accuracy, and limited response time of stages for vibration-assisted polishing, a two-degree-of-freedom (2-DOF) micro-positioning stage is proposed in this paper. To compensate for the limited stroke of piezoelectric actuator, a bridge–lever amplification mechanism was designed to magnify output displacement. Based on Castigliano’s second theorem and elastic beam theory, static modeling of amplification mechanisms, guiding beams, and transmitting rods was presented. Then, the analytical models of the stage were derived. To validate the accuracy of the analytical model, finite element simulations were performed, demonstrating that the error between theoretical and simulation results is 4.6%. Notably, the stage exhibits kinematic decoupling characteristics and excellent dynamic performances. The research results can provide effective insights for developing a large-stroke piezo-actuated micro-positioning stage with good dynamic performance for vibration-assisted polishing. Full article

A prescribed-performance-based sliding mode control method with feed-forward inverse compensation is proposed in this study to improve the micropositioning accuracy and convergence speed of a piezoelectric actuator (PEA). Firstly, the piezo-actuated micropositioning system is described by a Hammerstein structure model, and an inverse Prandtl–Ishlinskii (PI) model was employed to compensate for its hysteresis characteristics. Then, considering modelling errors, inverse compensation errors, and external disturbances, a new prescribed performance function (PPF) with an exponential dynamic decay rate was developed to describe the constrained region of the errors. We then transformed the error into an unconstrained form by constructing a monotonic function, and the sliding variables were obtained by using the transformation error. Based on this, a sliding mode controller with a prescribed performance function (SMC-PPF) was designed to improve the control accuracy of PEAs. Furthermore, we demonstrated that the error can converge to the constrained region and the sliding variables are stable within the switching band. Finally, experiments were conducted to verify the speed and accuracy of the controller. The step-response experiment results indicated that the time taken for SMC-PPC to enter the error window was 8.1 and 2.2 ms faster than that of sliding mode control (SMC) and PID, respectively. The ability of SMC-PPF to improve accuracy was verified using four different reference inputs. These results showed that, for these different inputs, the root mean square error of the SMC-PPF was reduced by over $39.6\%$ and $52.5\%$, compared with the SMC and PID, respectively. Full article

This paper presents an enhanced pseudo-rigid body model (PRBM) integrated with the LuGre friction law to analyze the dynamic behavior of flexure-hinge-based piezoelectric stick–slip actuators (PSSAs). The PRBM captures flexure compliance through Lagrangian dynamics, while Newtonian mechanics describe the piezoelectric stack and slider motion. Non-linear contact effects, including stick–slip transitions, are modeled using the LuGre formulation. A mass–spring–damper model (MSDM) is also implemented as a baseline for comparison. The models are solved in MATLAB Simulink version R2021a and validated against experimental data from a published prototype. The enhanced PRBM achieves strong agreement with experiments, with a root mean square error of 20.19%, compared to 51.65% for the MSDM. By reformulating the equations into closed-form expressions, it removes symbolic evaluations required in the standard PRBM, resulting in one to two orders of magnitude faster simulation time while preserving accuracy. Stable transient simulations are achieved at fine time steps ($\Delta t={10}^{-8}$ s). A systematic parametric study highlights preload force, flexure stiffness, friction coefficients, and tangential stiffness as dominant factors in extending the linear frequency–velocity regime. Overall, the PRBM–LuGre framework bridges the gap between computationally intensive finite element analysis and oversimplified lumped models, providing an accurate and efficient tool for design-oriented optimization of compliant piezoelectric actuators. Full article

Piezoelectric actuators, widely used in micro-positioning and active control systems, show important hysteresis characteristics. In particular, the hysteresis contribution is a complex phenomenon that is difficult to model when the input amplitude and frequency are time-dependent. Existing dynamic physical models poorly describe the hysteresis influence of industrial mechatronic devices. This paper proposes a novel hybrid data-driven model based on the Bouc–Wen and backlash hysteresis formulations to appraise and compensate for the nonlinear effects. Firstly, the performance of the piezoelectric actuator was simulated and then tested in a complete representative domain, and then using the committee machine approach. Experimental campaigns were conducted to develop an algorithm that incorporated Bouc–Wen and backlash hysteresis parameters derived via genetic algorithm (GA) and particle swarm optimization (PSO) approaches for identification. These parameters were combined in a committee machine using a set of frequency clusters. The results obtained demonstrated an error reduction of 23.54% for the committee machine approach compared with the complete approach. The root mean square error (RMSE) was 0.42 µm, and the maximum absolute error (MAE) appraisal was close to 0.86 µm in the 150–250 Hz domain via the Bouc–Wen sub-model tuned with the genetic algorithm (GA). Full article

Due to the various application scenarios of micro-positioning platforms, designing the structure of a micro-positioning platform that accommodates performance specifications for specific real-world applications presents significant challenges. Piezoelectric actuators, known for their high-precision driving capabilities, are widely used in micro-positioning platforms. However, their limited output displacement restricts the platform’s operational workspace. To simplify the complexity of traditional coarse–fine composite systems and avoid the interference and cost burden introduced by coarse adjustment systems, a novel large-range parallel micro-positioning platform is proposed in this paper. Through a modular configuration, lever-type, Z-shaped, and L-shaped three-stage amplification mechanisms are connected in series to achieve large-stroke motion with three degrees of freedom (DOFs), effectively compensating for the limited output displacement of the piezoelectric actuators. The structure employs three symmetric support branches in parallel to the end-effector, significantly enhancing the system’s structural symmetry, thereby improving the stability and precision of the operation. Furthermore, based on the pseudo-rigid-body model theory and the Lagrangian method, the kinematic and dynamic models of the micro-positioning platform are established. Finite element simulations are conducted to validate performance parameters such as the single-branch amplification ratio, parallel amplification ratio, and natural frequency. In addition, the platform’s operational workspace is also calculated and analyzed. The results indicate that the designed micro-positioning platform achieves a high amplification ratio of 17.5, with output motions approximately decoupled (coupling ratio less than 1.25%) in each DOF, and the operational workspace is significantly improved. Full article

Robotic systems are becoming increasingly crucial in applications requiring high precision. While a robot can operate using basic sensor feedback under controlled conditions, achieving micro-level accuracy requires more comprehensive data integration, especially in dynamic environments. The fusion of data from a variety of sensors is necessary for improving the positioning accuracy of a robot because the accuracy of one type of sensor is insufficient. The field of micro-positioning presents new challenges and tasks that have been gradually explored in the recent literature published from 2015 to 2025. Micro-positioning is a complex operation that involves factors such as mechanical drift, environmental effects, and sensor signal errors. Hybrid fusion is a sensor fusion technique that combines elements of fusion at different levels. For the effective deployment of robots in such contexts, it is essential to integrate multiple sensors and ensure reliable data fusion between them. This involves the use of different sensors, advanced fusion algorithms, and accurate calibration methods through sensor fusion and sophisticated data processing techniques. This literature review presents an analysis of the sensor data fusion methods for precise robot micro-positioning. The focus is on the investigated sensors, the applied synthesis methods, and the developed algorithms and their practical application to identify the existing gaps for future system improvements. Finally, discussions and conclusions based on the collected ideas are presented. Full article

This study investigates the impact of material selection on the performance of linear slideways in ultraprecision machines used for freeform surface machining. The primary objective is to address challenges related to load-bearing capacity and limited bandwidth in slow tool servo (STS) techniques. Multi-body dynamic (MBD) simulations are conducted to evaluate the performance of two materials, alloy steel and metal matrix composite (MMC), within the linear slideway system. Key performance parameters, including acceleration, velocity, and displacement, are analyzed to compare the two materials. The findings reveal that MMC outperforms alloy steel in acceleration, velocity, and displacement, demonstrating faster response times and greater linear displacement, which enhances the capabilities of STS-based ultraprecision machining. This study highlights the potential of utilizing lightweight materials, such as MMC, to optimize the performance and efficiency of linear slideways in precision engineering applications. Full article

Permanent Magnet Linear Oscillating Motors (PMLOMs) are popular in micro-positioning systems, biomedical devices, and refrigeration compressors due to their simple structure, high efficiency, rapid response, and quiet operation. This paper proposes a method for the analysis and optimization of electromechanical systems that employs a moving magnet linear oscillating motor. A simplified magnetic circuit method model was built to derive an electromagnetic thrust formula, and the initial design parameters of the motor and the thrust at the equilibrium position were calculated. Subsequently, a finite element model was developed, and a multi-objective optimization method was applied to refine the key dimensions of the motor to enhance its thrust characteristics. Furthermore, an analysis of the resonant characteristics of the electromechanical coupled system was conducted to identify the optimal operating frequency for the optimization scheme. Finally, the experimental validation of the optimized design was performed on a prototype, with the measured data showing a general correlation with the trends observed in the simulation analysis results. The effectiveness of this system analysis method was validated through experimental data. The results demonstrate that the thrust at the initial position is linearly correlated with both the outer arc radius of the permanent magnet and its mechanical pole arc coefficient. Additionally, the axial length of the outer stator, the axial spacing between the two outer stators, and the axial length of the magnets serve as key influencing parameters for the thrust characteristics within the effective stroke range. Furthermore, when the motor operates at its mechanical resonance frequency, it can attain the maximum efficiency. Full article

Replacing the endocentric lenses in traditional Phase-Measuring Deflectometry (PMD) with bi-telecentric lenses can reduce the number of parameters to be optimized during the calibration process, which can effectively increase both measurement precision and efficiency. Consequently, the low distortion characteristics of bi-telecentric PMD contribute to improved measurement accuracy. However, the calibration of the extrinsic parameters of bi-telecentric lenses requires the help of a micro-positioning stage. Using a micro-positioning stage for the calibration of external parameters can result in an excessively cumbersome and time-consuming calibration process. Thus, this study proposes a holistic and flexible calibration solution for which only one flat mirror in three poses is needed. In order to obtain accurate measurement results, the calibration residuals are utilized to construct the inverse distortion map through bicubic Hermite interpolation in order to obtain accurate anchor positioning result. The calibrated stereo bi-telecentric PMD can achieve 3.5 μm (Peak-to-Valley value) accuracy within 100 mm (Width) × 100 mm (Height) × 200 mm (Depth) domain for various surfaces. This allows the obtaining of reliable measurement results without restricting the placement of the surface under test. Full article

In this paper, a novel three-degree-of-freedom piezoelectric-driven micro-positioning platform based on a lever combination compound bridge-type displacement amplification mechanism is proposed. The micro-positioning platform proposed in this paper aims to solve the current problem of the large size and small travel of the three-degree-of-freedom piezoelectric-driven micro-positioning platform. In this paper, a lever combination compound bridge-type displacement amplification mechanism combined with a new biaxial flexible hinge is proposed, the structural dimensions of the lever mechanism and the compound bridge mechanism are optimized, and the amplification multiplier is determined. The maximum output simulation analysis of the micro-positioning platform is carried out by using ANSYS, and the experimental test system is built for verification. The validation results show that the maximum errors between simulation and experiment in the z-direction, rotation direction around x, and rotation direction around y are 64 μm, 0.016°, and 0.038°, respectively, and the corresponding maximum relative errors are 5.6%, 2.4%, and 6.6%, respectively, which proves the feasibility of the theoretical design. Full article

To achieve cost-effective micro-/nano-displacement adjustment, this paper integrates the advantages of flexible hinge micro-/nano-displacement transmission. A linear stepper motor is utilized as the driving component to design and develop a high-precision, low-cost micro-/nano-positioning system. The structure, design, and working principles of the micro-/nano-positioning platform are introduced. The scaling factor model between micro-positioning platforms and nano-positioning platforms is analyzed. Static and dynamic models of flexible mechanisms have been established. The dimensions of the mechanical structure and the selection of motors are determined. The mechanical characteristics of the micro-/nano-positioning platform are validated through finite element analysis. To address the characteristic of increasing loads during the transmission process, an intelligent control system based on current feedback is designed and developed. The integration of drive and control provides a high level of system integration. Finally, experimental calibration was conducted to test the motion characteristics of the linear stepper motor-driven micro-/nano-positioning platform. It achieved a minimum displacement control resolution of 100 nm and demonstrated a certain level of stability. Full article

In recent years, there has been significant interest in incorporating micro-actuators into industrial environments; this interest is driven by advancements in fabrication methods. Piezoelectric actuators (PEAs) have emerged as vital components in various applications that require precise control and manipulation of mechanical systems. These actuators play a crucial role in the micro-positioning systems utilized in nanotechnology, microscopy, and semiconductor manufacturing; they enable extremely fine movements and adjustments and contribute to vibration control systems. More specifically, they are frequently used in precision positioning systems for optical components, mirrors, and lenses, and they enhance the accuracy of laser systems, telescopes, and image stabilization devices. Despite their numerous advantages, PEAs exhibit complex dynamics characterized by phenomena such as hysteresis, which can significantly impact accuracy and performance. The characterization of these non-linearities remains a challenge for PEA modeling. Recurrent artificial neural networks (ANNs) may simplify the modeling of the hysteresis dynamics for feed-forward compensation. To address these challenges, robust control strategies such as integral fast terminal sliding mode control (IFTSMC) have been proposed. Unlike traditional fast terminal sliding mode control methods, IFTSMC includes integral action to minimize steady-state errors, improving the tracking accuracy and disturbance rejection capabilities. However, accurate modeling of the non-linear dynamics of PEAs remains a challenge. In this study, we propose an ANN-based IFTSMC controller to address this issue and to enhance the precision and reliability of PEA positioning systems. We implement and validate the proposed controller in a real-time setup and compare its performance with that of a PID controller. The results obtained from real PEA experiments demonstrate the stability of the novel control structure, as corroborated by the theoretical analysis. Furthermore, experimental validation reveals a notable reduction in error compared to the PID controller. Full article

In sound signal processing, angle of arrival indicates the direction from which a propagating sound signal arrives at a point where multiple omnidirectional microphones are positioned. Considering a small underwater platform (e.g., underwater unmanned vehicle), this article addresses how to estimate a non-cooperative target’s signal direction utilizing the minimum number of omnidirectional microphones. It is desirable to use the minimum number of microphones, since one can reduce the cost and size of the platform by using small number of omnidirectional microphones. Suppose that each microphone measures a real-valued sound signal whose speed and frequency information are not known in advance. Since two microphones cannot determine a unique AOA solution, this study presents how to estimate the angle of arrival using a general configuration composed of three omnidirectional microphones. The effectiveness of the proposed angle of arrival estimator utilizing only three microphones is demonstrated by comparing it with the state-of-the-art estimation algorithm through computer simulations. Full article