Search Results (1,728)

This study presents the design, implementation, and experimental validation of a self-contained earthquake early warning system (EEWS) based on real-time frequency-domain analysis of ground motion. The proposed system integrates a low-noise triaxial micro-electro-mechanical system (MEMS) accelerometer with a high-performance microcontroller, enabling autonomous seismic event detection without dependence on external communications or centralized infrastructure. The characteristic period of ground motion (τ_c) is estimated using a spectral moment method applied to the first three seconds of vertical acceleration following P-wave arrival. Event triggering is based on a short-term average/long-term average (STA/LTA) algorithm, with alarm logic incorporating both spectral and amplitude thresholds to reduce false positives from low-intensity or distant events. Experimental validation was conducted using a custom-built uniaxial shaking table, replaying 10 real earthquake records (Mw 4.1–7.7) in 20 repeated trials each. Results show high repeatability in τ_c estimation and strong correlation with event magnitude, demonstrating the system’s reliability. The findings confirm that modern embedded platforms can deliver rapid, robust, and cost-effective seismic warning capabilities. The proposed EEW solution is well-suited for deployment in critical infrastructure and resource-limited seismic regions, supporting scalable and decentralized early warning applications. Full article

Vehicle load is crucial for road design, maintenance, and expansion, while vehicle speed and lateral position are essential for traffic management and driving safety. This paper introduces a method for collecting vehicle speed, lateral position, and load information using roadside Micro-Electromechanical Systems (MEMS) accelerometers located on the pavement. Firstly, this research analyzes the distribution of pavement vibration responses in both lateral and vertical directions based on the Finite Element Method (FEM) data provided in the literature. Then, pavement vibration data is collected by roadside sensors with a Full-scale Accelerated Loading Tester, considering varying vehicle speeds, loads, and lateral positions. The results reveal that the vertical peak acceleration increases linearly with vehicle speed within a range of 5–22 km/h, decreases following a power law as the lateral distance between the wheel center and sensor increases from 0.4 to 0.9 m, which is consistent with the trends observed in the literature’s FEM data. The vibration energy of the vertical acceleration exhibits a positive linear correlation with the total vehicle load, with a correlation coefficient of 0.885. This approach offers a practical method for vehicle load estimation, optimal sensor deployment, and enhancement of pavement performance monitoring systems. Full article

Continuous monitoring of environmental and physiological parameters is essential for early diagnostics, real-time decision making, and intelligent system adaptation. Recent advancements in bio-microelectromechanical systems (BioMEMS) sensors have significantly enhanced our ability to track key metrics in real time. However, continuous monitoring demands sustainable energy supply solutions, especially for on-site energy replenishment in areas with limited resources. Artificial intelligence (AI), particularly large language models, offers new avenues for interpreting the vast amounts of data generated by these sensors. Despite this potential, fully integrated systems that combine self-powered BioMEMS sensing with AI-based analytics remain in the early stages of development. This review first examines the evolution of BioMEMS sensors, focusing on advances in sensing materials, micro/nano-scale architectures, and fabrication techniques that enable high sensitivity, flexibility, and biocompatibility for continuous monitoring applications. We then examine recent advances in energy harvesting technologies, such as piezoelectric nanogenerators, triboelectric nanogenerators and moisture electricity generators, which enable self-powered BioMEMS sensors to operate continuously and reducereliance on traditional batteries. Finally, we discuss the role of AI in BioMEMS sensing, particularly in predictive analytics, to analyze continuous monitoring data, identify patterns, trends, and anomalies, and transform this data into actionable insights. This comprehensive analysis aims to provide a roadmap for future continuous BioMEMS sensing, revealing the potential unlocked by combining materials science, energy harvesting, and artificial intelligence. Full article

Microelectromechanical system (MEMS) devices are specialized electronic devices that integrate the benefits of both mechanical and electrical structures. However, the contact behavior between the interfaces of these structures can significantly impact the performance of MEMS devices, particularly when the surface roughness approaches the characteristic size of the devices. In such cases, the contact between the interfaces is not a perfect face-to-face interaction but occurs through point-to-point contact. As a result, the contact area changes with varying contact pressures and surface roughness, influencing the thermal and electrical performance. By integrating the CMY model with finite element simulations, we systematically explored the thermal conductance regulation mechanism of MEMS contact switches. We analyzed the effects of the contact pressure, micro-hardness, surface roughness, and other parameters on thermal conductance, providing essential theoretical support for enhancing reliability and optimizing thermal management in MEMS contact switches. We examined the thermal contact, gap, and joint conductance of an MEMS switch under different contact pressures, micro-hardness values, and surface roughness levels using the CMY model. Our findings show that both the thermal contact and gap conductance increase with higher contact pressure. For a fixed contact pressure, the thermal contact conductance decreases with rising micro-hardness and root mean square (RMS) surface roughness but increases with a higher mean asperity slope. Notably, the thermal gap conductance is considerably lower than the thermal contact conductance. Full article

The stable operation of micromachine systems relies on reliable power management, where DC-DC converters provide energy with high efficiency to extend operational endurance. However, these converters also constitute significant electromagnetic interference (EMI) sources that may interfere with the normal functioning of micro-electromechanical systems. This paper proposes a boost converter utilizing Pulse Width Modulation (PWM) with peak current mode control to address the EMI issues inherent in the switching operation of DC-DC converters. The converter incorporates a Hybrid Spread Spectrum (HSS) technique to effectively mitigate EMI noise. The HSS combines a 1.2 MHz pseudo-random spread spectrum with a 9.4 kHz triangular periodic spread spectrum. At a standard switching frequency of 2 MHz, the spread spectrum range is set to ±7.8%. Simulations conducted using a 0.5 μm Bipolar Complementary Metal-Oxide-Semiconductor Double-diffused Metal-Oxide-Semiconductor (BCD) process demonstrate that the HSS technique reduces EMI around the switching frequency by 12.29 dBμV, while the converter’s efficiency decreases by less than 1%. Full article

This article aims to utilize a microelectromechanical system (MEMS) to modulate coupling behavior of silicon nitride (Si₃N₄) waveguides to perform an optical switch based on a directional coupling (DC) mechanism. There are two states of the switch. First state, a Si₃N₄ wire is initially positioned up suspended in the air. In the second state, this wire will be moved down to be placed between two arms of the DC waveguides, changing the coupling behavior to achieve bar and cross states of the optical switch function. In the future, the MEMS will be used to move this wire down. In this work, we present simulations of the two static states to optimize the DC structure parameters. Based on the simulated results, the device size is 8.8 μm × 55 μm. The insertion loss is calculated to be approximately 0.24 dB and 0.33 dB, the extinction ratio is approximately 24.70 dB and 25.46 dB, and the crosstalk is approximately −24.60 dB and −25.56 dB, respectively. In the C band of optical communication, the insertion loss ranges from 0.18 dB to 0.47 dB. As such, this device will exhibit excellent optical switch performance and provide advantages in many integrated optics-related optical systems applications. Furthermore, it can be used in optical communications, data centers, LiDAR, and so on, enhancing important reference value for such applications. Full article

Two-dimensional (2D) materials have been proposed for use in a multitude of applications, with graphene being one of the most well-known 2D materials. Despite their potential to contribute to innovative solutions, the fabrication of such devices still faces significant challenges. One of the key challenges is the fabrication at a wafer-level scale, a fundamental step for allowing reliable and reproducible fabrication of a large volume of devices with predictable properties. Overcoming this barrier will allow further integration with sensors and actuators, as well as enabling the fabrication of complex circuits based on 2D materials. This work presents the fabrication steps for a process that allows the on-wafer fabrication of active and passive radiofrequency (RF) devices enabled by graphene. Two fabrication processes are presented. In the first one, graphene is transferred to a back gate surface using critical point drying to prevent cracks in the graphene. In the second process, graphene is transferred to a flat surface planarized by ion milling, with the gate being buried beneath the graphene. The fabrication employs a damascene-like process, ensuring a flat surface that preserves the graphene lattice. RF transistors, passive RF components, and antennas designed for backscatter applications are fabricated and measured, illustrating the versatility and potential of the proposed method for 2D material-based RF devices. The integration of graphene on devices is also demonstrated in an antenna. This aimed to demonstrate that graphene can also be used as a passive device. Through this device, it is possible to measure different backscatter responses according to the applied graphene gating voltage, demonstrating the possibility of wireless sensor development. With the proposed fabrication processes, a flat graphene with good quality is achieved, leading to the fabrication of RF active devices (graphene transistors) with intrinsic f_T and f_max of 14 GHz and 80 GHz, respectively. Excellent yield and reproducibility are achieved through these methods. Furthermore, since the graphene membranes are grown by Chemical Vapor Deposition (CVD), it is expected that this process can also be applied to other 2D materials. Full article

In this study, we present the design and electromagnetic performance optimization of a micro-electromechanical system (MEMS) miniature outer-rotor permanent magnet motor. With increased attention towards higher torque density and lower torque pulsations in MEMS micromotor designs, an adaptation of an external rotor can be highly attractive. However, with the design complexity involved in such high-performance MEMS outer-rotor motor designs, the ultra-miniature 3D coil structures and the thin-film topology surrounding the air gap have been one of the main challenges. In this study, an ultra-thin outer-rotor motor with 3D MEMS silicon-based coils and a MEMS-compatible manufacturing method for the 3D coils is presented. Additionally, finite element simulations are conducted for the thin-film topology around the air gap to optimize performance characteristics such as torque developed, torque pulsations, and back electromotive force amplitude. Ultimately, the average magnetic flux density increased by 37.1%, from 0.361 T to 0.495 T. The root mean square (RMS) value of the back EMF per phase rises by 14.4%. Notably, the average torque is improved by 11.3%, while the torque ripple is significantly reduced from 1.281 mNm to 0.74 mNm, corresponding to a reduction of 49.9% in torque ripple percentage. Full article

Medical phantoms are essential to imaging calibration, clinician training, and the validation of therapeutic procedures. However, most ultrasound phantoms prioritize acoustic realism while neglecting the viscoelastic and anisotropic properties of fibrous soft tissues. This gap limits their effectiveness in modeling realistic biomechanical behavior, especially in wave-based diagnostics and therapeutic ultrasound. Current materials like gelatine and agarose fall short in reproducing the complex interplay between the solid and fluid components found in biological tissues. To address this, we developed a soft, anisotropic composite whose dynamic mechanical properties resemble fibrous biological tissues such as skin and skeletal muscle. This material enables wave propagation and vibration studies in controllably anisotropic media, which are rare and highly valuable. We demonstrate the tunability of damping and stiffness aligned with fiber orientation, providing a versatile platform for modeling soft-tissue dynamics and validating biomechanical simulations. The phantoms achieved Young’s moduli of 7.16–11.04 MPa for skin and 0.494–1.743 MPa for muscles, shear wave speeds of 1.51–5.93 m/s, longitudinal wave speeds of 1086–1127 m/s, and sound absorption coefficients of 0.13–0.76 dB/cm/MHz, with storage, loss, and complex moduli reaching 1.035–6.652 kPa, 0.1831–0.8546 kPa, and 2.138–10.82 kPa. These values reveal anisotropic response patterns analogous to native tissues. This novel natural fibrous composite system affords sustainable, low-cost ultrasound phantoms that support both mechanical fidelity and acoustic realism. Our approach offers a route to next-gen tissue-mimicking phantoms for elastography, wave propagation studies, and dynamic calibration across diverse clinical and research applications. Full article

This study identifies different polymers using their fluorescent data under various light wavelengths that ranged from 245 nm to 345 nm in 10 nm intervals. The primary goal of the proposed method is to select optimal wavelengths that can lead to the accurate identification of six polymers: polyamide 6 (PA6), polymethyl methacrylate (PMMA), polypropylene (PP), polystyrene (PS), high-density polyethylene (HDPE), and polyethylene terephthalate (PET). By examining the specific fluorescence emission patterns of these polymers, the study provides insight into how each material responds uniquely to different excitation light sources. The potential approach could streamline polymer identification in recycling applications or even in quality control and environmental monitoring, including microplastics. This approach could lead to improved accuracy in polymer classification, contributing to more efficient material sorting and processing. Full article

This paper presents the first demonstration and comparison of two identical oscillator circuits employing piezoelectric zinc oxide (ZnO) microelectromechanical systems (MEMS) resonators, implemented on conventional printed-circuit-board (PCB) and three-dimensional (3D)-printed acrylonitrile butadiene styrene (ABS) substrates. Both oscillators operate simultaneously at dual frequencies (260 MHz and 437 MHz) without the need for additional circuitry. The MEMS resonators, fabricated on silicon-on-insulator (SOI) wafers, exhibit high-quality factors (Q), ensuring superior phase noise performance. Experimental results indicate that the oscillator packaged using 3D-printed chip-carrier assembly achieves a 2–3 dB improvement in phase noise compared to the PCB-based oscillator, attributed to the ABS substrate’s lower dielectric loss and reduced parasitic effects at radio frequency (RF). Specifically, phase noise values between −84 and −77 dBc/Hz at 1 kHz offset and a noise floor of −163 dBc/Hz at far-from-carrier offset were achieved. Additionally, the 3D-printed ABS-based oscillator delivers notably higher output power (4.575 dBm at 260 MHz and 0.147 dBm at 437 MHz). To facilitate modular characterization, advanced packaging techniques leveraging precise 3D-printed encapsulation with sub-100 μm lateral interconnects were employed. These ensured robust packaging integrity without compromising oscillator performance. Furthermore, a comparison between two transistor technologies—a silicon germanium (SiGe) heterojunction bipolar transistor (HBT) and an enhancement-mode pseudomorphic high-electron-mobility transistor (E-pHEMT)—demonstrated that SiGe HBT transistors provide superior phase noise characteristics at close-to-carrier offset frequencies, with a significant 11 dB improvement observed at 1 kHz offset. These results highlight the promising potential of 3D-printed chip-carrier packaging techniques in high-performance MEMS oscillator applications. Full article

This study presents a comprehensive multi-objective optimization framework specifically designed for micro-electromechanical systems (MEMS). The framework integrates both traditional and adaptive optimization techniques, named Surrogate-Assisted Multi-Objective Optimization (SAMOO) and Adaptive-SAMOO (A-SAMOO), respectively. By addressing key limitations of traditional approaches, such as the consideration of objective constraints and the provision of multiple design options, the proposed framework enhances both flexibility and practical applicability. Results show that adaptive optimization outperforms traditional offline methods by delivering a greater number and higher quality of optimal solutions while requiring fewer finite element method simulations. The adaptive approach showed a significant advantage by attaining high-quality solutions while requiring only 2.8% of the finite element method (FEM) evaluations compared to traditional methods that do not incorporate surrogate models. This performance boost highlights the advantages of online learning in enhancing the accuracy, speed, and diversity of solutions in MEMS optimization. These optimization schemes were tested on multiple MEMS devices with varying physics and complexities, specifically the U-shaped Lorentz force actuator, serpentine Lorentz force actuator, and thermal actuator. The results highlight the robustness and versatility of the proposed methods, particularly in addressing cases involving discrete design variables and strict objective constraints. This comprehensive, step-by-step framework serves as a valuable resource for researchers and practitioners aiming to optimize MEMS designs from the ground up, providing a reliable and effective approach to multi-objective optimization in MEMS applications. Full article

Background/Objectives: This review analyzes the effects of invasive and non-invasive methods of knee joint unloading on knee loading, employing a biomechanical model to evaluate their impact. Methods: PubMed, Web of Science, Cochrane, and Scopus were searched up to 15 May 2024 to identify eligible clinical studies evaluating Joint Space Width, Cartilage Thickness, the Western Ontario and McMaster Universities Osteoarthritis Index, the Knee Injury and Osteoarthritis Outcome Score system, Gait velocity, Peak Knee Adduction Moment, time to return to sports and to work, ground reaction force, and the visual analogue scale pain score. A second search was conducted to select a biomechanical model that could be parametrized, including the modifications that each treatment would impose on the knee joint and was capable of estimate joint loading to compare the effectiveness of each method. Results: Analyzing 28 studies (1652 participants), including 16 randomized clinical trials, revealed significant improvements mainly when performing knee joint distraction surgery, increasing Joint Space Width even after removal, and high tibial osteotomy, which realigns the knee but does not reduce loading. Implantable shock absorbers are also an attractive option as they partially unload the knee but require further investigation. Non-invasive methods improve biomechanical indicators of knee joint loading; however, they lack quantitative analysis of cartilage volume or Joint Space Width. Conclusions: Current evidence indicates a clear advantage in knee joint unloading methods, emphasizing the importance of adapted therapy. However, more extensive research, particularly using non-invasive approaches, is required to further understand the underlying knee joint loading mechanisms and advance the state of the art. Full article

The weighted averaging algorithm is a widely adopted high-efficiency data fusion approach for micro-electro-mechanical system (MEMS) inertial measurement unit (IMU) array, where the configuration of weighting coefficients plays a critical role in improving measurement accuracy. In this study, an optimal weighted averaging algorithm based on the fruit fly optimization algorithm (FOA) is proposed by analyzing the data fusion mechanism of the MEMS IMU array. Firstly, a measurement model for the MEMS IMU array is constructed, and the principles of data fusion are systematically investigated. Secondly, the optimal weighting coefficients under ideal conditions are derived, and their limitations in practical applications are discussed. Building on this framework, the FOA is employed to search for optimal weights, enabling the realization of high-precision weighted averaging fusion. Simulation and experimental results demonstrate that the proposed method outperforms conventional approaches in terms of accuracy and robustness. Full article

Three-dimensional electric field sensors (3D EFSs) can simultaneously measure electric field components in three mutually orthogonal directions and comprehensively capture the spatial distribution and dynamic changes of the electric field. They can be widely used in atmospheric science, smart grids, aerospace, target detection, and other fields. This paper deeply analyzes the latest progress in 3D EFSs, focusing on four major types of sensors: DC field mill, electro-optic effect, capacitive sensing, and microelectromechanical system (MEMS). It elaborates on their working principles, structural design, and decoupling calibration methods. At the same time, the advantages and disadvantages of various types of 3D EFSs and their applications in different fields are analyzed. Finally, the challenges faced by 3D EFS technology and its future development direction are discussed. Full article