Search Results (366)

Trends in Micro- and Nano-Lithography required for future development of large area applications ranging from high-packing-density electronics to solar cells are surveyed and outlined. Strategies to use direct laser writing to define etch masks over large areas by: (i) fixed beam moving stage and (ii) moving beam moving stage approaches are presented. The extension of planar 2D and stacked 2D (or 2.5D) fabrication methods into 3D micro- and nano-fabrication is discussed. One of the essential future characteristics of 3D nanolithography is real-time feedback capability. This can be realised via inherent 3D-capable holography, which bridges lithographic exposure control, wavefront sensing, and adaptive feedback, providing a pathway to stitch-free, large-area 3D patterning. The future of micro-fabrication is expected to evolve via highly specialised 3D architecture design and reduction in post-processing steps. Full article

Freeform optics belong to the increasingly important elements in optical research and industry, which pose several challenges regarding design and highly precise manufacturing. First being used in cameras and for focusing, nowadays freeform optics are used in a broad range of applications, from lighting to LiDAR, from endoscopy to photovoltaics, and from astronomical instruments to quantum cryptography. Designing freeform optics can be based on different theories and methods. Fabrication is possible by mechanical methods, such as diamond turning or high-precision milling, often followed by different polishing techniques, as well as laser-based techniques, mainly applying different lithographic techniques. Here, we give an overview of recent design and optimization methods, production methods used during the last years, and applications of freeform optics, including the possibility to combine freeform optics with tunability for different applications. We describe the opportunities of new applications as well as common problems and give an outlook towards future directions of research and development. Full article

While fused silica microlens arrays (MLAs) act as crucial components in the fields of infrared optics and laser systems, direct laser writing has been proposed for the fabrication of MLAs. However, the layer-by-layer slicing strategy generally leads to stepped surface textures formed on the microlens surface, resulting in high surface roughness and limited transmittance. This work proposes a temperature-controlled CO₂ laser polishing method for the fabrication and subsequent smoothing of fused silica microlens arrays. Specifically, an infrared temperature measurement system is integrated into a CO₂ laser direct writing platform. Correspondingly, a proportional-integral-derivative algorithm is used to adjust the laser power in real time based on the temperature deviation at the processing spot, thus maintaining the polishing zone in a molten rather than vaporizing state. Furthermore, a finite element model of laser polishing of fused silica coupled with laser heating and fluid flow is developed, which is used to analyze the spatiotemporal evolution of the temperature field, as well as its correlation with the response of the processed surface. Experimental results show that temperature-controlled laser polishing reduces the surface roughness of the fabricated MLAs by 86.8%, while the transmittance in the visible band remains above 90%. This work provides a feasible closed-loop polishing method and a mechanistic analysis model for the laser polishing of fused silica MLAs. Full article

Resolving the dichotomy between wide detection ranges and low mechanical hysteresis remains a critical challenge in flexible electronics, largely governed by the intrinsic viscoelastic creep of polymeric dielectrics. Drawing inspiration from the distinctive load-bearing mechanisms of traditional Chinese Sparrow Brace architecture, we report a mechanically optimized tilted micro-architecture designed to enhance structural resilience. Unlike conventional soft elastomeric pillars that easily succumb to mechanical failure, this BOPS-based tilted geometry provides excellent load-bearing capacity, effectively preventing premature failure. Finite element analysis (FEA) confirms that this tilted geometry forces a fundamental shift from conventional bulk compression to structural bending. Because this bending-dominated architecture drives rapid elastic recovery, it significantly mitigates the severe effects of the polymer’s viscoelastic creep under the tested loading conditions, achieving reliable signal reversibility with low hysteresis. We fabricated this specific architecture via programmable femtosecond laser direct writing (FsLDW) on biaxially oriented polystyrene (BOPS) films, harnessing the material’s entropy-driven self-growth kinetics. By merging this localized growth mechanism with the architectural design, we effectively bypassed the complexities of traditional molding, achieving mask-free, in situ growth of large-scale, highly uniform dielectric micro-arrays. The resulting sensor delivers a remarkably broad working range (up to ~2.28 MPa) coupled with a negligible recovery error (~1.3%), an agile dynamic response (~70/80 ms), and consistent operational durability. Ultimately, this work combines architecture-inspired structural design with advanced femtosecond laser surface microengineering, providing a conceptually novel and scalable pathway for next-generation flexible sensing. Full article

Sensitivity and effective sensing range are core performance metrics of flexible pressure sensors, directly dictating their practical applicability. A key challenge in sensor design is sensitivity degradation with elevated pressure, hindering synergistic optimization of high sensitivity and broad sensing range, while cumbersome electrode fabrication further impedes facile preparation and large-scale deployment of high-performance devices. Herein, this work proposes a novel fabrication strategy for flexible iontronic pressure sensors via direct laser writing (DLW) technology. A controllable ultraviolet laser patterns polyimide substrates to fabricate hierarchical stepped conoid-like microstructural templates, which are transferred to ion gels through reverse molding. The DLW-enabled precise geometric control and hierarchical conical architectures efficiently amplify interfacial contact area variation under pressure, significantly boosting sensitivity. The resultant sensor achieves a high sensitivity of 118.4 kPa⁻¹ and a broad detection range up to 2000 kPa, with fast response/recovery times of 38.4 ms and 47 ms and excellent mechanical stability enduring 2000 loading–unloading cycles at 850 kPa. Multi-scenario physiological signal monitoring validates its accurate capture of laryngeal vibrations and joint movements. This work establishes a straightforward, efficient microfabrication route for high-performance flexible iontronic sensors, accelerating their practical application in wearable health monitoring and related fields. Full article

Hybrid metal-halide scintillators are promising for X-ray imaging, but direct fabrication of patterned arrays with high spatial precision remains challenging. Here, we report a laser-induced in situ crystallization strategy for constructing pixelated scintillator arrays from a melt-processable manganese(II) bromide glass precursor, (BuTPP)₂MnBr₄ (BuTPP⁺, butyltriphenylphosphonium). The (BuTPP)₂MnBr₄ undergoes low-temperature glass formation and can be selectively recrystallized under femtosecond laser irradiation, enabling programmable spatial patterning. Structural analyses confirm the recovery of the crystalline phase after laser writing, while photophysical measurements show markedly enhanced photoluminescence and radioluminescence compared with the glassy state. Benefiting from efficient X-ray-to-light conversion and precise array definition, the patterned scintillators exhibit a high light yield of 24,600 photons MeV⁻¹, an X-ray detection limit of 4.89 µGy_air s⁻¹, and a spatial resolution of 10 lp mm⁻¹. This work establishes the laser-induced in situ crystallization strategy as an effective route to integrated hybrid scintillator arrays and offers a versatile platform for customizable and low-temperature processed X-ray imaging devices for imaging uses. Full article

Diamond antireflection techniques are of high interest for optical windows operating at extreme conditions. Herein, diamond antireflective microstructures in mid-infrared (MIR) spectral range were theoretically designed and experimentally fabricated. Finite difference time domain (FDTD) simulations were used to optimize the transmission performance of the diamond microstructures. Based on the simulation results, the optimized microstructures were fabricated by femtosecond (fs) laser direct writing (1030 nm, 300 fs, 25 kHz) followed by wet etching. After wet etching, the laser-modified zones and the accumulated graphitized clusters were effectively removed, thereby achieving the desired depth. The influences of laser power and scanning strategy on the morphology evolution of diamond microstructures were investigated. It was found that at the optimal conditions, the transmittance of the diamond increased from 70.9% to 81.4% (single-side) over a broad spectrum from 8 to 22 μm. This work demonstrates a promising hybrid fs laser/wet etching technique for diamond antireflective microstructures in MIR spectral range. Full article

Fiber Bragg Gratings (FBGs) are essential components in fiber-optic sensing systems owing to their high sensitivity, compact structure, and immunity to electromagnetic interference, and have been widely applied in structural health monitoring, aerospace, energy, and biomedical fields. Conventional FBG fabrication methods, including standing-wave, two-beam interference and phase mask methods, rely heavily on the photosensitivity of optical fibers and are limited in terms of fabrication flexibility and grating structural diversity. Femtosecond Laser Direct Writing (FLDW) has emerged as a prospective approach for FBG fabrication due to its nonlinear absorption mechanism, low thermal damage, three-dimensional processing capability and broad material compatibility. This review summarizes recent progress in FLDW-FBGs, with particular emphasis on the characteristics of point-by-point (PbP), line-by-line (LbL) and plane-by-plane (Pl-by-Pl) methods. The implementation of these methods in various fiber, including standard single-mode fibers, sapphire fibers, and polymer optical fibers, is discussed in detail. In addition, recent advances in FBG-based sensing applications under extreme environments, as well as in biomedical sensing and optical fiber communication, are reviewed. Key challenges related to fabrication efficiency, process stability, and microstructural characterization are further analyzed. Finally, potential development directions toward improved controllability, structural design flexibility, and engineering applicability of FLDW-FBGs are outlined. Full article

Mid-IR flat/integrated optics require low-loss, programmable phase control. We investigate femtosecond laser direct writing (FLDW) in aluminogermanate glass (Corning 9754), first mapping the processing landscape to delineate no modification, Type I index increase, and spatial broadening regimes. We then operate in a non-accumulating regime that provides a broad, stable writing window. Quantitative-phase microscopy yields Δφ and a monotonic Δn with optically limited cross-sections compatible with low loss. Transmission spectroscopy shows high values (about 90% up to 4 µm) and no additional absorptions across the near-IR and mid-IR range. FTIR reveals a redshift of the Ge–O–(Ge/Al) stretching envelope from ≈1 µJ, correlating with the high Δn onset. s-SNOM at 925 cm⁻¹ resolves the written line as reduced near-field amplitude and decreased phase, confirming a local complex permittivity change consistent with densification-driven Type I tracks. Together, these results define practical conditions for on-demand mid-IR flat/GRIN/Fresnel optics by FLDW in this commercial mid-IR transparent glass. Full article

Distributed acoustic sensing (DAS) systems have been widely employed in oil and gas resource exploration, pipeline monitoring, traffic and transportation, structural health monitoring, hydrophone usage, and perimeter security due to their ability to perform large-scale distributed acoustic measurements. Conventional DAS relies on Rayleigh backscattering (RBS) from standard single-mode fibers (SMFs), which inherently limits the signal-to-noise ratio (SNR) and sensing robustness. Ultra-weak fiber Bragg grating (UWFBG) arrays can significantly enhance backscattering intensity and thereby improve DAS performance. This review provides a comprehensive overview of recent advances in UWFBG arrays for high-performance DAS. We introduce major inscription techniques for UWFBG arrays, including the drawing tower grating method, ultraviolet (UV) exposure through UV-transparent coating fiber technologies, and femtosecond laser direct writing methods. Furthermore, we summarize the applications of UWFBG arrays in DAS systems for the enhancement of RBS intensity, suppression of fading, improvement of frequency response, and phase noise compensation. Finally, the prospects of UWFBG-enhanced DAS technologies are discussed. Full article

The development of photonic-integrated circuits (PICs) for data communication, sensing, and quantum computing is hindered by the high complexity and cost of traditional fabrication methods, which rely on expensive equipment, limiting accessibility for research and prototyping. This study introduces a Direct Laser Writing (DLW) system designed as a low-cost alternative, utilizing an XY platform for precise substrate movement and an optical system comprising a collimator and lens to focus the laser beam. Operating on a single layer, the system employs SU-8 photoresist to fabricate polymer-based structures on substrates such as ITO-covered glass. Preparation involves thorough cleaning, spin coating with photoresist, and pre- and post-baking to ensure material stability. This approach reduces dependence on costly infrastructure, making it suitable for academic settings and enabling rapid prototyping. A user interface and custom slicer process standard .dxf files into executable commands, enhancing operational flexibility. Experimental results demonstrate a resolution of 10 µm, with successful patterning of structures, including diffraction grids, waveguides, and multimode interference devices. This system aims to transform PIC prototype fabrication into a cost-effective, accessible process. Full article

Diffractive optical elements (DOEs) offer significant advantages over conventional refractive optics, particularly in non-visible spectral regions such as ultraviolet, gamma rays, and X-rays, where material limitations restrict traditional optical components. Owing to their design flexibility, DOEs enable the generation of complex beam profiles—including circular, vortex, and Airy beams—across a wide range of wavelengths. Despite their structural simplicity and compatibility with micro- and nanoscale fabrication, conventional DOEs often suffer from limited focusing efficiency, frequently requiring additional refractive lenses that introduce optical aberrations, increased system complexity, and higher cost. In this work, we present an integrated design and fabrication approach for micro-scale diffractive optical elements capable of achieving high focusing performance without reliance on supplementary optical components. A machine learning-based decision tree method is employed to generate optimized writing paths, which are subsequently fabricated using direct laser lithography. The proposed integrated DOE structures enable efficient focusing of multiple customized beam profiles within a compact and standalone optical element. This approach improves optical efficiency while maintaining low fabrication cost and system simplicity. The demonstrated integrated micro-DOEs provide a scalable and versatile platform for advanced beam shaping and focusing applications in photonics, particularly where compactness and performance are critical. Full article

Sapphire (α-Al₂O₃) has been widely used in high-power lasers, optical windows, semiconductor substrates, radomes, and other applications due to its exceptional optical properties, high hardness, excellent chemical stability, and thermal resistance. However, machining sapphire poses significant challenges because of the material’s high hardness and brittleness. Traditional mechanical and chemical–mechanical machine methods often fail to meet the processing requirements for micro and nanoscale structures. Recently, the use of femtosecond lasers—with ultra-short pulses and extremely high peak power—has allowed for the precise machining of sapphire with minimal thermal damage, a method akin to cold processing. Femtosecond laser processing offers significant advantages in fabricating three-dimensional micro- and nanoscale structures, surface and internal modification, optical waveguide writing, grating fabrication and dissimilar materials welding. Thus, this paper systematically reviewed the research progress in femtosecond laser processing of sapphire, covering technical approaches such as ablation, hybrid processing and direct writing micro- and nanoscale fabrication. The capability of femtosecond laser processing to modulate sapphire’s optical properties, wettability and mechanical and chemical characteristics were discussed in detail. The current challenges related to efficiency, cost, process standardization and outlines future development directions, including high-power lasers, parallel processing, AI optimization and multifunctional integration were also analyzed. Full article

Diffractive optical elements (DOEs) are essential components in optical and photonic technologies, motivating the need for rapid mass production with high-precision fabrication methods. Photopolymers are particularly attractive for DOEs production because their optical phase can be modified via both surface and refractive index modulations. In this work, we report the fabrication of DOEs on PVA/AA photopolymers using ultrafast laser direct writing. By combining surface topography measurements with a phase depth model, we extract the surface and bulk phase depth contributions and demonstrate a transition from surface-dominated modulation at 1 kHz to bulk refractive index modification under cumulative conditions at 100 kHz. These outcomes highlight ultrafast laser direct writing as a powerful, rapid and controlled method for the high-quality and rapid fabrication of DOEs. Full article

A reflective in-fiber liquid microsphere whispering gallery mode (WGM) resonator based on a Y-waveguide coupler is proposed and experimentally demonstrated. The sphere resonator is introduced inside a single-mode fiber (SMF) by using femtosecond laser micromachining and fusion splicing. A Y-waveguide coupler is fabricated with femtosecond laser direct writing, which is used to simultaneously excite and collect the WGM field through evanescent field coupling. High-index liquids are filled into the sphere through a laser-drilled channel to form a liquid microsphere where the WGM resonation takes place. The WGM resonator is sensitive to the refractive index (RI) of the filled liquids, and a RI sensitivity of 439 nm/RIU is achieved in an index range from 1.672 to 1.692. The liquid microsphere resonator is also sensitive to temperature, with a sensitivity of −307.1 pm/°C obtained. The microsphere resonator is small in size and robust, which has broad application prospects in the field of food and the chemical industry. Full article