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Microscale Processing with Non-thermal Plasma Discharges and Its Application

This special issue belongs to the section “Chemical Processes and Systems“.

Special Issue Information

Keywords

  • atmospheric microplasma jets
  • atomic layer deposition/etching (ALD/ALE)
  • biochemical sensors
  • low-temperature plasmas
  • microfluidic plasmas
  • micro/nanolithography
  • physics of microdischarges
  • plasma medicine
  • plasma nanosynthesis
  • single-atom catalysts

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Published Papers

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Processes - ISSN 2227-9717