Advances in Optical Metrology

A special issue of Photonics (ISSN 2304-6732).

Deadline for manuscript submissions: closed (15 February 2022) | Viewed by 19114

Special Issue Editors


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Guest Editor
1. Wyant College of Optical Sciences, University of Arizona, Tucson, AZ 85721, USA
2. Large Binocular Telescope Observatory, University of Arizona, Tucson, AZ 85721, USA
Interests: optical testing/metrology; wavefront analysis; large optics fabrication; optical design; opto- mechanics; numerical simulation; adaptive optics; optical system alignment; LiDAR

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Guest Editor
Institute of Photonics and Electronics, Department of Precision Instruments, Tsinghua University, Beijing 100084, China
Interests: adaptive optics; wavefront sensor; instrumentation; adaptive interferometric metrology; optical system design; application technologies
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Guest Editor
Institute for Microtechnology and Photonics (IMP), Eastern Switzerland University of Applied Sciences (OST), 9471 Buchs, Switzerland
Interests: optical fabrication; freeform optics; modelling of optics fabrication chains; thin films; thin film deposition; thin films and nanotechnology; material characterization; optics and photonics; optical physics; thin film fabrication; nanostructured materials; surface characterization
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

We are pleased to invite you to submit a manuscript to the Photonics Special Issue ‘Advances in Optical Metrology’. This Special Issue is focused on the advanced optical metrology for academia and industrial optics systems. In order to meet the demand of extreme optical performance needs, optical designers and opticians have developed a unique design model and fabrication approach for challenging surface figures. Because the understanding of target and sample are fundamental steps for planning the entire fabrication process and quality check, those extreme optics developments are always based on the established metrology limits.

Our scope includes all the challenges of metrology—from the optics of large space telescopes to the small optic systems of cellphone camera lenses. With regard to the methodology, this Special Issue aims to encompass methods using a Fizeau interferometer, a low coherence interferometer, frequency comb distance measurement, a physical contact profilometer, deflectometer, fringe projection, photogrammetry, and all possible methods for optical testing. As the above approaches adopt the unique mathematical model, data process modeling methods, such as dimensional data, surface reconstruction, tolerance, and error analysis, are also within the scope of this Special Issue.

The impact of this Special Issue is in providing insights into the latest challenges in optical metrology in various fields and to educate stakeholders throughout the optics community. We hope that the comprehensive pieces of knowledge gathered over the distinctive applications in this field encourage the sui generis answers for challenges that have not yet been resolved or that remain understudied. 

Dr. Heejoo Choi
Dr. Lei Huang
Dr. Oliver Faehnle
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Photonics is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2400 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

 

Keywords

  • optical metrology
  • optical surface testing
  • wavefront sensing and analysis
  • interferometer
  • profilometer
  • deflectometer
  • optical instrumentation
  • adaptive optics
  • numerical data process
  • optical alignment
  • optical inspection

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Published Papers (6 papers)

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Research

17 pages, 3457 KiB  
Article
Surface Shape Distortion Online Measurement Method for Compact Laser Cavities Based on Phase Measuring Deflectometry
by Yongchen Zhuang, Yamin Zheng, Shibing Lin, Deen Wang, Yifan Zhang and Lei Huang
Photonics 2022, 9(3), 151; https://doi.org/10.3390/photonics9030151 - 3 Mar 2022
Cited by 3 | Viewed by 2711
Abstract
Conventional phase measuring deflectometry (PMD) takes up a large measurement space and is not suitable for compact online measurement, as the liquid crystal display (LCD) has to be placed in parallel with the mirror under test. In this paper, a compact online phase [...] Read more.
Conventional phase measuring deflectometry (PMD) takes up a large measurement space and is not suitable for compact online measurement, as the liquid crystal display (LCD) has to be placed in parallel with the mirror under test. In this paper, a compact online phase measuring deflectometry (COPMD) with the LCD screen set perpendicular to the mirror under test is presented for surface shape distortion real-time measurement. The configuration of the COPMD in an enclosed laser cavity is proposed, and the principle of the method is theoretically derived by using the vector-form reflection law. Based on the analysis model, the fringe modulation regulation of the LCD is revealed, and the measurement errors caused by misalignments of the components are illustrated. The validity and flexibility of the COPMD method are verified in the experiment by using a single-actuator deformable mirror as the mirror under test and the PMD method as the comparison. The proposed COPMD method remarkably expands the application range of the conventional PMD method, as it could make efficient use of compact space and is applicable for real-time measurement in enclosed laser facilities and assembled laser systems. Full article
(This article belongs to the Special Issue Advances in Optical Metrology)
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15 pages, 4820 KiB  
Article
Surface Measurement of a Large Inflatable Reflector in Cryogenic Vacuum
by Henry Quach, Hyukmo Kang, Siddhartha Sirsi, Aman Chandra, Heejoo Choi, Marcos Esparza, Karlene Karrfalt, Joel Berkson, Yuzuru Takashima, Art Palisoc, Jonathan W. Arenberg, Christopher Walker, Christian Drouet d’Aubigny and Daewook Kim
Photonics 2022, 9(1), 1; https://doi.org/10.3390/photonics9010001 - 21 Dec 2021
Cited by 11 | Viewed by 3936
Abstract
The metrology of membrane structures, especially inflatable, curved, optical surfaces, remains challenging. Internal pressure, mechanical membrane properties, and circumferential boundary conditions imbue highly dynamic slopes to the final optic surface. Here, we present our method and experimental results for measuring a 1 m [...] Read more.
The metrology of membrane structures, especially inflatable, curved, optical surfaces, remains challenging. Internal pressure, mechanical membrane properties, and circumferential boundary conditions imbue highly dynamic slopes to the final optic surface. Here, we present our method and experimental results for measuring a 1 m inflatable reflector’s shape response to dynamic perturbations in a thermal vacuum chamber. Our method uses phase-measuring deflectometry to track shape change in response to pressure change, thermal gradient, and controlled puncture. We use an initial measurement as a virtual null reference, allowing us to compare 500 mm of measurable aperture of the concave f/2, 1-meter diameter inflatable optic. We built a custom deflectometer that attaches to the TVAC window to make full use of its clear aperture, with kinematic references behind the test article for calibration. Our method produces 500 × 500 pixel resolution 3D surface maps with a repeatability of 150 nm RMS within a cryogenic vacuum environment (T = 140 K, P = 0.11 Pa). Full article
(This article belongs to the Special Issue Advances in Optical Metrology)
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24 pages, 63776 KiB  
Article
Parametric Mid-Spatial Frequency Surface Error Synthesis
by Timothy Hefferan, Logan Graves, Isaac Trumper, Soojong Pak and Daewook Kim
Photonics 2021, 8(12), 584; https://doi.org/10.3390/photonics8120584 - 16 Dec 2021
Viewed by 2607
Abstract
Standard mid-spatial frequency tooling mark errors were parameterized into a series of characteristic features and systematically investigated. Diffraction encircled and ensquared energy radii at the 90% levels from an unpowered optical surface were determined as a function of the root-mean-square surface irregularity, characteristic [...] Read more.
Standard mid-spatial frequency tooling mark errors were parameterized into a series of characteristic features and systematically investigated. Diffraction encircled and ensquared energy radii at the 90% levels from an unpowered optical surface were determined as a function of the root-mean-square surface irregularity, characteristic tooling mark parameters, fold mirror rotation angle, and incident beam f-number. Tooling mark frequencies on the order of 20 cycles per aperture or less were considered. This subset encompasses small footprints on single-point diamond turned optics or large footprints on sub-aperture tool polished optics. Of the characteristic features, off-axis fabrication distance held the highest impact to encircled and ensquared energy radii. The transverse oscillation of a tooling path was found to be the second highest contributor. Both impacts increased with radial tooling mark frequency. Full article
(This article belongs to the Special Issue Advances in Optical Metrology)
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8 pages, 3820 KiB  
Communication
Image Contrast Improvement in Interference-Dark-Field Digital Holographic Microscopy
by Chi-Ching Chang, Yang-Kun Chew, Huang-Tian Chan, Mei-Fang Chou and Je-Chung Wang
Photonics 2021, 8(11), 517; https://doi.org/10.3390/photonics8110517 - 17 Nov 2021
Cited by 1 | Viewed by 2357
Abstract
Conventional dark-field digital holographic microscopy (DHM) techniques require the use of specialized optics, and, thus, obtaining dark-field images with high contrast has a high cost. Herein, we propose a DHM system that uses an interference-dark-field technique for improving image contrast. Unlike conventional dark-field [...] Read more.
Conventional dark-field digital holographic microscopy (DHM) techniques require the use of specialized optics, and, thus, obtaining dark-field images with high contrast has a high cost. Herein, we propose a DHM system that uses an interference-dark-field technique for improving image contrast. Unlike conventional dark-field DHM, the proposed technique does not require expensive and specialized optical elements, or a complicated optical setup, to obtain dark-field images. The proposed technique employs a pure optical basis method to suppress scattering noise—namely, interference-dark-field—and mainly adopts an arbitrary micro-phase shifting method to achieve destructive interference for obtaining holograms. Under the framework of the proposed technique and through the observation of the USAF 1951 resolution target, the reconstructed image can retain the high contrast of the interference-dark-field DHM. The image contrast is enhanced by at least 43% compared to that which is obtained by conventional dark-field DHM. The resolution of the system can be as high as 0.87 μm. The proposed technique can switch between bright-field and dark-field DHM and prevents damage to the sample, which results from high-intensity illumination in conventional techniques. Full article
(This article belongs to the Special Issue Advances in Optical Metrology)
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17 pages, 10099 KiB  
Article
Indoor and Outdoor Surface Measurement of 3D Objects under Different Background Illuminations and Wind Conditions Using Laser-Beam-Based Sinusoidal Fringe Projections
by Bingquan Chen, Hongxiu Gao, Hongsheng Li, Hongyang Ma, Peng Gao, Pengcheng Chu and Peng Shi
Photonics 2021, 8(6), 178; https://doi.org/10.3390/photonics8060178 - 22 May 2021
Cited by 3 | Viewed by 2431
Abstract
In this study, both theoretical analysis and experimental validation are carried out for 3D surface measurement under different indoor/outdoor environmental conditions via combining the projected laser-beam-based sinusoidal optical signal, the optical filtering technique, and the single-shot approach based on Fourier transform profilometry. The [...] Read more.
In this study, both theoretical analysis and experimental validation are carried out for 3D surface measurement under different indoor/outdoor environmental conditions via combining the projected laser-beam-based sinusoidal optical signal, the optical filtering technique, and the single-shot approach based on Fourier transform profilometry. The designed optical signal generator used in this work is capable of ensuring that the projected fringe pattern is monochromatic, higher-contrast, time-invariant, and truly sinusoidal. The proposed and developed optical setup of 3D surface measurement is portable and is used for in-situ experiments of 3D surface measurements that have been carried out under different sunlight illuminations. The experimental results indicate that accurate reconstructions of measured objects with even or varying surface reflectivity can be obtained under windy conditions and strong environmental illuminations such as the background illuminance of 5600–35,000 Lux. The generated fringe-pattern signal is not sensitive to vibrations from environmental influences including the effects of the wind, which has overcome the outdoor-measurement restrictions of the traditional interferometric system and the profilometry approaches based on phase-shifting methods. Full article
(This article belongs to the Special Issue Advances in Optical Metrology)
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13 pages, 3697 KiB  
Article
Microshape Measurement Method Using Speckle Interferometry Based on Phase Analysis
by Yasuhiko Arai
Photonics 2021, 8(4), 112; https://doi.org/10.3390/photonics8040112 - 8 Apr 2021
Cited by 7 | Viewed by 3583
Abstract
A method for the measurement of the shape of a fine structure beyond the diffraction limit based on speckle interferometry has been reported. In this paper, the mechanism for measuring the shape of the fine structure in speckle interferometry using scattered light as [...] Read more.
A method for the measurement of the shape of a fine structure beyond the diffraction limit based on speckle interferometry has been reported. In this paper, the mechanism for measuring the shape of the fine structure in speckle interferometry using scattered light as the illumination light is discussed. Furthermore, by analyzing the phase distribution of the scattered light from the surface of the measured object, this method can be used to measure the shapes of periodic structures and single silica microspheres beyond the diffraction limit. Full article
(This article belongs to the Special Issue Advances in Optical Metrology)
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