Fabrication of Nanoscale Electronics Devices

A special issue of Nanomaterials (ISSN 2079-4991). This special issue belongs to the section "Nanoelectronics, Nanosensors and Devices".

Deadline for manuscript submissions: closed (30 June 2023) | Viewed by 2572

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Instituto de Química, Universidade Federal do Rio Grande do Norte, Natal 59.078-970, Brazil
Interests: electrochemical sensors; preparation of materials for micro-sensors; environmental monitoring; water treatment; electrocatalytic materials; electroorganic synthesis; electroanalysis; green hydrogen production and waste valorization
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Special Issue Information

Dear Colleagues,

In recent years, we have seen an significant increase in the number of electronic devices that have been developed and fabricated; however, their preparation methodologies are still considered expensive as they require time-consuming design, calibration, and comparisons and extensive modifications steps. Thus, more appropriate elaboration strategies have been investigated to achieve improvements in sensibility, selectivity, and detection reliability, using traditional materials but modifying the size of the electronic devices. Consequently, miniaturization is a hot-spot investigation topic because it has allowed us to better understand the several processes that take place in the micro- and nano- environments, and it also provides significant new benefits such as real-time monitoring and high sensitivity as a consequence of the high and efficient mass transport in chemical, biological, and nature behaviors, as well as in physics and engineering.

In the development of nanodevices, various materials have been widely used as supports due to their simplicity and active surface to improve performance in specific concentration control areas or chemical–biological environments. Among the various types of materials, metallic, semiconductor, organic, and carbon materials have found extensive use in a variety of fields, including supercapacitor, sensor, biomedical, energy, photovoltaic, and electrochemical applications, as well as in physics, mechanical, electronic, electrical, and engineering devices, because of their desirable properties. Other than for integrated circuits, new electronic nanodevices have been developed for light emission, transmission, and detection in optoelectronic and photonic systems, as well as for new chemical, biological, and environmental sensors. These devices frequently comprise nanoscale heterojunctions. Shape, high chemical stability, high strength, high electrical conductivity, high surface area, outstanding electrocatalytic activity, and compatibility with matrix materials are just a few of their characteristics. Therefore, the fabrication of nanoscale electronic devices has recently attracted interest due to their remarkable qualities.

The design, manufacture, modeling, and demonstration of nanodevices for various purposes are the main topics of this Special Issue. The structure, materials, characterization methods, underlying physical principles, and theoretical knowledge of transistors, diodes, and memory devices utilized as the fundamental components of electrical and optoelectronic systems or sensors are among the specific subjects covered.

We welcome the submission of research, review, and numerical simulation papers, particularly when accompanied by experimental data.

Dr. Carlos A. Martínez-Huitle
Guest Editor

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Keywords

  • physics, mechanical, electronic, electrical and engineering devices
  • electronic nanodevices
  • supercapacitor, sensor, biomedical, energy, photovoltaic and electrochemical applications

Published Papers (2 papers)

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Research

11 pages, 2111 KiB  
Article
Advanced Etching Techniques of LiNbO3 Nanodevices
by Bowen Shen, Di Hu, Cuihua Dai, Xiaoyang Yu, Xiaojun Tan, Jie Sun, Jun Jiang and Anquan Jiang
Nanomaterials 2023, 13(20), 2789; https://doi.org/10.3390/nano13202789 - 18 Oct 2023
Viewed by 1355
Abstract
Single LiNbO3 (LNO) crystals are widely utilized in surface acoustic wave devices, optoelectronic devices, and novel ferroelectric memory devices due to their remarkable electro-optic and piezoelectric properties, and high saturation and remnant polarizations. However, challenges remain regarding their nanofabrication that hinder their [...] Read more.
Single LiNbO3 (LNO) crystals are widely utilized in surface acoustic wave devices, optoelectronic devices, and novel ferroelectric memory devices due to their remarkable electro-optic and piezoelectric properties, and high saturation and remnant polarizations. However, challenges remain regarding their nanofabrication that hinder their applications. The prevailing etching techniques for LNO encompass dry etching, wet etching, and focused-ion-beam etching, each having distinct merits and demerits. Achieving higher etching rates and improved sidewall angles presents a challenge in LNO nanofabrication. Building upon the current etching researches, this study explores various etching methods using instruments capable of generating diverse plasma densities, such as dry etching in reactive ion etching (RIE) and inductively coupled plasma (ICP), proton exchange-enhanced etching, and wet chemical etching following high-temperature reduction treatment, as well as hybrid dry and wet etching. Ultimately, after employing RIE dry etching combined with wet etching, following a high-temperature reduction treatment, an etching rate of 10 nm/min and pretty 90° sidewall angles were achieved. Furthermore, high etching rates of 79 nm/min with steep sidewall angles of 83° were obtained using ICP dry etching. Additionally, using SiO2 masks, a high etching rate of 108 nm/min and an etching selectivity ratio of 0.86:1 were achieved. Distinct etching conditions yielded diverse yet exceptional results, providing multiple processing paths of etching for the versatile application of LNO. Full article
(This article belongs to the Special Issue Fabrication of Nanoscale Electronics Devices)
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12 pages, 4608 KiB  
Article
Four-Point Measurement Setup for Correlative Microscopy of Nanowires
by Bartosz C. Pruchnik, Janusz D. Fidelus, Ewelina Gacka, Krzysztof Kwoka, Julia Pruchnik, Adrianna Piejko, Łukasz Usydus, Leszek Zaraska, Grzegorz D. Sulka, Tomasz Piasecki and Teodor P. Gotszalk
Nanomaterials 2023, 13(17), 2451; https://doi.org/10.3390/nano13172451 - 30 Aug 2023
Viewed by 951
Abstract
The measurement method, which utilizes nanomanipulation of the nanowires onto a specially prepared substrate, was presented. It introduced a four-point resistance measurement setup on a chip suited for scanning probe microscopy measurements, integrating connectors and a nanowire specimen. A study on the resistance [...] Read more.
The measurement method, which utilizes nanomanipulation of the nanowires onto a specially prepared substrate, was presented. It introduced a four-point resistance measurement setup on a chip suited for scanning probe microscopy measurements, integrating connectors and a nanowire specimen. A study on the resistance and resistivity of the thermally post-treated ZnO nanowires at 200 °C and 300 °C in air showed the dependence of these electrical parameters on the annealing temperature. The investigations of the electrical properties of blocks built on the basis of nanowires and their related devices could provide a useful guide not only for designing, fabricating and optimizing electromechanical nanodevices based on nanowires but also for their safe operation in future electronic applications. Full article
(This article belongs to the Special Issue Fabrication of Nanoscale Electronics Devices)
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