Advanced Optoelectronic Ultra-Precision Manufacturing Technology and Applications
A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "D：Materials and Processing".
Deadline for manuscript submissions: 30 April 2026 | Viewed by 1
Special Issue Editors
Interests: optical ultra-precision manufacturing technology; integrated circuit manufacturing technology; ultra-precision processing equipment
Interests: micro–nano manufacturing technology in micro-devices; micro–nano electromechanical system; AI sensor and integrated circuit
Special Issues, Collections and Topics in MDPI journals
Special Issue Information
Dear Colleagues,
Photoelectric ultra-precision manufacturing technology is the core driving force for the development of the modern optoelectronic industry. Its precision has reached the nanometer level, and it is widely used in the fields of optical components, micro–nano-devices and semiconductor manufacturing. This Special Issue focuses on innovative breakthroughs in ultra-precision machining processes, covering cutting-edge technologies such as ultra-precision cutting/grinding, laser micro–nano-machining, and ion beam etching. It also explores their applications in scenarios like optical communication, biomedical imaging and quantum computing. Through interdisciplinary research, this Special Issue aims to address key technical bottlenecks in device miniaturization and functional integration, and provide a manufacturing paradigm for the next generation of intelligent optoelectronic systems.
We welcome original work focusing on ultra-precision processes and measurement, including, but not limited to, laser micro–nano-machining and femtosecond direct writing, ion beam/reactive ion etching, ultra-precision diamond turning and grinding, polishing, nanoimprint lithography, wafer bonding, micro–nano 3D printing and hybrid manufacturing, as well as AFM/SEM characterization, on-machine measurement. We encourage you to submit research results on other applications and progress of photoelectric ultra-precision manufacturing technology. Please join us in this exciting Special Issue and contribute to shaping a better future.
Dr. Peng Gu
Prof. Dr. Xiangjun Liu
Guest Editors
Manuscript Submission Information
Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 250 words) can be sent to the Editorial Office for assessment.
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Keywords
- laser micro–nano-machining
- femtosecond direct writing
- ion beam/reactive ion etching
- ultra-precision diamond turning and grinding
- polishing
- nanoimprint lithography
- wafer bonding
- micro–nano 3D printing and hybrid manufacturing
- AFM/SEM characterization
- on-machine measurement
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