Design, Fabrication, and Applications of MEMS and MOEMS Components
A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A：Physics".
Deadline for manuscript submissions: closed (30 October 2023) | Viewed by 352
Special Issue Editors
2. Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany
Interests: MEMS and MOEMS with focus on technologies
2. Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany
Interests: micro and nano technologies
Interests: MEMS design and characterisation; focus on inertial sensors
Special Issue Information
Dear Colleagues,
MEMS and MOEMS devices have gathered significant attention and reached significant market shares for various application fields, such as automotive and mobility, industry, life sciences and health, environment, energy, wearables, among others. Nevertheless, there is still plenty of room for improvement and new ideas in the whole research and development chain, starting from design optimization, the integration of new materials or nanostructures, advanced fabrication and manufacturing technologies, and efficient characterization methods. Research targets may cover improvements in parameters, such as the accuracy, sensitivity, stability, and robustness of existing approaches, as well as completely new concepts, designs, or applications.
This Special Issue aims to assemble high-quality papers covering one or more of these aspects. Papers related to the following topics will be highly encouraged: i) MEMS principles based on new emerging or improved materials; ii) new approaches based on (integrated) nanostructures or (integrated) photonic components; iii) methods for sensitivity and stability enhancement; iv) new design methods and their applications, e.g., designs for reliability and testability; v) advanced fabrication and manufacturing technologies; vi) innovative packaging and hetero integration technologies; vii) new device and system concepts for advanced and emerging applications. Papers related to the applications of these MEMS and MOEMS in different fields, including the applications already mentioned above, will be highly appreciated.
Prof. Dr. Karla Hiller
Dr. Danny Reuter
Dr. Roman Forke
Dr. Jörg Martin
Guest Editors
Manuscript Submission Information
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Keywords
- MEMS design
- MOEMS design
- micro and nano patterning
- microfabrication
- MEMS packaging
- system integration
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