MEMS Sensors: Advances, Challenges, and Emerging Applications
A special issue of Electronics (ISSN 2079-9292). This special issue belongs to the section "Microelectronics".
Deadline for manuscript submissions: 31 May 2027 | Viewed by 9
Special Issue Editors
2. Institute of Intelligent Machines, Hefei Institutes of Physical Science, Chinese Academy of Sciences, Hefei 230031, China
Interests: MEMS sensors; microfabrication; microfluidics; biosensors
Special Issues, Collections and Topics in MDPI journals
Special Issue Information
Dear Colleagues,
Micro-electro-mechanical systems (MEMS) sensors have become a core enabling technology for next-generation intelligent systems. Benefiting from miniaturization, low power consumption, high sensitivity, batch fabrication, and compatibility with integrated electronics, MEMS sensors are now widely used in consumer electronics, automotive systems, aerospace engineering, industrial monitoring, biomedical diagnostics, environmental sensing, smart agriculture, robotics, and the Internet of Things. Recent progress in micro/nano-fabrication, advanced functional materials, heterogeneous integration, flexible and wearable platforms, microfluidics, and artificial intelligence-assisted signal processing is further expanding the performance boundaries and application scenarios of MEMS sensing technologies.
Despite these rapid advances, MEMS sensors still face several scientific and technological challenges. These include improving long-term stability, selectivity, sensitivity, reliability, packaging robustness, calibration accuracy, resistance to harsh environments, device-to-device consistency, and system-level integration. In addition, the development of low-cost, scalable, energy-efficient, and application-oriented MEMS sensing systems remains essential for bridging the gap between laboratory prototypes and real-world deployment.
This Special Issue, entitled “MEMS Sensors: Advances, Challenges, and Emerging Applications”, aims to provide a forum for presenting recent progress, critical challenges, and future directions in MEMS sensor research and development. We welcome original research articles, review papers, and communications addressing fundamental mechanisms, device design, material innovation, fabrication strategies, packaging and integration technologies, signal processing methods, and practical applications of MEMS sensors.
In this Special Issue, original research articles and reviews are welcome. Research areas may include (but are not limited to) the following:
- MEMS sensors based on piezoresistive, piezoelectric, capacitive, resonant, optical, magnetic, thermal, electrochemical, and microfluidic principles;
- Design, modeling, simulation, and optimization of MEMS sensing devices;
- Advanced micro-/nano-fabrication and packaging technologies;
- MEMS inertial sensors, pressure sensors, gas sensors, chemical sensors, biosensors, acoustic sensors, force sensors, and environmental sensors;
- MEMS sensors for harsh environments, and aerospace, automotive, industrial, biomedical, environmental, agricultural, and IoT applications;
- Wearable and implantable MEMS devices for real-time health monitoring.
We look forward to receiving your contributions.
Dr. Xiangyu Chen
Prof. Dr. Rujing Wang
Guest Editors
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Keywords
- MEMS/NEMS
- MEMS sensors
- biosensors
- electrochemical sensors
- wearable sensors
- flexible sensors
- microfluidic chips
- smart sensing systems
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