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Surface Acoustic Wave Sensors: Current Designs and Applications

A special issue of Applied Sciences (ISSN 2076-3417). This special issue belongs to the section "Surface Sciences and Technology".

Deadline for manuscript submissions: 30 September 2025 | Viewed by 1137

Special Issue Editors


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Guest Editor
Department of Electrical and Computer Engineering, Ajou University, Suwon 16499, Republic of Korea
Interests: wireless and batteryfree SAW sensors including power meter, gyroscope, pressure, humidity and chemical sensors; acousto-optic (AO) holographic display; impedance-loaded SAW sensor; harsh environmental-applicable SAW sensors; SAW biosensors

E-Mail Website
Guest Editor
Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China
Interests: surface acoustic wave signal processing; sensor technology
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

The special issue "Surface Acoustic Wave Sensors: Current Designs and Applications" aims to showcase the latest advancements and innovations in the field of Surface Acoustic Wave (SAW) sensors. SAW sensors are renowned for their high sensitivity, robustness, and versatility across a wide range of applications, from environmental monitoring and healthcare to industrial automation and telecommunications. This issue will explore the cutting-edge designs, fabrication techniques, and material innovations that are driving the evolution of SAW sensors, enabling them to meet the growing demands of modern technology.

Key topics include novel materials for enhancing SAW sensor performance, such as piezoelectric substrates and advanced thin-film coatings, as well as new design architectures that improve selectivity, sensitivity, and stability. The issue will also cover the integration of SAW sensors with sensor interface electronics, wireless communication systems, the development of multi-sensor arrays, and the application of machine learning techniques to interpret sensor data.

Contributions will be sought that highlight the diverse applications of SAW sensors, including their use in gas and chemical sensing, biosensing, pressure and temperature monitoring, and other areas where real-time, accurate, and reliable sensing is crucial. By bringing together research from across these domains, this special issue aims to provide a comprehensive overview of the state-of-the-art in SAW sensor technology, offering insights into future trends and potential breakthroughs that could further expand their applicability and impact in various fields.

Prof. Dr. Keekeun Lee
Prof. Dr. Wen Wang
Guest Editors

Manuscript Submission Information

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Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Applied Sciences is an international peer-reviewed open access semimonthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2400 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • SAW
  • sensors
  • piezo-electric substrate
  • thin film coating
  • low-dimensional configuration
  • SAW design architecture
  • mass loading
  • acoustoelectric
  • interface electronics
  • communication systems
  • machine learning

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Published Papers (1 paper)

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Research

17 pages, 8085 KiB  
Article
Development of HfO₂-Based Solar-Blind SAW UV-C Sensor for Corona Discharge Detection Application
by Hyunho Lee, Faisal Nawaz, Eeunsun Shim, Jinjae Lee, Cheol Choi and Keekeun Lee
Appl. Sci. 2025, 15(1), 464; https://doi.org/10.3390/app15010464 - 6 Jan 2025
Viewed by 860
Abstract
This study presents a novel surface acoustic wave (SAW)-based solar-blind ultraviolet-C (UV-C) corona sensor, marking the first reported use of HfO₂ as a sensing material for UV-C corona sensing. A 222 MHz two-port SAW delay line structure was selected as a sensor platform, [...] Read more.
This study presents a novel surface acoustic wave (SAW)-based solar-blind ultraviolet-C (UV-C) corona sensor, marking the first reported use of HfO₂ as a sensing material for UV-C corona sensing. A 222 MHz two-port SAW delay line structure was selected as a sensor platform, and its optimal parameters were determined through Coupling of Mode (COM) modeling analysis. COMSOL simulations were conducted to investigate the effect of UV-C exposure on the HfO2 thin film, highlighting its contribution to conductivity changes. A 30 nm-thick HfO2 thin film was deposited using atomic layer deposition (ALD) within the cavity of a two-port SAW delay line, providing sufficient volume and density of absorption sites for UV-C exposure. Comprehensive material characterization of the HfO2 thin film was performed using X-ray diffraction (XRD), scanning electron microscopy (SEM), and energy-dispersive X-ray spectroscopy (EDS). The effect of annealing temperature was analyzed in detail, with results confirming that 500 °C is the optimal temperature for achieving the best performance in a SAW-based UV-C corona sensor. The sensor characteristics were measured using custom-made interface electronics, allowing frequency shifts to be visually observed on a PC monitor with compensation for environmental factors such as humidity and temperature. The developed sensor demonstrated response and recovery times of 2.8 s and 4 s, respectively, with a measured sensitivity of 563 ppm/(mW·cm−2). Furthermore, the effect of HfO₂ film thickness on the sensor’s response to UV-C exposure was examined in detail, showing that increased thickness leads to a higher frequency shift, thereby enhancing sensitivity. The feasibility of the sensor for real-world applications was validated through successful testing under simulated corona discharge detection. Full article
(This article belongs to the Special Issue Surface Acoustic Wave Sensors: Current Designs and Applications)
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