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1 April 2004

A Simple Method for Calculating the Number of Atoms in Ion Implanted Samples from the RBS Yield

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Faculty of Arts and Sciences, Physics Department, Celai Bayar University, 45140 Muradiye, Manisa, Turkey
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Abstract

A simple method that computes the number of atoms in implanted samples from the integral of the elastic backseattering yield, using a pocket calculator, is represented. The energy dependence E-2, of the Rutherford law and the screening of the nuclear charge by the electron cloud is considered. The method is based on the assumption that the stopping power is a linearly decreasing function of the energy in the range from 1.4 MeV to 2 MeV. The total yield can be integrated analytically, and the number of atoms in the sample can then be ascertained by an iteration procedure that can be accomplished with a scientific pocket calculator, The results obtained are compared with the values obtained using the computer simulation code for RBS spectra RUMP.

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