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Atoms 2018, 6(4), 65; https://doi.org/10.3390/atoms6040065

The Influence of Secondary Electron Emission and Electron Reflection on a Capacitively Coupled Oxygen Discharge

1
Science Institute, University of Iceland, Dunhaga 3, IS-107 Reykjavik, Iceland
2
Department of Space and Plasma Physics, School of Electrical Engineering and Computer Science, KTH Royal Institute of Technology, SE-100 44 Stockholm, Sweden
*
Author to whom correspondence should be addressed.
Received: 22 September 2018 / Revised: 21 November 2018 / Accepted: 23 November 2018 / Published: 28 November 2018
(This article belongs to the Special Issue SPIG2018)
Full-Text   |   PDF [8304 KB, uploaded 28 November 2018]   |  

Abstract

The one-dimensional object-oriented particle-in-cell Monte Carlo collision code oopd1 is applied to explore the role of secondary electron emission and electron reflection on the properties of the capacitively-coupled oxygen discharge. At low pressure (10 mTorr), drift-ambipolar heating of the electrons dominates within the plasma bulk, while at higher pressure (50 mTorr), stochastic electron heating in the sheath region dominates. Electron reflection has negligible influence on the electron energy probability function and only a slight influence on the electron heating profile and electron density. Including ion-induced secondary electron emission in the discharge model introduces a high energy tail to the electron energy probability function, enhances the electron density, lowers the electronegativity, and increases the effective electron temperature in the plasma bulk. View Full-Text
Keywords: capacitively-coupled discharge; oxygen; particle-in-cell/Monte Carlo collision; electron heating; secondary electron emission capacitively-coupled discharge; oxygen; particle-in-cell/Monte Carlo collision; electron heating; secondary electron emission
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Proto, A.; Gudmundsson, J.T. The Influence of Secondary Electron Emission and Electron Reflection on a Capacitively Coupled Oxygen Discharge. Atoms 2018, 6, 65.

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