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Open AccessFeature PaperArticle

Spectrophotometric Characterization of Thin Copper and Gold Films Prepared by Electron Beam Evaporation: Thickness Dependence of the Drude Damping Parameter

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Fraunhofer Institute of Applied Optics and Precision Engineering IOF, 07745 Jena, Albert-Einstein Str. 7, Germany
2
Abbe School of Photonics, Friedrich-Schiller-University Jena, Albert-Einstein-Str. 6, 07745 Jena, Germany
*
Author to whom correspondence should be addressed.
Coatings 2019, 9(3), 181; https://doi.org/10.3390/coatings9030181
Received: 19 February 2019 / Revised: 4 March 2019 / Accepted: 5 March 2019 / Published: 9 March 2019
Copper and gold films with thicknesses between approximately 10 and 60 nm have been prepared by electron beam evaporation and characterized by spectrophotometry from the near infrared up to the near ultraviolet spectral regions. From near normal incidence transmission and reflection spectra, dispersion of optical constants have been determined by means of spectra fits utilizing a merger of the Drude model and the beta-distributed oscillator model. All spectra could be fitted in the full spectral region with a total of seven dispersion parameters. The obtained Drude damping parameters shows a clear trend to increase with decreasing film thickness. This behavior is discussed in the context of additional non-optical characterization results and turned out to be consistent with a simple mean-free path theory. View Full-Text
Keywords: copper; gold; ultrathin metal films; optical constants; thickness dependence copper; gold; ultrathin metal films; optical constants; thickness dependence
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Stenzel, O.; Wilbrandt, S.; Stempfhuber, S.; Gäbler, D.; Wolleb, S.-J. Spectrophotometric Characterization of Thin Copper and Gold Films Prepared by Electron Beam Evaporation: Thickness Dependence of the Drude Damping Parameter. Coatings 2019, 9, 181.

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