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Open AccessArticle

Antireflection Coating on PMMA Substrates by Atomic Layer Deposition

by Pallabi Paul 1,†, Kristin Pfeiffer 2,† and Adriana Szeghalmi 1,2,*
Institute of Applied Physics, Abbe Center of Photonics, Friedrich Schiller University Jena, Albert Einstein Str. 15, 07745 Jena, Germany
Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Albert Einstein Str. 7, 07745 Jena, Germany
Author to whom correspondence should be addressed.
These authors contributed equally to this work.
Coatings 2020, 10(1), 64;
Received: 10 December 2019 / Revised: 29 December 2019 / Accepted: 7 January 2020 / Published: 10 January 2020
(This article belongs to the Special Issue Surface Functionalization by ALD Technology)
Antireflection coatings (ARC) are essential for various optical components including such made of plastics for high volume applications. However, precision coatings on plastics are rather challenging due to typically low adhesion of the coating to the substrate. In this work, optimization of the atomic layer deposition (ALD) processes towards conformal optical thin films of Al2O3, TiO2 and SiO2 on poly(methyl methacrylate) (PMMA) has been carried out and a five-layer ARC is demonstrated. While the uncoated PMMA substrates have a reflectance of nearly 8% in the visible (VIS) spectral range, this is reduced below 1.2% for the spectral range of 420–670 nm by applying a double-side ARC. The total average reflectance is 0.7%. The optimized ALD coatings show a good adhesion to the PMMA substrates even after the climate test. Microscopic analysis on the cross-hatch areas on PMMA after the climate test indicates very good environmental stability of the ALD coatings. These results enable a possible route by ALD to deposit uniform, crack free, adhesive and environmentally durable thin film layers on sensitive thermoplastics like PMMA. View Full-Text
Keywords: atomic layer deposition; antireflection coatings; PMMA; adhesion atomic layer deposition; antireflection coatings; PMMA; adhesion
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Paul, P.; Pfeiffer, K.; Szeghalmi, A. Antireflection Coating on PMMA Substrates by Atomic Layer Deposition. Coatings 2020, 10, 64.

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