Comparative Study of Nanocrystalline Dysprosium Oxide Thin Films Deposited on Quartz Glass and Sapphire Substrates by Means of Electron Beam

In this study, nanocrystalline dysprosium oxide (Dy₂O₃) thin films were deposited on sapphire and quartz glass substrates by an electron beam evaporation technique to comparatively evaluate the influence of substrate type on their structural and optical properties. X-ray diffraction (XRD) confirms that all films exhibit a polycrystalline nature and possess a cubic-type structure. The Debye–Scherrer equation was used to determine the average crystallite size and it was found that the film deposited on quartz glass substrate is slightly larger than the film deposited on the sapphire substrate. Scanning electron microscopy (SEM) revealed a granular morphology for the sapphire film and a more compact, pore-free surface for the quartz film. Spectroscopic ellipsometry (SE) and UV-Vis spectrophotometry were employed to extract the optical constants and reflectance behavior, respectively. The film on sapphire exhibited a lower refractive index, higher extinction coefficient, and reduced reflectance, confirming its enhanced anti-reflective performance. The study provides new insights into how the substrate affects the optical properties of Dy₂O₃ thin films. This study demonstrates that sapphire is a more suitable substrate for enhanced anti-reflective and optoelectronic applications.