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NH3 Plasma-Treated Magnesium Doped Zinc Oxide in Biomedical Sensors with Electrolyte–Insulator–Semiconductor (EIS) Structure for Urea and Glucose Applications

1
Department of Electronic Engineering, Chang Gung University, Kwei-Shan, Tao-Yuan 333, Taiwan
2
Kidney Research Center, Department of Nephrology, Chang Gung Memorial Hospital, Chang Gung University, Taoyuan City 333, Taiwan
3
Department of Electronic Engineering, Ming Chi University of Technology, New Taipei City 24301, Taiwan
*
Author to whom correspondence should be addressed.
Nanomaterials 2020, 10(3), 583; https://doi.org/10.3390/nano10030583
Received: 12 March 2020 / Revised: 20 March 2020 / Accepted: 20 March 2020 / Published: 23 March 2020
(This article belongs to the Section Nanocomposite Thin Films and 2D Materials)
This study compared the sensing characteristics of ZnO (ZO) treated with ammonia (NH3) plasma for 1 min, 3 min, and 6 min, under the EIS structure. The measurement results revealed that, after 3 min of NH3 plasma treatment, the Mg-doped ZnO (MZO) sensing film had a high hydrogen ion sensitivity, linearity, hysteresis, and drift rate of 53.82 mV/pH, 99.04%, 2.52 mV, and 1.75 mV/h, respectively. The sensing film was used with sodium and potassium ion solutions, and it performed satisfactorily in sensing hydrogen ions. Additionally, we investigated the biomedical sensing properties of Mg-doped ZnO (MZO) sensing film with regard to urea, creatinine, and glucose solutions and found that the Mg-doped ZnO (MZO) sensing film treated with NH3 plasma for 3 min had the best properties for sensing urea, creatinine, and glucose. Specifically, with glucose, the sensing film achieved the best linearity and sensitivity and of 97.87% and 10.73 mV/mM, respectively. The results revealed that the sensing characteristics varied with the processing environment and are useful in the developing biomedical sensing applications with different sensing elements. View Full-Text
Keywords: biomedical sensors; Mg-doped ZO (MZO) film; NH3 plasma; glucose and urea biomedical sensors; Mg-doped ZO (MZO) film; NH3 plasma; glucose and urea
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Lin, C.F.; Kao, C.H.; Lin, C.Y.; Chen, K.L.; Lin, Y.H. NH3 Plasma-Treated Magnesium Doped Zinc Oxide in Biomedical Sensors with Electrolyte–Insulator–Semiconductor (EIS) Structure for Urea and Glucose Applications. Nanomaterials 2020, 10, 583.

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