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Open AccessArticle

Displacement Measurement Method Based on the Rotating Paraboloid Array

1
State Key Laboratory of Precision Measuring Technology and Instruments, School of Precision Instruments and Opto-electronics Engineering, Tianjin University, Tianjin 300072, China
2
Center of Micro/Nano Manufacturing Technology, University College Dublin, D04 V1W8 Dublin, Ireland
3
Key Laboratory of Advanced Transducers and Intelligent Control System, Ministry of Education, Taiyuan University of Technology, Taiyuan 030024, China
*
Authors to whom correspondence should be addressed.
These authors contributed equally to this work.
Appl. Sci. 2019, 9(16), 3315; https://doi.org/10.3390/app9163315
Received: 7 July 2019 / Revised: 5 August 2019 / Accepted: 9 August 2019 / Published: 13 August 2019
(This article belongs to the Special Issue Laser Acceleration Technology and Applications)
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PDF [6051 KB, uploaded 13 August 2019]
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Abstract

Using an optical freeform surface to realize the precision measurement of displacement has become a research focus in the present day. However, the measurement range of this method is limited by the size of the freeform surface processed. In order to overcome this difficulty, this paper presents a two-dimensional displacement measurement system with a large range, which is composed of a slope sensor and a rotating paraboloid array. The slope sensor utilizes the optical structure of an autocollimator with minor optimization, and the rotating paraboloid array expands the measurement range of the system in a discrete manner. The experimental results showed that the optimized optical system enhanced the measurement accuracy to ±0.4 μm within the range of 1500 μm and the overall measurement error was approximately ±2 μm when measured within the range of 450 mm. The developed measurement system has potential applicability for detection of errors, such as the position error and straightness error of multi-axis systems. View Full-Text
Keywords: rotating paraboloid array; two-dimensional; displacement measurement; optical structure optimization; large range; stability; calibration rotating paraboloid array; two-dimensional; displacement measurement; optical structure optimization; large range; stability; calibration
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Lv, Z.; Su, Z.; Zhang, D.; Yang, Z.; Yang, X.; Wei, X.; Li, J.; Fang, F.; Zhang, H.; Li, X. Displacement Measurement Method Based on the Rotating Paraboloid Array. Appl. Sci. 2019, 9, 3315.

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