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Appl. Sci. 2017, 7(1), 54;

The Meaning and Measure of Vertical Resolution in Optical Surface Topography Measurement

Zygo Corporation, Laurel Brook Road, Middlefield, CT 06455, USA
Academic Editor: Richard Leach
Received: 2 December 2016 / Revised: 28 December 2016 / Accepted: 30 December 2016 / Published: 5 January 2017
(This article belongs to the Special Issue Dimensional Micro and Nanometrology)
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Vertical resolution is the most widely quoted and most frequently misunderstood performance specification for equipment that measures surface topography. Here I propose to use internationally standardized terms and definitions for measurement noise and surface topography repeatability as more meaningful quantifiers for measurement performance. A specific example is an interference microscope operating with a 100 Hz, 1 k × 1 k pixel camera, and a sinusoidal phase modulation to convert intensity data to a height map. The measurement noise is found experimentally to be 0.072 nm for a 1 s data acquisition using a surface topography repeatability test, which determines the random height-equivalent noise level for an individual pixel in the areal surface topography map. Under ideal conditions, the measured noise is equivalent to the instrument noise that may be published in a performance specification in place of the more common, but poorly defined, vertical resolution specification. View Full-Text
Keywords: topography; metrology; instruments; standards; interferometry; resolution topography; metrology; instruments; standards; interferometry; resolution

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de Groot, P.J. The Meaning and Measure of Vertical Resolution in Optical Surface Topography Measurement. Appl. Sci. 2017, 7, 54.

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