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Open AccessReview

Scanning Micromirror Platform Based on MEMS Technology for Medical Application

1
Automatic Control and Micro-Mechatronic Systems Department (AS2M), FEMTO-ST Institute, UMR CNRS 6174-UFC/ENSMM/UTBM, Besancon 25000, France
2
Institute of Field Robotics, King Mongkut’s University of Technology Thonburi, 126 Pracha Uthit Road, Bang Mod, Thung Khru, Bangkok 10140, Thailand
*
Author to whom correspondence should be addressed.
Academic Editors: Toshio Fukuda, Mohd Ridzuan bin Ahmad and Yajing Shen
Micromachines 2016, 7(2), 24; https://doi.org/10.3390/mi7020024
Received: 1 November 2015 / Accepted: 15 January 2016 / Published: 6 February 2016
(This article belongs to the Special Issue Micro/Nano Robotics)
This topical review discusses recent development and trends on scanning micromirrors for biomedical applications. This also includes a biomedical micro robot for precise manipulations in a limited volume. The characteristics of medical scanning micromirror are explained in general with the fundamental of microelectromechanical systems (MEMS) for fabrication processes. Along with the explanations of mechanism and design, the principle of actuation are provided for general readers. In this review, several testing methodology and examples are described based on many types of actuators, such as, electrothermal actuators, electrostatic actuators, electromagnetic actuators, pneumatic actuators, and shape memory alloy. Moreover, this review provides description of the key fabrication processes and common materials in order to be a basic guideline for selecting micro-actuators. With recent developments on scanning micromirrors, performances of biomedical application are enhanced for higher resolution, high accuracy, and high dexterity. With further developments on integrations and control schemes, MEMS-based scanning micromirrors would be able to achieve a better performance for medical applications due to small size, ease in microfabrication, mass production, high scanning speed, low power consumption, mechanical stable, and integration compatibility. View Full-Text
Keywords: micro robots; optical MEMS; MEMS scanning micromirror; biomedical micro-actuator; multi-degree-of-freedom stage; bioMEMS; MOEMS; micro-optics micro robots; optical MEMS; MEMS scanning micromirror; biomedical micro-actuator; multi-degree-of-freedom stage; bioMEMS; MOEMS; micro-optics
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Pengwang, E.; Rabenorosoa, K.; Rakotondrabe, M.; Andreff, N. Scanning Micromirror Platform Based on MEMS Technology for Medical Application. Micromachines 2016, 7, 24.

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