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Micromachines 2016, 7(1), 15;

Love-Mode MEMS Devices for Sensing Applications in Liquids

Istituto di Acustica e Sensoristica “O.M. Corbino”, IDASC, Consiglio Nazionale delle Ricerche, CNR, Via del Fosso del Cavaliere 100, 00133 Rome, Italy
Laboratory of Physics of Materials, Team “Waves and Acoustic”, University of Sciences and Technology, Houari Boumedienne, B.P. 32 El Allia, Bab-Ezzouar, 16111 Algiers, Algeria
Faculté des Sciences, Université M. Mammeri, BP 17 R.P., 15000 Tizi-Ouzou, Algeria
Author to whom correspondence should be addressed.
Academic Editor: Nathan Jackson
Received: 28 October 2015 / Revised: 11 January 2016 / Accepted: 14 January 2016 / Published: 21 January 2016
(This article belongs to the Special Issue Piezoelectric MEMS)
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Love-wave-based MEMS devices are theoretically investigated in their potential role as a promising technological platform for the development of acoustic-wave-based sensors for liquid environments. Both single- and bi-layered structures have been investigated and the velocity dispersion curves were calculated for different layer thicknesses, crystallographic orientations, material types and electrical boundary conditions. High velocity materials have been investigated too, enabling device miniaturization, power consumption reduction and integration with the conditioning electronic circuits. The electroacoustic coupling coefficient dispersion curves of the first four Love modes are calculated for four dispersive coupling configurations based on a c-axis tilted ZnO layer on wz-BN substrate. The gravimetric sensitivity of four Love modes travelling at a common velocity of 9318 m/s along different layer thicknesses, and of three Love modes travelling at different velocity along a fixed ZnO layer thickness, are calculated in order to design enhanced-performance sensors. The phase velocity shift and attenuation due to the presence of a viscous liquid contacting the device surface are calculated for different thicknesses of a c-axis inclined ZnO layer onto BN half-space. View Full-Text
Keywords: microsensors; acoustic modes; piezoelectric materials microsensors; acoustic modes; piezoelectric materials

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Caliendo, C.; Sait, S.; Boubenider, F. Love-Mode MEMS Devices for Sensing Applications in Liquids. Micromachines 2016, 7, 15.

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