A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph
Department of Electrical & Computer Engineering, University of Florida, Gainesville, FL 32611, USA
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Author to whom correspondence should be addressed.
Academic Editor: Franck Chollet
Micromachines 2015, 6(12), 1876-1889; https://doi.org/10.3390/mi6121460
Received: 23 October 2015 / Revised: 19 November 2015 / Accepted: 24 November 2015 / Published: 2 December 2015
(This article belongs to the Special Issue Optical Microsystems)
This paper reports a large-range electrothermal bimorph microelectromechanical systems (MEMS) mirror with fast thermal response. The actuator of the MEMS mirror is made of three segments of Cu/W bimorphs for lateral shift cancelation and two segments of multimorph beams for obtaining large vertical displacement from the angular motion of the bimorphs. The W layer is also used as the embedded heater. The silicon underneath the entire actuator is completely removed using a unique backside deep-reactive-ion-etching DRIE release process, leading to improved thermal response speed and front-side mirror surface protection. This MEMS mirror can perform both piston and tip-tilt motion. The mirror generates large pure vertical displacement up to 320 μm at only 3 V with a power consumption of 56 mW for each actuator. The maximum optical scan angle achieved is ±18° at 3 V. The measured thermal response time is 15.4 ms and the mechanical resonances of piston and tip-tilt modes are 550 Hz and 832 Hz, respectively.
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Keywords:
microelectromechanical systems (MEMS) mirror; electrothermal actuation; Cu/W bimorph; lateral-shift-free (LSF); vertical scan; multimorph frame; large range; fast response; backside release
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MDPI and ACS Style
Zhang, X.; Zhou, L.; Xie, H. A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph. Micromachines 2015, 6, 1876-1889. https://doi.org/10.3390/mi6121460
AMA Style
Zhang X, Zhou L, Xie H. A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph. Micromachines. 2015; 6(12):1876-1889. https://doi.org/10.3390/mi6121460
Chicago/Turabian StyleZhang, Xiaoyang; Zhou, Liang; Xie, Huikai. 2015. "A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph" Micromachines 6, no. 12: 1876-1889. https://doi.org/10.3390/mi6121460
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