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Keywords = multimorph frame

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14 pages, 3615 KiB  
Article
A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph
by Xiaoyang Zhang, Liang Zhou and Huikai Xie
Micromachines 2015, 6(12), 1876-1889; https://doi.org/10.3390/mi6121460 - 2 Dec 2015
Cited by 42 | Viewed by 11420
Abstract
This paper reports a large-range electrothermal bimorph microelectromechanical systems (MEMS) mirror with fast thermal response. The actuator of the MEMS mirror is made of three segments of Cu/W bimorphs for lateral shift cancelation and two segments of multimorph beams for obtaining large vertical [...] Read more.
This paper reports a large-range electrothermal bimorph microelectromechanical systems (MEMS) mirror with fast thermal response. The actuator of the MEMS mirror is made of three segments of Cu/W bimorphs for lateral shift cancelation and two segments of multimorph beams for obtaining large vertical displacement from the angular motion of the bimorphs. The W layer is also used as the embedded heater. The silicon underneath the entire actuator is completely removed using a unique backside deep-reactive-ion-etching DRIE release process, leading to improved thermal response speed and front-side mirror surface protection. This MEMS mirror can perform both piston and tip-tilt motion. The mirror generates large pure vertical displacement up to 320 μm at only 3 V with a power consumption of 56 mW for each actuator. The maximum optical scan angle achieved is ±18° at 3 V. The measured thermal response time is 15.4 ms and the mechanical resonances of piston and tip-tilt modes are 550 Hz and 832 Hz, respectively. Full article
(This article belongs to the Special Issue Optical Microsystems)
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