- Article
A Bi-Directional Out-of-Plane Actuator by Electrostatic Force
- Hao Ren,
- Weimin Wang,
- Fenggang Tao and
- Jun Yao
Presented in this paper is a bi-directional out-of-plane actuator which combines the merits of the electrostatic repulsive principle and the electrostatic attractive principle. By taking advantage of the electrostatic repulsive mode, the common “pull...

