Chen, J.; Lan, Z.; Xue, C.; Lan, J.; Liu, Z.; Yang, Y.
A Wafer Pre-Alignment Algorithm Based on Weighted Fourier Series Fitting of Circles and Least Squares Fitting of Circles. Micromachines 2023, 14, 956.
https://doi.org/10.3390/mi14050956
AMA Style
Chen J, Lan Z, Xue C, Lan J, Liu Z, Yang Y.
A Wafer Pre-Alignment Algorithm Based on Weighted Fourier Series Fitting of Circles and Least Squares Fitting of Circles. Micromachines. 2023; 14(5):956.
https://doi.org/10.3390/mi14050956
Chicago/Turabian Style
Chen, Jingsong, Zhou Lan, Cheng Xue, Jun Lan, Zhenghao Liu, and Yong Yang.
2023. "A Wafer Pre-Alignment Algorithm Based on Weighted Fourier Series Fitting of Circles and Least Squares Fitting of Circles" Micromachines 14, no. 5: 956.
https://doi.org/10.3390/mi14050956
APA Style
Chen, J., Lan, Z., Xue, C., Lan, J., Liu, Z., & Yang, Y.
(2023). A Wafer Pre-Alignment Algorithm Based on Weighted Fourier Series Fitting of Circles and Least Squares Fitting of Circles. Micromachines, 14(5), 956.
https://doi.org/10.3390/mi14050956