Censabella, M.; Drago, C.; Cafra, B.; Badalà , P.; Bassi, A.; Piccitto, G.; Mirabella, S.; Grimaldi, M.G.; Ruffino, F.
Morphological and Compositional Studies on Al/Ti/TiN/Si, Al/TiN/Si, Al/W/Si, Al/WN/Si Systems to Test the Diffusion Barrier Properties of Nanoscale-Thick Layers between Al and Si. Micromachines 2021, 12, 849.
https://doi.org/10.3390/mi12080849
AMA Style
Censabella M, Drago C, Cafra B, Badalà P, Bassi A, Piccitto G, Mirabella S, Grimaldi MG, Ruffino F.
Morphological and Compositional Studies on Al/Ti/TiN/Si, Al/TiN/Si, Al/W/Si, Al/WN/Si Systems to Test the Diffusion Barrier Properties of Nanoscale-Thick Layers between Al and Si. Micromachines. 2021; 12(8):849.
https://doi.org/10.3390/mi12080849
Chicago/Turabian Style
Censabella, Maria, Cristina Drago, Brunella Cafra, Paolo Badalà , Anna Bassi, Giovanni Piccitto, Salvatore Mirabella, Maria Grazia Grimaldi, and Francesco Ruffino.
2021. "Morphological and Compositional Studies on Al/Ti/TiN/Si, Al/TiN/Si, Al/W/Si, Al/WN/Si Systems to Test the Diffusion Barrier Properties of Nanoscale-Thick Layers between Al and Si" Micromachines 12, no. 8: 849.
https://doi.org/10.3390/mi12080849
APA Style
Censabella, M., Drago, C., Cafra, B., Badalà , P., Bassi, A., Piccitto, G., Mirabella, S., Grimaldi, M. G., & Ruffino, F.
(2021). Morphological and Compositional Studies on Al/Ti/TiN/Si, Al/TiN/Si, Al/W/Si, Al/WN/Si Systems to Test the Diffusion Barrier Properties of Nanoscale-Thick Layers between Al and Si. Micromachines, 12(8), 849.
https://doi.org/10.3390/mi12080849
