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Open AccessArticle

A Graphene/Polycrystalline Silicon Photodiode and Its Integration in a Photodiode–Oxide–Semiconductor Field Effect Transistor

Institute of Electronics Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan
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Micromachines 2020, 11(6), 596; https://doi.org/10.3390/mi11060596
Received: 25 May 2020 / Revised: 13 June 2020 / Accepted: 15 June 2020 / Published: 17 June 2020
In recent years, the characteristics of the graphene/crystalline silicon junction have been frequently discussed in the literature, but study of the graphene/polycrystalline silicon junction and its potential applications is hardly found. The present work reports the observation of the electrical and optoelectronic characteristics of a graphene/polycrystalline silicon junction and explores one possible usage of the junction. The current–voltage curve of the junction was measured to show the typical exponential behavior that can be seen in a forward biased diode, and the photovoltage of the junction showed a logarithmic dependence on light intensity. A new phototransistor named the “photodiode–oxide–semiconductor field effect transistor (PDOSFET)” was further proposed and verified in this work. In the PDOSFET, a graphene/polycrystalline silicon photodiode was directly merged on top of the gate oxide of a conventional metal–oxide–semiconductor field effect transistor (MOSFET). The magnitude of the channel current of this phototransistor showed a logarithmic dependence on the illumination level. It is shown in this work that the PDOSFET facilitates a better pixel design in a complementary metal–oxide–semiconductor (CMOS) image sensor, especially beneficial for high dynamic range (HDR) image detection. View Full-Text
Keywords: graphene; polycrystalline silicon; photodiode; phototransistor; pixel; high dynamic range (HDR) image graphene; polycrystalline silicon; photodiode; phototransistor; pixel; high dynamic range (HDR) image
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Tsai, Y.-Y.; Kuo, C.-Y.; Li, B.-C.; Chiu, P.-W.; Hsu, K.Y.J. A Graphene/Polycrystalline Silicon Photodiode and Its Integration in a Photodiode–Oxide–Semiconductor Field Effect Transistor. Micromachines 2020, 11, 596.

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