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Article

A Graphene/Polycrystalline Silicon Photodiode and Its Integration in a Photodiode–Oxide–Semiconductor Field Effect Transistor

Institute of Electronics Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan
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Author to whom correspondence should be addressed.
Micromachines 2020, 11(6), 596; https://doi.org/10.3390/mi11060596
Submission received: 25 May 2020 / Revised: 13 June 2020 / Accepted: 15 June 2020 / Published: 17 June 2020

Abstract

In recent years, the characteristics of the graphene/crystalline silicon junction have been frequently discussed in the literature, but study of the graphene/polycrystalline silicon junction and its potential applications is hardly found. The present work reports the observation of the electrical and optoelectronic characteristics of a graphene/polycrystalline silicon junction and explores one possible usage of the junction. The current–voltage curve of the junction was measured to show the typical exponential behavior that can be seen in a forward biased diode, and the photovoltage of the junction showed a logarithmic dependence on light intensity. A new phototransistor named the “photodiode–oxide–semiconductor field effect transistor (PDOSFET)” was further proposed and verified in this work. In the PDOSFET, a graphene/polycrystalline silicon photodiode was directly merged on top of the gate oxide of a conventional metal–oxide–semiconductor field effect transistor (MOSFET). The magnitude of the channel current of this phototransistor showed a logarithmic dependence on the illumination level. It is shown in this work that the PDOSFET facilitates a better pixel design in a complementary metal–oxide–semiconductor (CMOS) image sensor, especially beneficial for high dynamic range (HDR) image detection.
Keywords: graphene; polycrystalline silicon; photodiode; phototransistor; pixel; high dynamic range (HDR) image graphene; polycrystalline silicon; photodiode; phototransistor; pixel; high dynamic range (HDR) image

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MDPI and ACS Style

Tsai, Y.-Y.; Kuo, C.-Y.; Li, B.-C.; Chiu, P.-W.; Hsu, K.Y.J. A Graphene/Polycrystalline Silicon Photodiode and Its Integration in a Photodiode–Oxide–Semiconductor Field Effect Transistor. Micromachines 2020, 11, 596. https://doi.org/10.3390/mi11060596

AMA Style

Tsai Y-Y, Kuo C-Y, Li B-C, Chiu P-W, Hsu KYJ. A Graphene/Polycrystalline Silicon Photodiode and Its Integration in a Photodiode–Oxide–Semiconductor Field Effect Transistor. Micromachines. 2020; 11(6):596. https://doi.org/10.3390/mi11060596

Chicago/Turabian Style

Tsai, Yu-Yang, Chun-Yu Kuo, Bo-Chang Li, Po-Wen Chiu, and Klaus Y. J. Hsu. 2020. "A Graphene/Polycrystalline Silicon Photodiode and Its Integration in a Photodiode–Oxide–Semiconductor Field Effect Transistor" Micromachines 11, no. 6: 596. https://doi.org/10.3390/mi11060596

APA Style

Tsai, Y.-Y., Kuo, C.-Y., Li, B.-C., Chiu, P.-W., & Hsu, K. Y. J. (2020). A Graphene/Polycrystalline Silicon Photodiode and Its Integration in a Photodiode–Oxide–Semiconductor Field Effect Transistor. Micromachines, 11(6), 596. https://doi.org/10.3390/mi11060596

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