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Open AccessArticle

Micro Electrochemical Machining of Array Micro-Grooves Using In-Situ Disk Electrode Fabricated by Micro-WEDM

1
School of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150001, China
2
Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin 150001, China
3
KEDE Numerical Control Co., Ltd., Dalian 116000, China
*
Author to whom correspondence should be addressed.
Micromachines 2020, 11(1), 66; https://doi.org/10.3390/mi11010066
Received: 3 December 2019 / Revised: 27 December 2019 / Accepted: 2 January 2020 / Published: 7 January 2020
(This article belongs to the Section D:Materials and Processing)
This paper develops an array micro-grooves manufacturing method using micro electrochemical machining (ECM) with disk electrode, which is prepared by in-situ micro wire electrical discharge machining (WEDM). This technology focuses on the difficulty of array structure manufacture in micro-electro-mechanical systems (MEMS). A micro-ECM system is built based on the micro-WEDM machine to achieve high precision processing of the array micro-grooves. Since micro-WEDM has good performance in high precision machining of the rotating structure, single and multi-edge disk electrodes can be fabricated in-situ using graphite. The as-prepared disk tool electrode is directly used for micro-electrochemical milling of the array micro-grooves without disassembling away from the device, which avoids the positioning error caused by the re-clamping of the disk electrode. With the advantages of high surface quality and no electrode loss, micro-ECM improves the manufacture performance of the micro-parts. Through wire path optimization, the shape accuracy of the disk edge is improved. After the research of the micro-ECM parameters, the process is improved, and finally, the high precision array micro-grooves are obtained. This method combines the advantages of micro-WEDM and disk electrode micro-ECM milling, and it is convenient for large-scale manufacture of array micro-structures on micro-parts and MEMS. View Full-Text
Keywords: disk electrode; micro-WEDM; in-situ; micro-ECM; array micro-grooves disk electrode; micro-WEDM; in-situ; micro-ECM; array micro-grooves
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MDPI and ACS Style

Wang, Y.; Wang, H.; Zhang, Y.; He, X.; Wang, Z.; Chi, G.; Chen, X.; Song, M. Micro Electrochemical Machining of Array Micro-Grooves Using In-Situ Disk Electrode Fabricated by Micro-WEDM. Micromachines 2020, 11, 66.

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