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Micro-LEGO for MEMS

Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, 1206 West Green Street, Urbana, IL 61801, USA
Micromachines 2019, 10(4), 267; https://doi.org/10.3390/mi10040267
Received: 8 March 2019 / Revised: 28 March 2019 / Accepted: 29 March 2019 / Published: 21 April 2019
(This article belongs to the Special Issue 10th Anniversary of Micromachines)
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Abstract

The recently developed transfer printing-based microassembly called micro-LEGO has been exploited to enable microelectromechanical systems (MEMS) applications which are difficult to achieve using conventional microfabrication. Micro-LEGO involves transfer printing and thermal processing of prefabricated micro/nanoscale materials to assemble structures and devices in a 3D manner without requiring any wet or vacuum processes. Therefore, it complements existing microfabrication and other micro-assembly methods. In this paper, the process components of micro-LEGO, including transfer printing with polymer stamps, material preparation and joining, are summarized. Moreover, recent progress of micro-LEGO within MEMS applications are reviewed by investigating several example devices which are partially or fully assembled via micro-LEGO. View Full-Text
Keywords: microassembly; MEMS; transfer printing; elastomer stamp; shape memory polymer microassembly; MEMS; transfer printing; elastomer stamp; shape memory polymer
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Kim, S. Micro-LEGO for MEMS. Micromachines 2019, 10, 267.

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