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Open AccessFeature PaperReview

Micro-LEGO for MEMS

Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, 1206 West Green Street, Urbana, IL 61801, USA
Micromachines 2019, 10(4), 267;
Received: 8 March 2019 / Revised: 28 March 2019 / Accepted: 29 March 2019 / Published: 21 April 2019
(This article belongs to the Special Issue 10th Anniversary of Micromachines)
The recently developed transfer printing-based microassembly called micro-LEGO has been exploited to enable microelectromechanical systems (MEMS) applications which are difficult to achieve using conventional microfabrication. Micro-LEGO involves transfer printing and thermal processing of prefabricated micro/nanoscale materials to assemble structures and devices in a 3D manner without requiring any wet or vacuum processes. Therefore, it complements existing microfabrication and other micro-assembly methods. In this paper, the process components of micro-LEGO, including transfer printing with polymer stamps, material preparation and joining, are summarized. Moreover, recent progress of micro-LEGO within MEMS applications are reviewed by investigating several example devices which are partially or fully assembled via micro-LEGO. View Full-Text
Keywords: microassembly; MEMS; transfer printing; elastomer stamp; shape memory polymer microassembly; MEMS; transfer printing; elastomer stamp; shape memory polymer
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Kim, S. Micro-LEGO for MEMS. Micromachines 2019, 10, 267.

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