Micro-LEGO for MEMS
AbstractThe recently developed transfer printing-based microassembly called micro-LEGO has been exploited to enable microelectromechanical systems (MEMS) applications which are difficult to achieve using conventional microfabrication. Micro-LEGO involves transfer printing and thermal processing of prefabricated micro/nanoscale materials to assemble structures and devices in a 3D manner without requiring any wet or vacuum processes. Therefore, it complements existing microfabrication and other micro-assembly methods. In this paper, the process components of micro-LEGO, including transfer printing with polymer stamps, material preparation and joining, are summarized. Moreover, recent progress of micro-LEGO within MEMS applications are reviewed by investigating several example devices which are partially or fully assembled via micro-LEGO. View Full-Text
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Kim, S. Micro-LEGO for MEMS. Micromachines 2019, 10, 267.
Kim S. Micro-LEGO for MEMS. Micromachines. 2019; 10(4):267.Chicago/Turabian Style
Kim, Seok. 2019. "Micro-LEGO for MEMS." Micromachines 10, no. 4: 267.
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