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Micromachines 2019, 10(2), 145;

Piezoelectric MEMS Resonators for Cigarette Particle Detection

Microsystems, Actuators and Sensors Group, Universidad de Castilla-La Mancha, 13071 Ciudad Real, Spain
Institute of Semiconductor Technology (IHT), Technische Universität Braunschweig, Hans-Sommer-Straße 66, 38106 Braunschweig, Germany and Laboratory for Emerging Nanometrology (LENA), Langer Kamp 6a, 38106 Braunschweig, Germany
Author to whom correspondence should be addressed.
Received: 29 January 2019 / Revised: 17 February 2019 / Accepted: 19 February 2019 / Published: 21 February 2019
(This article belongs to the Special Issue 10th Anniversary of Micromachines)
PDF [7461 KB, uploaded 21 February 2019]
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In this work, we demonstrate the potential of a piezoelectric resonator for developing a low-cost sensor system to detect microscopic particles in real-time, which can be present in a wide variety of environments and workplaces. The sensor working principle is based on the resonance frequency shift caused by particles collected on the resonator surface. To test the sensor sensitivity obtained from mass-loading effects, an Aluminum Nitride-based piezoelectric resonator was exposed to cigarette particles in a sealed chamber. In order to determine the resonance parameters of interest, an interface circuit was implemented and included within both open-loop and closed-loop schemes for comparison. The system was capable of tracking the resonance frequency with a mass sensitivity of 8.8 Hz/ng. Although the tests shown here were proven by collecting particles from a cigarette, the results obtained in this application may have interest and can be extended towards other applications, such as monitoring of nanoparticles in a workplace environment. View Full-Text
Keywords: microelectromechanical systems (MEMS); piezoelectric; aluminum nitride (AlN); low-cost circuit; phase-locked loop; particle microelectromechanical systems (MEMS); piezoelectric; aluminum nitride (AlN); low-cost circuit; phase-locked loop; particle

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Toledo, J.; Ruiz-Díez, V.; Bertke, M.; Suryo Wasisto, H.; Peiner, E.; Sánchez-Rojas, J.L. Piezoelectric MEMS Resonators for Cigarette Particle Detection. Micromachines 2019, 10, 145.

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