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Open AccessArticle

Interactive Manipulation of Nonconductive Microparticles in Scanning Electron Microscope by a Virtual Nano-hand Strategy

1
Shanghai Key Laboratory of Intelligent Manufacturing and Robotics, School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, China
2
Department of Nutrition Science and Dietetics in the College of Agriculture, Biotechnology, and Natural Resources, University of Nevada, Reno, NV 89557, USA
3
Shenzhen Research Institute, Beijing Institute of Technology, Shenzhen 518000, China
*
Authors to whom correspondence should be addressed.
Micromachines 2019, 10(10), 670; https://doi.org/10.3390/mi10100670
Received: 8 September 2019 / Revised: 28 September 2019 / Accepted: 29 September 2019 / Published: 2 October 2019
(This article belongs to the Section A:Physics)
Micro/nano-manipulation is the fabrication of particular constructs on devices at the micro/nano-scale. Precise manipulation of microparticles is one of the key technological difficulties in manufacturing micro/nano-scale components. Based on scanning electron microscopy and nanomanipulator, this paper adopts a direct push method to operate randomly distributed microparticles into ordered structures. A two-probe interaction strategy is proposed to enable microparticle movements in all directions efficiently and avoid scratching the substrate surface. To overcome the uncertainties in micromanipulation, a virtual nano-hand strategy was also implemented: long-range advance of each microparticle is realized by multiple single-step pushes, whose trajectory is theoretically analyzed. The pushes are well programmed to imitate effects of a more powerful and determined hand. Experimental results show that the theoretical single-step motion trajectory is in line with actual operation, and the proposed strategy can ensure precise operation of the microparticles in all directions and improve reliability and effectiveness of operation.
Keywords: scanning electron microscope (SEM); interactive micromanipulation; nonconductive microparticle; virtual nano-hand strategy scanning electron microscope (SEM); interactive micromanipulation; nonconductive microparticle; virtual nano-hand strategy
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Liu, M.; Cheng, K.; Qin, X.; Wei, Z.; Borom, B.; Su, W.; Chen, J.; Feng, Y.; Wang, T.; Rao, J. Interactive Manipulation of Nonconductive Microparticles in Scanning Electron Microscope by a Virtual Nano-hand Strategy. Micromachines 2019, 10, 670.

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