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Open AccessArticle

Annealing and N2 Plasma Treatment to Minimize Corrosion of SiC-Coated Glass-Ceramics

1
Chemical Engineering Department, University of Florida College of Engineering, Gainesville, FL 32611, USA
2
Department of Restorative Dental Sciences, University of Florida College of Dentistry, Gainesville, FL 32610, USA
3
Plasma and Radiation Physics, National Institute for Laser, Laser Department, RO-077125 Bucharest, Romania
*
Author to whom correspondence should be addressed.
Materials 2020, 13(10), 2375; https://doi.org/10.3390/ma13102375
Received: 25 April 2020 / Revised: 9 May 2020 / Accepted: 19 May 2020 / Published: 21 May 2020
(This article belongs to the Special Issue Corrosion Science in Biomedical Materials)
To improve the chemical durability of SiC-based coatings on glass-ceramics, the effects of annealing and N2 plasma treatment were investigated. Fluorapatite glass-ceramic disks were coated with SiC via plasma-enhanced chemical vapor deposition (PECVD), treated with N2 plasma followed by an annealing step, characterized, and then immersed in a pH 10 buffer solution for 30 days to study coating delamination. Post-deposition annealing was found to densify the deposited SiC and lessen SiC delamination during the pH 10 immersion. When the SiC was treated with a N2 plasma for 10 min, the bulk properties of the SiC coating were not affected but surface pores were sealed, slightly improving the SiC’s chemical durability. By combining N2 plasma-treatment with a post-deposition annealing step, film delamination was reduced from 94% to 2.9% after immersion in a pH 10 solution for 30 days. X-ray Photoelectron spectroscopy (XPS) detected a higher concentration of oxygen on the surface of the plasma treated films, indicating a thin SiO2 layer was formed and could have assisted in pore sealing. In conclusion, post-deposition annealing and N2 plasma treatment where shown to significantly improve the chemical durability of PECVD deposited SiC films used as a coating for glass-ceramics. View Full-Text
Keywords: plasma treatment; coating; corrosion; pore sealing; glass ceramic; biomaterials plasma treatment; coating; corrosion; pore sealing; glass ceramic; biomaterials
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Fares, C.; Elhassani, R.; Partain, J.; Hsu, S.-M.; Craciun, V.; Ren, F.; Esquivel-Upshaw, J.F. Annealing and N2 Plasma Treatment to Minimize Corrosion of SiC-Coated Glass-Ceramics. Materials 2020, 13, 2375.

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