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Open AccessArticle

Evolution of the Internal Structure of Short-Period Cr/V Multilayers with Different Vanadium Layers Thicknesses

1
Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China
2
Shubnikov Institute of Crystallography of Federal Scientific Research Centre “Crystallography and Photonics” of the Russian Academy of Sciences, Leninskiy pr. 59, Moscow 119333, Russia
*
Authors to whom correspondence should be addressed.
Materials 2019, 12(18), 2936; https://doi.org/10.3390/ma12182936
Received: 19 August 2019 / Revised: 5 September 2019 / Accepted: 9 September 2019 / Published: 11 September 2019
(This article belongs to the Special Issue Sputtering Technologies for Growth of Advanced Thin Film)
Cr/V multilayer mirrors are suitable for applications in the “water window” spectral ranges. To study factors influencing the internal microstructure of Cr/V multilayers, multilayers with different vanadium layers thicknesses varying from 0.6 nm to 4.0 nm, and a fixed thickness (1.3 nm) of chromium layers, were fabricated and characterized with a set of experimental techniques. The average interface width characterizing a cumulative effect of different structure irregularities was demonstrated to exhibit non-monotonous dependence on the V layer thickness and achieve a minimal value of 0.31 nm when the thickness of the V layers was 1.2 nm. The discontinuous growth of very thin V films increased in roughness as the thickness of V layers decreased. The columnar growth of the polycrystalline grains in both materials became more pronounced with increasing thickness, resulting in a continuous increase in the interface width to a maximum of 0.9 nm for a 4 nm thickness of the V layer. View Full-Text
Keywords: multilayer; ultrathin metal films; columnar growth; soft X-rays multilayer; ultrathin metal films; columnar growth; soft X-rays
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MDPI and ACS Style

Qi, R.; Huang, Q.; Fei, J.; Kozhevnikov, I.V.; Liu, Y.; Li, P.; Zhang, Z.; Wang, Z. Evolution of the Internal Structure of Short-Period Cr/V Multilayers with Different Vanadium Layers Thicknesses. Materials 2019, 12, 2936.

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