Next Article in Journal
Exploiting Process-Related Advantages of Selective Laser Melting for the Production of High-Manganese Steel
Previous Article in Journal
Microhardness and In Vitro Corrosion of Heat-Treated Mg–Y–Ag Biodegradable Alloy
Open AccessArticle

Capability Study of Ti, Cr, W, Ta and Pt as Seed Layers for Electrodeposited Platinum Films on γ-Al2O3 for High Temperature and Harsh Environment Applications

SAWLab Saxony, IFW Dresden, P.O. Box 270116, 01171 Dresden, Germany
*
Author to whom correspondence should be addressed.
Academic Editor: Javier Narciso
Materials 2017, 10(1), 54; https://doi.org/10.3390/ma10010054
Received: 26 November 2016 / Revised: 22 December 2016 / Accepted: 5 January 2017 / Published: 11 January 2017
(This article belongs to the Section Structure Analysis and Characterization)
High temperature surface acoustic wave sensors based on radio frequency identification technology require adequate antennas of high efficiency and thermal stability for the signal transmission. Platinum is well known and frequently used as a material of choice for high temperature and harsh environment applications because of the high melting point and its chemical stability. Therefore, one way to realize high temperature stable antennas is the combination of a Pt metallization on an Al 2 O 3 substrate. As a cost-effective technique, the Pt film is deposited via electrochemical deposition. For this growth procedure, a pre-deposited metallization on the Al 2 O 3 layer is required. This paper analyzes the influence of various seed layers (Ta, Ti, W, Cr, Pt) on the morphology, stability and electrical properties of the electrochemically-grown Pt thick film after heat treatments up to 1000 C in air. We find an oxidation of all adhesion layers except for Pt, for which the best electrical properties were measured. Although significant areas of the films delaminate from the substrate, individual anchor structures retain a stable connection between the Pt layer and the rough Al 2 O 3 substrate. View Full-Text
Keywords: surface acoustic waves; high temperature sensors; planar Pt antenna; electrodeposition; Al2O3 surface acoustic waves; high temperature sensors; planar Pt antenna; electrodeposition; Al2O3
Show Figures

Graphical abstract

MDPI and ACS Style

Seifert, M.; Brachmann, E.; Rane, G.K.; Menzel, S.B.; Gemming, T. Capability Study of Ti, Cr, W, Ta and Pt as Seed Layers for Electrodeposited Platinum Films on γ-Al2O3 for High Temperature and Harsh Environment Applications. Materials 2017, 10, 54.

Show more citation formats Show less citations formats
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Access Map by Country/Region

1
Back to TopTop