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Sensors 2009, 9(2), 859-868;

Performance of a Diaphragmed Microlens for a Packaged Microspectrometer

Biomedical Engineering, University of Southern California, Los Angeles, CA, USA
Electrical Engineering and Electrophysics, University of Southern California, Los Angeles, CA USA
Cedars Sinai Medical Center, Los Angeles, CA, USA
Engineering Physics, McMaster University, Hamilton, Ontario, Canada
Biomedical Engineering, University of California at Davis, USA
Author to whom correspondence should be addressed.
Received: 4 November 2008 / Revised: 9 January 2009 / Accepted: 4 February 2009 / Published: 6 February 2009
(This article belongs to the Special Issue BioMEMS)
Full-Text   |   PDF [861 KB, uploaded 21 June 2014]


This paper describes the design, fabrication, packaging and testing of a microlens integrated in a multi-layered MEMS microspectrometer. The microlens was fabricated using modified PDMS molding to form a suspended lens diaphragm. Gaussian beam propagation model was used to measure the focal length and quantify M2 value of the microlens. A tunable calibration source was set up to measure the response of the packaged device. Dual wavelength separation by the packaged device was demonstrated by CCD imaging and beam profiling of the spectroscopic output. We demonstrated specific techniques to measure critical parameters of microoptics systems for future optimization of spectroscopic devices View Full-Text
Keywords: Microoptics; microlens; MEMS; spectroscopy; Gaussian propagation Microoptics; microlens; MEMS; spectroscopy; Gaussian propagation
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Lo, J.; Chen, S.-J.; Fang, Q.; Papaioannou, T.; Kim, E.-S.; Gundersen, M.; Marcu, L. Performance of a Diaphragmed Microlens for a Packaged Microspectrometer. Sensors 2009, 9, 859-868.

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