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Mid-Infrared Tunable Resonant Cavity Enhanced Detectors

Institute of Mechanical Systems, Department of Mechanical and Process Engineering, ETH Zurich. Center of Mechanics, Tannenstrasse 3, ETH Zentrum CLA J35, CH-8092 Zürich, Switzerland
Thin Film Physics Group, Technopark, ETH-Trakt PFA J25, Technoparkstrasse 1, CH-8005 Zürich, Switzerland
Authors to whom correspondence should be addressed.
Sensors 2008, 8(9), 5466-5478;
Received: 17 July 2008 / Revised: 1 September 2008 / Accepted: 1 September 2008 / Published: 4 September 2008
(This article belongs to the Special Issue State-of-the-Art Sensors Technology in Switzerland)
PDF [945 KB, uploaded 21 June 2014]


Mid-infrared detectors that are sensitive only in a tunable narrow spectral band are presented. They are based on the Resonant Cavity Enhanced Detector (RCED) principle and employing a thin active region using IV-VI narrow gap semiconductor layers. A Fabry-Pérot cavity is formed by two mirrors. The active layer is grown onto one mirror, while the second mirror can be displaced. This changes the cavity length thus shifting the resonances where the detector is sensitive. Using electrostatically actuated MEMS micromirrors, a very compact tunable detector system has been fabricated. Mirror movements of more than 3 μm at 30V are obtained. With these mirrors, detectors with a wavelength tuning range of about 0.7 μm have been realized. Single detectors can be used in mid-infrared micro spectrometers, while a detector arrangement in an array makes it possible to realize Adaptive Focal Plane Arrays (AFPA). View Full-Text
Keywords: RCED; MEMS; micromirror; Fabry-Perot; mid infrared; micro spectrometer RCED; MEMS; micromirror; Fabry-Perot; mid infrared; micro spectrometer
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Quack, N.; Blunier, S.; Dual, J.; Felder, F.; Arnold, M.; Zogg, H. Mid-Infrared Tunable Resonant Cavity Enhanced Detectors. Sensors 2008, 8, 5466-5478.

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