Advances in Crosstalk Reduction Techniques for Ultrasonic Transducer Arrays
Abstract
1. Introduction
2. Crosstalk Phenomenon in Ultrasonic Transducer Arrays
2.1. Definition and Relevance
2.2. Physical Mechanisms
2.3. Crosstalk in Acoustic Levitation and Particle Manipulation
3. Influence of Array Technology on Crosstalk
3.1. Capacitive Micromachined Ultrasonic Transducers (CMUT)
3.2. Piezoelectric Micromachined Ultrasonic Transducers (PMUT)
3.3. Bulk Piezoelectric Transducer Arrays
3.4. Emerging Technologies
3.5. Ferroelectret-Based Transducers
4. Characterization Techniques
4.1. Experimental Approaches
4.2. Numerical Methods (FEM, BEM, HPC)
4.3. Simplified Analytical Models and Equivalent Circuits
4.4. Directivity-Based Models
4.5. Quantitative Metrics for Crosstalk Evaluation
- Decay Rate of Parasitic Signals: used to quantify how rapidly unintended signals diminish over distance or time, offering insight into spatial or temporal leakage characteristics [13].
- Directivity Pattern Distortion: evaluated by comparing the ideal and perturbed beam patterns, this metric helps identify spatial deviations caused by mutual interactions among elements [27].
- Amplitude Variation Between Neighboring Elements: a practical and intuitive indicator, especially in array configurations, where unintended excitation of adjacent elements can be directly measured.
- Parasitic Resonance Levels Across Frequency: the presence of resonances unrelated to the desired operating mode, as a function of frequency, serves as a strong indicator of structural or acoustic crosstalk [97].
5. Crosstalk Reduction Strategies
5.1. Passive Crosstalk Reduction Techniques
5.1.1. Isolation Trenches
5.1.2. Kerfs and Structural Modifications
Isolation Trenches vs. Kerfs
5.1.3. Damping Materials
5.1.4. Polymer-Based Isolation Structures
5.1.5. Recent Material and Structural Innovations
5.1.6. Comparative Analysis
5.2. Active Crosstalk Reduction Methods
5.2.1. Transfer Matrix-Based Modeling
5.2.2. Active Waveform Generation and Cancellation Techniques
5.2.3. Active Reduction Using Corrective Voltages
5.2.4. Active Impedance Matching/Latching Techniques
5.2.5. Adaptive Crosstalk Cancellation
6. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
References
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| Technology | Key Characteristics | Crosstalk Type | Main Causes | Mitigation Techniques |
|---|---|---|---|---|
| CMUT | MEMS-based, wide bandwidth, fluid-coupled | Acoustic | Dispersive guided modes, interface waves | Aerogel layers, waveform shaping, structural decoupling |
| PMUT | CMOS-compatible, low impedance, air-backed | Acoustic | Coupling via air cavities, pressure waves | Partial/full decoupling, cavity redesign |
| Bulk PZT | High power, robust ceramics, solid state | Mechanical | Substrate vibration, poor isolation | Mechanical damping, element spacing, isolation materials |
| Method | Main Description | Target Technologies | References |
|---|---|---|---|
| Direct Measurement | Time/frequency domain analysis (e.g., decay rate, ToF, impulse response) | CMUT, PMUT, Bulk | Ramalli et al., 2019 [13]; Opielinski et al., 2014 [26] |
| Impedance Characterization | Detection of parasitic electromechanical effects | CMUT, MEMS | Savoia et al., 2017 [86]; Wang et al., 2016 [95] |
| Finite Element Method (FEM) | Coupled mechanical–electrical simulations for resonance and vibration modes | Bulk, CMUT, PMUT | Celmer and Opielinski, 2016 [25]; Reskal et al., 2024 [4] |
| HPC + FEA | Large-scale simulation of MEMS arrays using high-performance computing | PMUT | Pirouz et al., 2019 [88] |
| Fast Multipole Algorithm (FMA) | Accelerated boundary element modeling for large systems | CMUT | Shieh et al., 2016 [89] |
| Hybrid FEM/Analytical Models | Efficient modeling of periodic/infinite structures | Bulk | Ventura et al., 1992 [87] |
| Equivalent Circuit Models | Compact models with electrical analogs of mechanical behavior | CMUT, Bulk, PMUT | Pyo and Roh, 2017 [92]; Li et al., 2024 [94] |
| Directivity Pattern Analysis | Angular response mapping to detect field distortion | All | Bybi et al., 2013 [27]; Mo et al., 1990 [18] |
| Method | Targeted Crosstalk Type | Best Suited For | Advantages | Limitations |
|---|---|---|---|---|
| Isolation Trenches | Acoustic and Electrical | CMUTs, PMUTs | Strong isolation; compatible with MEMS integration | Performance sensitive to trench depth and material selection |
| Damping Materials | Acoustic | Imaging, flow metering | Broad-band attenuation; helps control resonances | May cause over-damping, reducing device sensitivity |
| Kerfs and Structural Cuts | Acoustic and Electrical | Bulk PZT Arrays | Simple to fabricate; effective crosstalk reduction | Alters resonance characteristics and may introduce mechanical stress |
| Polymer Walls and Geometry | Acoustic | High-frequency dense arrays | Precise design control; enables flexible and compact layouts | Requires complex modeling and careful layout optimization |
| Method/Study | Crosstalk Reduction Efficiency | Implementation Complexity | Impact on Image Quality/Advantages | References |
|---|---|---|---|---|
| Transfer matrix approach | 9–25 dB | Moderate; requires transfer function matrix and waveform optimization | Reduced sidelobes and improved angular response | Zhou et al. [98] |
| Programmable waveforms | 20–25.5 dB | High; involves programmable waveform transmit circuits | Significant crosstalk suppression maintaining linear operation | Zhou et al. [14] |
| Corrective Voltages—FEM (theoretical) | 15 dB (simulated) | Low; numerical validation only | Early concept of active cancellation | Cugnet et al. [99] |
| Corrective Voltages—Experimental CW | 6–10 dB | Low; validated on PZT27 prototypes | Robust to fabrication defects, improved directivity | Bybi et al. [100] |
| Corrective Voltages—Transient Regime | up to 30 dB | High; FFT-based signal computation | Improved beam directivity | Bybi et al. [101] |
| Adaptive filtering (NLMS, LMS) | 88.9–98.5% noise elimination | Moderate; requires adaptive filtering and band-split processing | Clear imaging optimization, robust to propagation | Lu et al. [102] |
| Bias-switching in ferroelectric arrays | 6.25–7.25 dB | Moderate; uses orthogonal biasing and voltage control | Reduced electrical crosstalk, enhanced dynamic displacement | Park et al. [59] |
| Neighbor excitation (Golay-coded or opposing signals) | 6–9 dB | Low to moderate; waveform shaping | Reduced arrival time fluctuation, improved waveform similarity | Liu et al., Kargary et al., Tong et al. [103,104,105] |
| Authors | Year | Technology | Crosstalk Mitigation Method/Result |
|---|---|---|---|
| CMUT Arrays | |||
| Voelz et al. [144] | 2024 | CMUT | Reception CMUT + preamplifier; intrinsic mechanical isolation. |
| Brock-Fisher [145] | 2020 | CMUT | ASIC phase compensation in hexagonal array; optimized synchronization. |
| Hossack and Wojcik [12] | 2005 | MEMS (Si) | Low-cost transmit/receive structure; improved resolution. |
| Bayram and Khuri-Yakub [146] | 2004 | CMUT | Membrane between adjacent elements to reduce coupling. |
| Zhou and Hossack [14] | 2007 | CMUT | Transfer matrix + programmable waveforms; −25 to −25.5 dB. |
| Bayram, Kupnik et al. [49] | 2007 | CMUT | Periodic membranes to create acoustic band gaps; up to −39 dB. |
| Hajati et al. [20] | 2016 | CMUT | Ground plane coupled to substrate; capacitive coupling reduced. |
| Yongrae Roh et al. [96] | 2004 | CMUT + Piezo | Structural trenches with polymer walls; 2D FEA validated. |
| Thomas Lehrmann et al. [147] | 2014 | CMUT | Row–column addressing architecture. |
| PMUT Arrays | |||
| Joshi et al. [132] | 2023 | PMUT | Polyimide/Si rigid PMUTs + physical isolation; crosstalk. |
| Leming He et al. [148] | 2017 | PMUT (7 × 7) | 3D FEM + dual active layers for performance boost. |
| Xu et al. [67] | 2019 | PMUT | Resonant cavity design: +259% sensitivity, reduced crosstalk. |
| Omer M. et al. [57] | 2023 | PMUT (4 × 4) | Cavity decoupling via FEM and experiments. |
| Bulk Piezoelectric Arrays (incl. PZT, PZ27) | |||
| Cheng et al. [17] | 2022 | PZT linear | PZT/epoxy with kerf optimization (PZFlex); −24.1 dB. |
| Bybi et al. [24] | 2020 | PZ27 | FEM under different electrical boundary conditions; active cancellation. |
| Lynnworth [136] | 1995 | Generic piezo | Acoustic/time isolation and packaging; effective separation. |
| Oliver and Walters [149] | 2005 | Piezoelectric | Anodic/electrochemical etching for electrical isolation. |
| S. Zhou et al. [98] | 2003 | PZT-5H linear | FEM-based corrective tensions on adjacent elements. |
| Mo et al. [19] | 2002 | PVDF | Micromachined diaphragm (SW/OW/DW); SW offers low crosstalk. |
| Cugnet et al. [99] | 2002 | PZT-5H linear | Transfer function-based excitations for pressure cancellation. |
| Bybi et al. [100] | 2013 | Piezoelectric | Corrective voltages on neighbors (FEM-validated). |
| Bybi et al. [101] | 2014 | PZ27 linear | Electrical model using motional currents. |
| Roh and Kim [15] | 2002 | Convex Piezo | Polymer walls + kerf variation; shape more effective. |
| Reskal et al. [4] | 2023 | PZ27 | SU8-Epoxy filler + layers; sensitivity/isolation trade-off. |
| 1–3 Piezocomposite Arrays | |||
| Démoré et al. [150] | 2007 | 1–3 Composite | Oblique electrodes reduce periodicity and spurious modes. |
| Chang Yang et al. [16] | 2012 | 1–3 Composite | Pseudo-random pillar layout to reduce coupling. |
| Hybrid/Phononic/Other Advanced Structures | |||
| Valappil et al. [66] | 2023 | Hybrid (PnC) | 3D phononic waveguide; 40 dB crosstalk reduction. |
| Fei et al. [151] | 2021 | Phononic Piezo plate | Passive isolation via shunts and bandgaps. |
| Signal Processing/Sparse/Imaging Techniques | |||
| Park et al. [59] | 2023 | CDMA multi-array | Phase-based demodulator; improved multi-sensor rejection. |
| Guo et al. [152] | 2021 | Imaging (TFM) | Half-Matrix Focusing (HFM); faster with less crosstalk. |
| Ramalli et al. [13] | 2019 | Sparse array | Topology optimization; sidelobe and crosstalk reduction. |
| Celmer et al. [31] | 2016 | Standard ultrasound | FEM with PCB/structural modifications. |
| Opielinski et al. [26] | 2014 | Ring array | Crosstalk path/source identification. |
| Wu Jiahe [153] | 2016 | Microstrip | Slotted lines + resistors; EM coupling inhibition. |
| Guo et al. [154] | 2004 | Flexible ultrasound | Ground traces between lines; reduced electric crosstalk. |
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Boujenoui, A.; El Atlas, N.; Bybi, A.; Reskal, H.; Elmaimouni, L. Advances in Crosstalk Reduction Techniques for Ultrasonic Transducer Arrays. Sensors 2025, 25, 7666. https://doi.org/10.3390/s25247666
Boujenoui A, El Atlas N, Bybi A, Reskal H, Elmaimouni L. Advances in Crosstalk Reduction Techniques for Ultrasonic Transducer Arrays. Sensors. 2025; 25(24):7666. https://doi.org/10.3390/s25247666
Chicago/Turabian StyleBoujenoui, Anouar, Nadia El Atlas, Abdelmajid Bybi, Hayat Reskal, and Lahoucine Elmaimouni. 2025. "Advances in Crosstalk Reduction Techniques for Ultrasonic Transducer Arrays" Sensors 25, no. 24: 7666. https://doi.org/10.3390/s25247666
APA StyleBoujenoui, A., El Atlas, N., Bybi, A., Reskal, H., & Elmaimouni, L. (2025). Advances in Crosstalk Reduction Techniques for Ultrasonic Transducer Arrays. Sensors, 25(24), 7666. https://doi.org/10.3390/s25247666

