Next Article in Journal
Wavelet-Based Filtration Procedure for Denoising the Predicted CO2 Waveforms in Smart Home within the Internet of Things
Next Article in Special Issue
Vertical Profiles of Pollution Particle Concentrations in the Boundary Layer above Paris (France) from the Optical Aerosol Counter LOAC Onboard a Touristic Balloon
Previous Article in Journal
An Electrochemical Immunosensor Based on a Self-Assembled Monolayer Modified Electrode for Label-Free Detection of α-Synuclein
Previous Article in Special Issue
Evaluation of a 10 nm Particle Number Portable Emissions Measurement System (PEMS)
Open AccessArticle

In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection

1
Institute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany
2
Research Center for Physics, Indonesian Institute of Sciences (LIPI), Tangerang Selatan 15314, Indonesia
3
Department of Metrology, Kenya Bureau of Standards (KEBS), Nairobi 00200, Kenya
4
Fraunhofer Wilhelm-Klauditz-Institut (WKI), 38108 Braunschweig, Germany
5
SCL-Sensor.Tech. Fabrication GmbH, 1220 Vienna, Austria
6
GETec Microscopy GmbH, 1220 Vienna, Austria
*
Author to whom correspondence should be addressed.
Sensors 2020, 20(3), 618; https://doi.org/10.3390/s20030618
Received: 14 December 2019 / Revised: 10 January 2020 / Accepted: 16 January 2020 / Published: 22 January 2020
(This article belongs to the Special Issue Sensors for Particulate Matter and Air Pollution)
In this study, we investigate the performance of two piezoresistive micro-electro-mechanical system (MEMS)-based silicon cantilever sensors for measuring target analytes (i.e., ultrafine particulate matters). We use two different types of cantilevers with geometric dimensions of 1000 × 170 × 19.5 µm3 and 300 × 100 × 4 µm3, which refer to the 1st and 2nd types of cantilevers, respectively. For the first case, the cantilever is configured to detect the fundamental in-plane bending mode and is actuated using a resistive heater. Similarly, the second type of cantilever sensor is actuated using a meandering resistive heater (bimorph) and is designed for out-of-plane operation. We have successfully employed these two cantilevers to measure and monitor the changes of mass concentration of carbon nanoparticles in air, provided by atomizing suspensions of these nanoparticles into a sealed chamber, ranging from 0 to several tens of µg/m3 and oversize distributions from ~10 nm to ~350 nm. Here, we deploy both types of cantilever sensors and operate them simultaneously with a standard laboratory system (Fast Mobility Particle Sizer, FMPS, TSI 3091) as a reference. View Full-Text
Keywords: MEMS piezoresistive cantilever sensors; dynamic mode; carbon nanoparticle; particle mass measurement MEMS piezoresistive cantilever sensors; dynamic mode; carbon nanoparticle; particle mass measurement
Show Figures

Graphical abstract

MDPI and ACS Style

Setiono, A.; Bertke, M.; Nyang’au, W.O.; Xu, J.; Fahrbach, M.; Kirsch, I.; Uhde, E.; Deutschinger, A.; Fantner, E.J.; Schwalb, C.H.; Wasisto, H.S.; Peiner, E. In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection. Sensors 2020, 20, 618.

Show more citation formats Show less citations formats
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Access Map by Country/Region

1
Search more from Scilit
 
Search
Back to TopTop