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Open AccessArticle

A Simple, Low-Cost Micro-Coating Method for Accuracy Improvement and Its Application in Pressure Sensors

1
School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, China
2
The State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China
*
Author to whom correspondence should be addressed.
Sensors 2019, 19(20), 4601; https://doi.org/10.3390/s19204601
Received: 11 September 2019 / Revised: 12 October 2019 / Accepted: 18 October 2019 / Published: 22 October 2019
(This article belongs to the Section Physical Sensors)
The demand for high-accuracy pressure sensors has increased with the advancement of technology in a wide variety of applications. However, it is generally difficult and expensive to improve the accuracy of the pressure sensor because it usually depends on the sensing principle and the internal physical structure of the pressure sensor, varying with its material and production process. Thus, a simple, low-cost, and generally applied post-processing method is proposed to improve the accuracy of pressure sensors. In this method, a micro-coating is cladded on the surface of the sensor, which effectively isolates the adverse effect of the external environment, similar to applying a “micro-protective clothing” on the pressure sensor. Experiments on seven pressure sensors are conducted, in which the micron-thin parylene polymer is utilized as the surface-deposited coating layer to demonstrate the improvement of accuracy. Results show that the accuracy was improved, with an average increase of approximately 62.54% than before cladding, while the sensitivity was almost unchanged. The principle of improving the accuracy of this method was also analyzed. The proposed simple, efficient, and low-cost method of cladding micro-coating for enhancing the accuracy of sensors can be widely applied in various fields of industrial automatic control. View Full-Text
Keywords: micro-coatings; accuracy improvement; pressure sensors; post-processing methods; protective barrier micro-coatings; accuracy improvement; pressure sensors; post-processing methods; protective barrier
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MDPI and ACS Style

Yao, J.-L.; Chen, Y.-X.; Qiang, W.-J.; Wang, X.-Z.; Wei, H.; Gao, B.-H.; Yang, X. A Simple, Low-Cost Micro-Coating Method for Accuracy Improvement and Its Application in Pressure Sensors. Sensors 2019, 19, 4601.

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