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Open AccessArticle

Improved Sensing Capability of Integrated Semiconducting Metal Oxide Gas Sensor Devices

1
Institute for Microelectronics, TU Wien, 1040 Vienna, Austria
2
STMicroelectronics Pte Ltd., Singapore 569508, Singapore
*
Author to whom correspondence should be addressed.
This paper is an extended version of our paper published in Conference Proceedings: Ayoub Lahlalia, Olivier Le Neel, Ravi Shankar, Siegfried Selberherr and Lado Filipovic. Enhanced Sensing Performance of Integrated Gas Sensors Devices. In Proceedings of the EUROSENSORS 2018, Graz, Austria, 9–12 September 2018.
Sensors 2019, 19(2), 374; https://doi.org/10.3390/s19020374
Received: 11 December 2018 / Revised: 7 January 2019 / Accepted: 15 January 2019 / Published: 17 January 2019
(This article belongs to the Special Issue Eurosensors 2018 Selected Papers)
Semiconducting metal oxide (SMO) gas sensors were designed, fabricated, and characterized in terms of their sensing capability and the thermo-mechanical behavior of the micro-hotplate. The sensors demonstrate high sensitivity at low concentrations of volatile organic compounds (VOCs) at a low power consumption of 10.5 mW. In addition, the sensors realize fast response and recovery times of 20 s and 2.3 min, respectively. To further improve the baseline stability and sensing response characteristics at low power consumption, a novel sensor is conceived of and proposed. Tantalum aluminum (TaAl) is used as a microheater, whereas Pt-doped SnO2 is used as a thin film sensing layer. Both layers were deposited on top of a porous silicon nitride membrane. In this paper, two designs are characterized by simulations and experimental measurements, and the results are comparatively reported. Simultaneously, the impact of a heat pulsing mode and rubber smartphone cases on the sensing performance of the gas sensor are highlighted. View Full-Text
Keywords: semiconducting metal oxide; gas sensor; microheater; electro-thermal-mechanical simulation; smartphone; ultra-low power semiconducting metal oxide; gas sensor; microheater; electro-thermal-mechanical simulation; smartphone; ultra-low power
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Lahlalia, A.; Le Neel, O.; Shankar, R.; Selberherr, S.; Filipovic, L. Improved Sensing Capability of Integrated Semiconducting Metal Oxide Gas Sensor Devices. Sensors 2019, 19, 374.

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